1	0	18	6936	kawai	dummy	0	2006/10/31/22:0:10(130.34.95.43)	FAB Cl etching
1	32	38	6909	Sakaguchi	dummy	0	2006/11/1/15:46:28(172.16.44.142)	0
2	20	34	6908	konno	dummy	0	2006/11/1/15:57:54(130.34.95.37)	0
8	34	48	6909	Sakaguchi	dummy	0	2006/11/8/0:53:31(130.34.95.37)	0
-9	22	36	6908	konno	dummy	0	2006/11/8/7:58:19(130.34.95.37)	Cl2、Bcl3使用	2006/11/8/15:34:44(172.16.44.140)
9	18	26	6908	konno	dummy	0	2006/11/8/15:35:24(172.16.44.140)	0
10	22	40	6909	Sakaguchi	dummy	0	2006/11/9/17:43:39(172.16.44.140)	Cl2 BCL3
-10	18	22	6908	konno	dummy	0	2006/11/10/7:17:13(172.16.44.140)	CF4、Ar	2006/11/10/8:52:56(172.16.44.140)
10	18	20	6908	konno	dummy	0	2006/11/10/7:17:13(172.16.44.140)	CF4、Ar
13	18	30	6908	konno	dummy	0	2006/11/10/12:5:7(130.34.95.37)	Cl2、Bcl3使用
14	36	43	6965	zhao	dummy	0	2006/11/10/18:49:59(130.34.95.31)	FABでCl2を使います
14	30	36	6909	Kobayasi Risato	dummy	0	2006/11/14/9:54:21(130.34.95.37)	0
-15	30	36	6909	Kobayasi Risato	dummy	0	2006/11/14/19:53:52(130.34.95.37)	0	2006/11/14/22:51:47(130.34.95.37)
17	20	48	6909	Sakaguchi	dummy	0	2006/11/16/21:35:6(172.16.44.142)	アッシングチャンバーにサンプル真空保管
18	20	30	6908	konno	dummy	0	2006/11/17/13:13:55(172.16.44.142)	Cl2、Bcl3
20	18	22	6908	konno	dummy	0	2006/11/18/14:34:48(172.16.44.142)	0
-20	26	30	6908	konno	dummy	0	2006/11/20/10:49:54(172.16.44.142)	0	2006/11/20/11:1:15(172.16.44.142)
21	34	42	6909	Sakaguchi	dummy	0	2006/11/20/14:43:24(172.16.44.142)	Cl2, BCl3使用
22	18	26	6909	Sakaguchi	dummy	0	2006/11/21/22:7:45(172.16.44.142)	Cl2, BCl3ガスパージ
27	26	30	6908	Kikuchi	dummy	1	2006/11/24/17:6:31(130.34.95.37)	点検作業
-28	32	45	6965	zhao	dummy	0	2006/11/27/14:20:30(130.34.95.31)	0	2006/11/27/14:21:12(130.34.95.31)
28	32	45	6965	zhao	dummy	0	2006/11/27/14:21:52(130.34.95.31)	FABでCl2を使う