7	20	28	6908	konno	dummy	0	2006/11/7/11:0:8(172.16.44.142)	SiN etching
10	26	30	6908	konno	dummy	0	2006/11/10/7:20:36(172.16.44.140)	0
17	28	32	6908	konno	dummy	0	2006/11/17/13:44:13(172.16.44.140)	0
20	22	26	6908	konno	dummy	0	2006/11/20/8:15:36(172.16.44.142)	0