4	20	30	6908	konno	dummy	0	2006/8/30/10:49:26(130.34.95.37)	Cl2、Bcl3使用
1	40	42	6909	Sakaguchi	dummy	0	2006/9/1/18:18:52(172.16.44.142)	O2 clean only
6	32	44	6909	beajicheol	dummy	0	2006/9/6/14:27:19(172.16.44.140)	0
8	22	32	6908	konno	dummy	0	2006/9/7/7:5:13(172.16.44.140)	Cl2、Bcl3使用
8	32	46	6909	beajicheol	dummy	0	2006/9/7/21:12:50(172.16.44.142)	0
11	24	36	6965	R.Ito	dummy	0	2006/9/8/13:18:9(130.34.95.31)	0
9	30	42	6909	beajicheol	dummy	0	2006/9/8/22:19:59(172.16.44.142)	0
9	42	46	6909	Sakaguchi	dummy	0	2006/9/8/23:32:30(130.34.95.37)	0
11	36	46	6909	beajicheol	dummy	0	2006/9/11/18:5:25(172.16.44.142)	0
12	24	31	6909	Sakaguchi	dummy	0	2006/9/11/22:11:9(172.16.44.142)	0
12	18	20	6908	konno	dummy	0	2006/9/12/8:21:19(172.16.44.142)	SiN etch
12	31	44	6909	beajicheol	dummy	0	2006/9/12/10:51:48(172.16.44.142)	0
-13	20	24	6908	konno	dummy	0	2006/9/12/13:16:24(172.16.44.140)	0	2006/9/13/9:50:30(172.16.44.142)
13	24	44	6909	beajicheol	dummy	0	2006/9/12/21:9:47(172.16.44.142)	0
13	20	22	6908	konno	dummy	0	2006/9/12/13:16:24(172.16.44.140)	0
-15	18	28	6908	konno	dummy	0	2006/9/13/11:58:16(130.34.95.37)	Cl2、Bcl3使用	2006/9/13/15:51:57(172.16.44.142)
15	19	33	6909	konno	dummy	0	2006/9/13/15:52:38(172.16.44.142)	Cl2、Bcl3使用
-14	38	42	6909	Sakaguchi	dummy	0	2006/9/14/15:0:54(130.34.95.37)	O2 clean only	2006/9/14/15:38:53(172.16.44.140)
14	32	34	6909	Sakaguchi	dummy	0	2006/9/14/15:38:48(172.16.44.140)	O2 clean only
-15	38	44	6909	Sakaguchi	dummy	0	2006/9/14/16:27:21(172.16.44.140)	Cl2 BCl3	2006/9/15/12:41:41(130.34.95.37)
-20	18	32	6908	konno	dummy	0	2006/9/15/12:22:21(172.16.44.142)	Cl2、Bcl3使用	2006/9/15/12:25:42(172.16.44.142)
21	20	32	6908	konno	dummy	0	2006/9/15/12:26:9(172.16.44.142)	0
22	26	40	6965	R.Ito	dummy	0	2006/9/20/16:38:35(130.34.95.31)	FABにて塩素ガス使用
23	26	40	6909	Sakaguchi	dummy	0	2006/9/22/17:14:57(130.34.95.37)	Cl2 BCl3 使用
25	26	40	6909	Sakaguchi	dummy	0	2006/9/25/11:40:47(130.34.95.37)	0
-27	20	36	6908	konno	dummy	0	2006/9/25/14:2:32(172.16.44.140)	Cl2、Bcl3使用	2006/9/27/14:16:39(172.16.44.142)
26	27	36	6909	Sakaguhi & Sun	dummy	0	2006/9/26/13:14:22(130.34.95.37)	0
27	20	31	6908	konno	dummy	0	2006/9/25/14:2:32(172.16.44.140)	Cl2、Bcl3使用
29	20	31	6908	konno	dummy	0	2006/9/28/11:3:55(172.16.44.142)	Cl2,Bcl3
28	28	36	6909	sun	dummy	0	2006/9/28/13:10:52(130.34.95.37)	0