9 26 36 6937 kitamura dummy 0 2006/11/8/16:36:25(130.34.95.43) 0 17 20 48 6936 kikuchi dummy 0 2006/11/14/16:36:44(130.34.95.43) 0 18 0 48 6936 kikuchi dummy 0 2006/11/14/21:11:8(130.34.95.43) 0 -15 38 44 6937 li dummy 0 2006/11/14/21:54:54(130.34.95.43) 0 2006/11/14/22:25:36(130.34.95.43) -15 41 46 6937 li dummy 0 2006/11/14/22:26:17(130.34.95.43) 0 2006/11/15/13:38:56(130.34.95.43) 20 21 34 6937 kitamura dummy 0 2006/11/15/19:5:14(130.34.95.43) 0 -22 22 40 6936 kitamura dummy 0 2006/11/20/16:24:45(130.34.95.43) Anodic bonding 2006/11/21/17:13:39(130.34.95.43) -21 30 46 6936 higashitani dummy 0 2006/11/21/9:46:55(130.34.95.43) 0 2006/11/21/13:28:33(130.34.95.43) 26 34 48 6936 higashitani dummy 0 2006/11/26/16:50:48(130.34.95.43) 0 -28 34 48 6936 choe,s-h dummy 0 2006/11/27/20:37:28(130.34.95.43) 0 2006/11/28/18:29:37(130.34.95.43) 28 34 39 6936 choe,s-h dummy 0 2006/11/27/20:37:28(130.34.95.43) 0 29 24 36 6937 choe,s-h dummy 0 2006/11/28/18:30:3(130.34.95.43) 0 29 36 48 6936 choe,s-h dummy 0 2006/11/29/15:27:24(130.34.95.43) 0 -30 38 44 6937 li dummy 0 2006/11/29/21:55:8(130.34.95.43) 0 2006/11/30/19:30:56(130.34.95.43) 30 20 36 6936 choe,s-h dummy 0 2006/11/30/1:28:8(130.34.95.43) 0 30 38 41 6937 li dummy 0 2006/11/29/21:55:8(130.34.95.43) 0