1	18	21	6908	konno	dummy	0	2006/8/31/12:52:52(130.34.95.43)	0
8	28	30	6908	konno	dummy	0	2006/9/8/10:22:2(172.16.44.140)	SiN etching
12	20	24	6908	konno	dummy	0	2006/9/11/16:33:38(130.34.95.37)	SiN etch ＆O2 ash
13	20	24	6908	konno	dummy	0	2006/9/13/9:50:57(172.16.44.142)	0
15	26	30	6908	konno	dummy	0	2006/9/14/12:54:18(130.34.95.43)	0
20	28	31	6908	konno	dummy	0	2006/9/20/11:30:27(172.16.44.140)	0
22	20	22	6908	konno	dummy	0	2006/9/22/7:15:43(130.34.95.37)	0
25	26	32	6908	konno	dummy	0	2006/9/25/13:5:4(172.16.44.140)	0
27	28	32	6908	konno	dummy	0	2006/9/27/14:17:4(172.16.44.142)	0