6/2 14:20    Etching rate of Au is about 13nm/min with SF6. (Voltage: 2.5kV Current:25mA) by Miura (Yugami & Sata Lab.)
12/20 23:06	FAB電源・コイル電源の電圧調節ダイアルは”やさしく”扱ってください。壊れます。	Katsube (Hane & Sasaki Lab.)
10/15 12:51	When you close the valve (Ｖ１７：It isolates main chamber & load lock chamber.), you don't have to close the valve too firmly.	Katsube (Hane & Kanamori Lab.)