-1 24 28 6936 kikuchi dummy 0 2006/8/28/19:29:8(130.34.95.43) 0 2006/9/1/11:25:33(130.34.95.43) 1 28 42 6937 Kang (M2) dummy 0 2006/8/30/12:29:22(130.34.95.43) 0 1 0 6 6937 k.hirano dummy 0 2006/8/31/12:41:8(130.34.95.43) 0 1 24 25 6936 kikuchi dummy 0 2006/8/28/19:29:8(130.34.95.43) 0 2 31 40 6937 Kang (M2) dummy 0 2006/9/2/15:7:23(130.34.95.43) 0 4 26 36 6937 Kang (M2) dummy 0 2006/9/3/16:59:29(130.34.95.43) 0 4 36 40 6937 Kang (M2) dummy 0 2006/9/4/14:21:39(130.34.95.43) 0 -6 27 41 6937 k.hirano dummy 0 2006/9/5/12:8:37(130.34.95.43) 0 2006/9/5/12:9:27(130.34.95.43) 5 27 41 6937 k.hirano dummy 0 2006/9/5/12:9:21(130.34.95.43) 0 -6 22 36 6936 higashitani dummy 0 2006/9/5/15:32:18(130.34.95.43) 0 2006/9/6/13:54:31(130.34.95.43) 5 41 46 6937 k.hirano dummy 0 2006/9/5/19:54:3(172.16.44.140) 0 6 22 30 6936 higashitani dummy 0 2006/9/5/15:32:18(130.34.95.43) 0 7 22 30 6936 kikuchi dummy 0 2006/9/6/16:57:43(130.34.95.43) 0 7 30 34 6965 N.Matsuyama dummy 0 2006/9/6/17:55:34(130.34.95.31) 0 -7 36 44 6937 Kang (M2) dummy 0 2006/9/6/19:36:55(130.34.95.43) 0 2006/9/7/17:32:54(130.34.95.43) 7 34 35 6965 N.Matsuyama dummy 0 2006/9/7/16:46:49(172.16.44.142) 0 7 36 38 6937 Kang (M2) dummy 0 2006/9/6/19:36:55(130.34.95.43) 0 8 32 42 6937 Kang (M2) dummy 0 2006/9/7/17:52:59(130.34.95.43) 0 8 26 30 6965 N.Matsuyama dummy 0 2006/9/7/20:4:21(130.34.95.31) 0 8 20 26 6936 Nishizawa dummy 0 2006/9/7/20:48:13(130.34.95.43) 0 8 30 32 6936 kikuchi dummy 0 2006/9/8/11:47:3(130.34.95.43) 0 -8 42 46 6936 kikuchi dummy 0 2006/9/8/11:47:46(130.34.95.43) 0 2006/9/8/19:19:39(130.34.95.43) -11 20 24 6965 N.Matsuyama dummy 0 2006/9/8/16:27:15(130.34.95.31) 0 2006/9/8/21:25:6(130.34.95.31) 9 26 30 6936 kikuchi dummy 0 2006/9/8/19:20:18(130.34.95.43) 0 9 31 35 6965 N.Matsuyama dummy 0 2006/9/8/21:24:41(130.34.95.31) 0 9 35 42 6937 Kang (M2) dummy 0 2006/9/8/22:47:18(130.34.95.43) 0 9 42 48 6936 kawai dummy 1 2006/9/9/13:53:9(130.34.95.43) チャンバ開放、真空引き 11 22 26 6936 kikuchi dummy 0 2006/9/10/18:37:29(130.34.95.43) 0 11 28 34 6937 Jeongdai Jo dummy 0 2006/9/11/11:8:35(130.34.95.43) 0 12 34 42 6965 Zhao Yang dummy 0 2006/9/11/11:47:47(130.34.95.31) 0 12 30 34 6965 Hu dummy 0 2006/9/11/12:7:10(130.34.95.31) 0 -11 34 37 6937 Kang (M2) dummy 0 2006/9/11/14:17:11(130.34.95.43) 0 2006/9/11/14:18:11(130.34.95.43) 11 39 42 6937 Kang (M2) dummy 0 2006/9/11/18:5:15(130.34.95.43) 0 13 28 36 6937 Jeongdai Jo dummy 0 2006/9/12/8:34:14(172.16.44.153) 0 12 42 46 6965 douzono dummy 0 2006/9/12/15:43:4(130.34.95.31) 0 14 26 36 6965 R.Ito dummy 0 2006/9/13/12:45:56(130.34.95.31) 0 13 38 44 6936 kikuchi dummy 0 2006/9/13/15:4:45(130.34.95.43) 0 14 42 46 6936 kikuchi dummy 0 2006/9/13/15:13:28(130.34.95.43) 0 -19 19 24 6936 Kasuga dummy 0 2006/9/14/13:22:39(130.34.95.43) 0 2006/9/15/10:22:28(130.34.95.43) 15 38 44 6937 Jeongdai Jo dummy 0 2006/9/15/13:33:6(172.16.44.153) 0 19 22 30 6968 yamanishi dummy 0 2006/9/19/7:47:46(130.34.95.15) 0 -20 30 36 6936 Kasuga dummy 1 2006/9/19/14:43:46(130.34.95.43) 0 2006/9/19/14:44:0(130.34.95.43) -20 30 36 6936 Kasuga dummy 0 2006/9/19/14:44:16(130.34.95.43) 0 2006/9/19/20:56:16(130.34.95.43) 19 33 38 6968 山西 dummy 0 2006/9/19/16:31:33(130.34.95.15) 0 21 18 26 5251 nakamura dummy 0 2006/9/19/21:0:49(130.34.95.8) 0 20 28 34 6937 Jeongdai Jo dummy 0 2006/9/19/21:23:59(172.16.44.153) 0 20 34 43 6937 Kang (M2) dummy 0 2006/9/19/21:52:53(130.34.95.43) 0 21 30 34 6936 kikuchi dummy 0 2006/9/20/19:29:19(130.34.95.43) 0 -20 43 48 6937 nozawa dummy 0 2006/9/20/19:56:57(130.34.95.43) 0 2006/9/20/21:5:42(130.34.95.43) 21 0 6 6937 nozawa dummy 0 2006/9/20/19:57:40(130.34.95.43) 0 20 43 45 6937 nozawa dummy 0 2006/9/20/19:56:57(130.34.95.43) 0 21 28 30 6936 kikuchi dummy 0 2006/9/21/11:43:20(130.34.95.43) 0 21 35 42 5251 nakamura dummy 0 2006/9/21/15:11:15(130.34.95.8) 0 22 18 28 6937 nozawa dummy 0 2006/9/21/15:19:46(130.34.95.43) 0 21 42 45 5251 nakamura dummy 0 2006/9/21/20:28:36(130.34.95.43) 0 22 28 31 6937 nozawa dummy 0 2006/9/22/10:52:18(130.34.95.43) 0 22 31 34 6937 nozawa dummy 0 2006/9/22/12:57:40(130.34.95.43) 0 23 27 34 6937 Kang (M2) dummy 0 2006/9/22/20:49:50(130.34.95.43) 0 23 34 36 6937 Kang (M2) dummy 0 2006/9/23/15:24:9(130.34.95.43) 0 23 36 38 6937 Kang (M2) dummy 0 2006/9/23/17:33:59(172.16.44.142) 0 26 26 38 6965 R.Ito dummy 0 2006/9/25/12:47:28(130.34.95.31) 0 27 26 36 6937 Kang (M2) dummy 0 2006/9/26/12:46:56(130.34.95.43) 0 27 18 24 6936 Kasuga dummy 0 2006/9/26/14:3:55(130.34.95.43) 0 26 38 44 6965 R.Ito dummy 0 2006/9/26/15:27:11(130.34.95.31) 0 29 18 42 6937 Song dummy 0 2006/9/26/21:56:19(130.34.95.43) Substrate 630 um etching 27 40 48 6937 Kang (M2) dummy 0 2006/9/27/19:17:55(130.34.95.43) 0 29 42 48 6937 Song dummy 0 2006/9/29/11:34:38(172.16.44.140) 0