1	19	44	6908	Kikuchi	dummy	0	2006/11/1/9:37:8(172.16.44.142)	W-CVD使用
2	26	40	6909	Sakaguchi	dummy	0	2006/11/1/19:32:28(172.16.44.140)	p-SiN使用
3	22	42	6909	Sakaguchi	dummy	0	2006/11/2/17:1:8(130.34.95.37)	p-SiN使用
6	20	36	6908	konno	dummy	0	2006/11/6/8:4:11(130.34.95.37)	P-SiN CVD使用
7	22	46	6908	Ali	dummy	0	2006/11/6/21:6:16(130.34.95.37)	0
-8	19	46	6908	Kikuchi	dummy	0	2006/11/6/21:7:54(130.34.95.37)	W-CVD使用	2006/11/7/9:30:47(130.34.95.37)
9	19	46	6908	Kikuchi	dummy	0	2006/11/7/9:31:7(130.34.95.37)	W-CVD使用
8	22	38	6908	Ali	dummy	0	2006/11/7/16:10:3(172.16.44.142)	0
8	40	48	6909	Sakaguchi	dummy	0	2006/11/8/12:25:6(172.16.44.142)	0
10	20	28	6909	liang	dummy	0	2006/11/9/20:48:49(172.16.44.140)	0
10	30	46	6909	Sakaguchi	dummy	0	2006/11/9/21:8:15(172.16.44.140)	0
11	24	32	6909	Sakaguchi	dummy	0	2006/11/10/14:30:11(172.16.44.142)	0
13	26	36	6908	Kikuchi	dummy	1	2006/11/13/9:36:42(130.34.95.37)	0
-15	22	48	6909	beatrix	dummy	0	2006/11/15/11:8:36(172.16.44.142)	0	2006/11/15/11:9:49(172.16.44.142)
15	22	25	6909	beatrix	dummy	0	2006/11/15/11:8:36(172.16.44.142)	0
-15	28	36	6909	Liang	dummy	0	2006/11/15/11:22:23(172.16.44.129)	0	2006/11/15/13:58:33(172.16.44.142)
15	28	30	6909	Liang	dummy	0	2006/11/15/11:22:23(172.16.44.129)	0
16	20	26	6909	liang	dummy	0	2006/11/15/14:0:15(172.16.44.142)	0
16	30	38	6908	Kikuchi	dummy	0	2006/11/15/18:21:31(130.34.95.37)	0
17	19	46	6908	Kikuchi	dummy	0	2006/11/15/18:24:53(130.34.95.37)	0
18	26	46	6909	Sakaguchi	dummy	0	2006/11/15/18:59:12(172.16.44.142)	0
-16	40	48	5318	yonemoto	dummy	0	2006/11/15/21:12:0(130.34.231.209)	0	2006/11/16/17:47:27(130.34.231.209)
18	20	26	6909	liang	dummy	0	2006/11/16/11:41:34(172.16.44.142)	0
16	44	48	5318	yonemoto	dummy	0	2006/11/16/17:47:43(130.34.231.209)	0
17	0	4	5318	yonemoto	dummy	0	2006/11/16/22:54:26(172.16.44.140)	0
20	22	30	5318	yonemoto	dummy	0	2006/11/17/0:20:42(172.16.44.142)	0
19	20	44	6909	Sakaguchi	dummy	0	2006/11/17/17:32:14(172.16.44.142)	0
21	22	44	6908	Ali	dummy	0	2006/11/20/11:45:38(130.34.95.37)	0
-21	44	48	6909	Sakaguchi	dummy	0	2006/11/20/14:45:11(172.16.44.142)	0	2006/11/21/18:26:11(172.16.44.140)
22	18	48	6909	Sakaguchi	dummy	0	2006/11/20/14:45:30(172.16.44.142)	途中 p-SIn CVDも使用
-23	16	32	5318	wada	dummy	0	2006/11/20/16:36:19(130.34.231.209)	0	2006/11/23/12:55:33(172.16.44.140)
24	19	46	6908	Kikuchi	dummy	0	2006/11/22/14:13:42(130.34.95.37)	W-CVD使用
23	34	48	6909	Sakaguchi	dummy	0	2006/11/22/23:4:50(172.16.44.142)	0
23	16	28	5318	wada	dummy	0	2006/11/20/16:36:19(130.34.231.209)	0
27	26	34	6908	Kikuchi	dummy	1	2006/11/24/17:6:1(130.34.95.37)	チャンバー清掃
25	24	48	6909	Sakaguchi	dummy	0	2006/11/24/18:58:2(130.34.95.37)	0
27	34	48	6909	Sakaguchi	dummy	0	2006/11/27/12:11:21(130.34.95.37)	0
-29	20	48	6909	Jeong	dummy	0	2006/11/27/21:20:53(130.34.95.37)	TEL LPCVD使用	2006/11/29/20:16:52(130.34.95.37)
28	23	32	6908	Kikuchi	dummy	0	2006/11/28/10:7:31(130.34.95.37)	0
28	32	44	6908	Ali	dummy	0	2006/11/28/12:18:10(130.34.95.37)	0
29	20	43	6909	Jeong	dummy	0	2006/11/27/21:20:53(130.34.95.37)	TEL LPCVD使用