9	20	32	6908	konno	dummy	0	2007/1/9/7:26:11(130.34.95.37)	SiN etch ��O2 ash
10	21	31	6908	konno	dummy	0	2007/1/10/7:41:11(130.34.95.37)	SiN etch ��O2 ash
12	20	32	6908	konno	dummy	0	2007/1/12/7:44:34(130.34.95.37)	Cl2縲。cl3菴ｿ逕ｨ
16	20	34	6908	konno	dummy	0	2007/1/16/7:8:20(130.34.95.37)	Bcl3縲，l2
17	24	36	6909	satou	dummy	0	2007/1/17/2:20:21(130.34.95.37)	0
-24	26	38	6965	R.Ito	dummy	0	2007/1/22/17:44:8(130.34.95.31)	FAB縺ｫ縺ｦ蝪ｩ邏�繧ｬ繧ｹ菴ｿ逕ｨ	2007/1/23/21:34:28(130.34.95.31)
25	26	38	6965	R.Ito	dummy	0	2007/1/23/21:36:18(130.34.95.31)	FAB縺ｫ縺ｦ蝪ｩ邏�繧ｬ繧ｹ菴ｿ逕ｨ
24	26	38	6909	satou	dummy	0	2007/1/24/2:54:7(172.16.44.210)	0
25	14	26	6908	konno	dummy	0	2007/1/24/7:41:12(130.34.95.37)	Cl2縲。cl3菴ｿ逕ｨ
-26	18	32	6908	konno	dummy	0	2007/1/25/8:5:15(172.16.44.132)	Cl2縲。cl3菴ｿ逕ｨ	2007/1/25/11:59:50(172.16.44.131)
29	18	32	6908	konno	dummy	0	2007/1/29/7:6:40(130.34.95.37)	Cl2縲。cl3菴ｿ逕ｨ