3	36	48	7359	Yamamoto	dummy	0	2007/11/29/4:16:24(130.34.95.43)	Cr/Au
-1	18	30	6898	hirano	dummy	2	2007/11/29/12:19:29(130.34.95.28)	SiN	2007/11/29/12:19:58(130.34.95.28)
1	0	12	6898	hirano	dummy	2	2007/11/29/12:21:32(130.34.95.28)	SiN
1	12	18	6898	kirita	dummy	0	2007/11/29/12:22:1(130.34.95.28)	SiN
-1	30	42	6909	jeong	dummy	2	2007/11/29/14:45:46(172.16.44.137)	Cr/Au	2007/12/1/14:21:18(130.34.95.37)
4	18	48	6936	Kawai Y	dummy	1	2007/11/29/15:48:56(130.34.95.43)	0
5	0	42	6936	Kawai Y	dummy	1	2007/11/29/15:50:9(130.34.95.43)	Shibaura2号機　納入
3	18	36	7359	伊藤	dummy	0	2007/11/29/16:47:38(172.16.44.137)	Cr/Au
1	18	24	6898	hirano	dummy	0	2007/11/30/13:54:10(130.34.95.28)	SiN
1	24	30	6898	kirita	dummy	0	2007/11/30/13:55:30(130.34.95.28)	SiN
1	30	31	6909	jeong	dummy	2	2007/11/29/14:45:46(172.16.44.137)	Cr/Au
2	24	36	6909	jeong	dummy	2	2007/12/1/15:44:6(130.34.95.37)	Cr/Au
-5	42	48	6937	Kurahashi	dummy	0	2007/12/2/7:28:43(130.34.95.43)	SiN	2007/12/5/5:24:11(130.34.95.43)
4	0	18	4771	miyashita	dummy	0	2007/12/3/14:32:17(130.34.89.180)	0
6	24	36	6421	T.BABA	dummy	2	2007/12/3/16:18:2(130.34.123.164)	Al.Au
6	36	42	6421	T.BABA	dummy	0	2007/12/3/16:19:47(130.34.123.164)	0
7	24	36	6898	settsu	dummy	2	2007/12/3/16:40:58(130.34.95.28)	W
-6	18	24	6937	Kurahashi	dummy	0	2007/12/3/16:50:16(130.34.95.43)	SiN	2007/12/5/22:17:43(130.34.95.43)
7	12	24	7281	date	dummy	2	2007/12/3/17:0:21(130.34.77.72)	SiO2
-5	42	48	6937	Kurahashi	dummy	0	2007/12/5/5:24:53(130.34.95.43)	W	2007/12/5/20:56:6(130.34.95.43)
-6	0	6	6937	Kurahashi	dummy	0	2007/12/5/17:43:50(130.34.95.43)	W	2007/12/5/22:17:40(130.34.95.43)
7	36	48	6909	noriki	dummy	0	2007/12/5/17:58:51(130.34.95.37)	Ta
-8	0	6	6909	noriki	dummy	0	2007/12/5/17:59:25(130.34.95.37)	Ta	2007/12/7/23:0:3(172.16.44.136)
5	42	44	6937	Kurahashi	dummy	0	2007/12/5/5:24:53(130.34.95.43)	W
8	18	30	6968	Narumi	dummy	0	2007/12/7/0:53:54(130.34.95.15)	SiO2
7	0	12	6937	Y.G. JIANG	dummy	0	2007/12/7/0:54:53(130.34.95.43)	Cr-Au
-10	18	30	6909	yamada	dummy	0	2007/12/7/14:31:57(130.34.95.37)	0	2007/12/7/14:38:58(130.34.95.37)
-10	18	30	6909	yamada	dummy	0	2007/12/7/14:39:17(130.34.95.37)	Ta/Cu	2007/12/10/9:25:3(172.16.44.136)
9	24	30	7281	date	dummy	0	2007/12/7/15:26:0(130.34.77.72)	Ti/Pt
10	30	42	7281	date	dummy	0	2007/12/7/15:26:32(130.34.77.72)	SiO2
10	42	48	4771	Miyashita	dummy	0	2007/12/7/22:47:25(130.34.89.180)	SiO2
-12	0	12	4771	Miyashita	dummy	1	2007/12/7/23:1:16(130.34.89.180)	Al	2007/12/10/23:26:33(130.34.89.180)
11	24	36	6898	settsu	dummy	0	2007/12/8/11:32:19(130.34.95.28)	W
11	36	42	6898	sanker	dummy	0	2007/12/8/11:32:49(130.34.95.28)	W
12	18	30	6936	kawaguchi	dummy	0	2007/12/8/13:29:25(130.34.95.43)	Au/Cr
9	6	12	6968	Narumi	dummy	0	2007/12/9/1:46:33(130.34.95.15)	SiO2
12	30	42	6909	fujiwara	dummy	0	2007/12/9/12:15:42(130.34.95.37)	Ta/Au
9	30	36	7281	date	dummy	0	2007/12/9/14:20:20(130.34.77.72)	Ti/Pt
10	18	21	6909	yamada	dummy	0	2007/12/7/14:39:17(130.34.95.37)	Ta/Cu
11	12	24	6909	yamada	dummy	0	2007/12/10/9:28:41(172.16.44.136)	Ta/Cu
-11	42	48	6937	Tsukamoto	dummy	0	2007/12/10/14:10:21(130.34.95.43)	Au/Cr	2007/12/10/14:11:0(130.34.95.43)
13	0	12	4830	jeong.SC	dummy	0	2007/12/10/17:22:5(130.34.95.30)	Cr/Au
13	18	30	6968	A.Asakura	dummy	0	2007/12/10/19:16:27(130.34.95.15)	Cr/Au
14	18	30	6968	A.Asakura	dummy	0	2007/12/10/19:16:48(130.34.95.15)	Cr/Au
11	0	6	4771	Miyashita	dummy	0	2007/12/10/20:26:13(130.34.95.43)	SiO2
-13	30	42	6936	kasuga	dummy	0	2007/12/10/20:26:54(130.34.95.43)	Ta/Pt	2007/12/11/11:59:54(130.34.95.43)
-14	30	36	4771	Miyashita	dummy	0	2007/12/11/5:18:8(130.34.89.180)	0	2007/12/11/5:18:50(130.34.89.180)
11	42	48	4771	Miyashita	dummy	0	2007/12/11/5:19:10(130.34.89.180)	0
12	0	6	4771	Miyashita	dummy	1	2007/12/11/5:19:33(130.34.89.180)	Au/Cr
13	36	48	6936	kasuga	dummy	0	2007/12/11/12:1:31(130.34.95.43)	1.Al, 2.Ta, 3.Pt
-14	36	42	6936	kasuga	dummy	0	2007/12/11/12:2:7(130.34.95.43)	Al	2007/12/11/13:6:43(130.34.95.43)