2	20	32	6908	konno	dummy	0	2006/8/1/7:42:4(172.16.44.138)	Cl2、Bcl3使用
1	29	38	5318	大竹	dummy	0	2006/8/1/13:28:28(130.34.231.209)	SiO2エッチ・アッシュ
2	32	42	6909	beajicheol	dummy	0	2006/8/2/9:21:24(130.34.95.37)	W-etching
2	42	48	6909	beajicheol	dummy	0	2006/8/2/19:19:29(130.34.95.37)	W-etching
3	34	48	6908	Kikuchi	dummy	1	2006/8/3/13:12:57(130.34.95.37)	装置立ち下げ
15	30	38	6909	Kobayasi Risato	dummy	0	2006/8/15/1:11:32(172.16.44.146)	0
17	28	32	6908	konno	dummy	0	2006/8/17/13:6:48(172.16.44.140)	0
18	20	24	6908	konno	dummy	0	2006/8/17/14:50:20(172.16.44.140)	0
18	28	30	6908	konno	dummy	0	2006/8/18/8:48:56(172.16.44.140)	0
-21	20	36	6909	liang	dummy	0	2006/8/18/10:17:56(172.16.44.143)	0	2006/8/21/10:40:6(172.16.44.143)
21	20	24	6909	liang	dummy	0	2006/8/18/10:17:56(172.16.44.143)	0
-24	22	32	6908	konno	dummy	0	2006/8/23/9:19:20(172.16.44.140)	Cl2使用	2006/8/23/10:30:53(172.16.44.140)
-25	22	32	6908	konno	dummy	0	2006/8/23/10:31:23(172.16.44.140)	0	2006/8/25/6:52:51(172.16.44.140)
24	30	34	6909	Sakaguchi	dummy	0	2006/8/24/13:20:2(172.16.44.140)	CF4 gas
25	18	30	6908	konno	dummy	0	2006/8/25/6:53:13(172.16.44.140)	0
29	20	32	6908	konno	dummy	0	2006/8/25/13:11:11(172.16.44.142)	Cl2使用
29	32	36	6909	Sakaguchi	dummy	0	2006/8/29/11:30:50(172.16.44.142)	0
30	24	28	6909	Sakaguchi	dummy	0	2006/8/29/13:53:45(172.16.44.142)	0