ULVAC WCVD
“ϊ•t	ŠJŽnŽžŠΤ	I—ΉŽžŠΤ	Žg—pŽžŠΤ	Œ€‹†ŽΊ–Ό	–Ό‘O	ƒpƒXƒ[ƒh	—\–ρŽž(IPƒAƒhƒŒƒX)	ƒRƒƒ“ƒg
9	14	20	6	ƒGƒlˆΐŽO‰YŒ€	sasaki	dummy	2007/1/5/17:31:54(130.34.95.30)	LP-CVD Žg—p
12	14	18	4	¬–φŒ€	T.konno	dummy	2007/1/12/13:20:23(130.34.95.37)	0
12	18	22	4	¬–φŒ€	T.Konno	dummy	2007/1/12/18:29:45(172.16.44.210)	0
17	15	20	5	¬–φŒ€	Kikuchi	dummy	2007/1/16/12:57:9(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
25	9	24	15	¬–φŒ€	Kikuchi	dummy	2007/1/19/14:54:55(172.16.44.131)	0
26	0	20	20	¬–φŒ€	Kikuchi	dummy	2007/1/19/14:55:11(172.16.44.131)	0
23	13	17	4	¬–φŒ€	T.konno	dummy	2007/1/23/12:26:6(130.34.95.37)	0
7	9.5	21	11.5	¬–φŒ€	Kikuchi	dummy	2007/2/5/18:55:17(130.34.95.37)	0
8	9	10.5	1.5	¬–φŒ€	Kikuchi	dummy	2007/2/5/14:16:22(130.34.95.37)	0
8	10.5	18	7.5	¬–φŒ€	Kikuchi	dummy	2007/2/8/9:2:41(130.34.95.37)	0
13	13	18	5	¬–φŒ€	komiya	dummy	2007/2/10/15:24:14(130.34.95.37)	0
13	10	11.5	1.5	¬–φŒ€	Liang	dummy	2007/2/10/17:43:55(172.16.44.142)	0
14	11	21	10	¬–φŒ€	Ali	dummy	2007/2/13/12:55:34(130.34.95.37)	0
15	11	21	10	¬–φŒ€	Ali	dummy	2007/2/13/12:55:48(130.34.95.37)	0
14	21	24	3	¬–φŒ€	komiya	dummy	2007/2/13/22:30:0(130.34.95.37)	0
16	10	11	1	¬–φŒ€	Kikuchi	dummy	2007/2/16/9:44:49(172.16.44.131)	0
17	10	21	11	¬–φŒ€	Kikuchi	dummy	2007/2/16/9:45:7(172.16.44.131)	0
19	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:36:48(130.34.95.37)	0
20	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:37:8(130.34.95.37)	0
21	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:37:26(130.34.95.37)	0
22	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:37:42(130.34.95.37)	0
18	10	15	5	¬–φŒ€	Kikuchi	dummy	2007/2/17/19:6:20(172.16.44.132)	0
19	21	23.5	2.5	¬–φŒ€	Fukushima	dummy	2007/2/19/15:5:30(130.34.95.37)	0
20	0	4	4	¬–φŒ€	komiya	dummy	2007/2/19/17:15:46(172.16.44.210)	0
23	14	22	8	¬–φŒ€	Liang	dummy	2007/2/21/22:58:43(172.16.44.131)	0
22	21	24	3	¬–φŒ€	komiya	dummy	2007/2/21/23:52:47(172.16.44.131)	0
23	22	24	2	¬–φŒ€	Ali	dummy	2007/2/23/19:22:5(172.16.44.131)	0
26	9	24	15	¬–φŒ€	Kikuchi	dummy	2007/2/25/15:29:50(130.34.95.37)	0
27	11	21	10	¬–φŒ€	Ali	dummy	2007/2/25/22:34:15(130.34.95.37)	0
1	9.5	23	13.5	¬–φŒ€	Kikuchi	dummy	2007/2/27/10:44:48(130.34.95.37)	0
2	10	14	4	¬–φŒ€	Liang	dummy	2007/2/28/19:25:0(172.16.44.142)	0
2	14	23	9	¬–φŒ€	Ali	dummy	2007/3/1/20:30:10(130.34.95.37)	0
9	9.5	17	7.5	¬–φŒ€	Kikuchi	dummy	2007/3/6/9:25:20(130.34.95.37)	0
9	17	23	6	¬–φŒ€	Kikuchi	dummy	2007/3/7/9:21:46(130.34.95.37)	0
10	10	18	8	¬–φŒ€	Kikuchi	dummy	2007/3/7/9:21:58(130.34.95.37)	0
12	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/3/9/20:11:28(172.16.44.131)	ƒ†[ƒeƒbƒNCVDŽg—p
12	14	23	9	¬–φŒ€	Ali	dummy	2007/3/9/23:0:45(130.34.95.37)	0
13	10	14	4	¬–φŒ€	liang	dummy	2007/3/12/14:0:23(172.16.44.142)	0
20	8	24	16	¬–φŒ€	Kikuchi	dummy	2007/3/19/9:42:59(130.34.95.37)	0
23	9	16	7	¬–φŒ€	konno	dummy	2007/3/22/16:3:33(130.34.95.37)	0
24	10	17	7	¬–φŒ€	konno	dummy	2007/3/23/15:11:53(172.16.44.131)	youtec CVD
4	9	23	14	¬–φŒ€	Kikuchi	dummy	2007/4/3/15:51:13(130.34.95.37)	0
4	23	24	1	¬–φŒ€	Ali	dummy	2007/4/4/11:6:0(130.34.95.37)	0
12	20	23	3	¬–φŒ€	kino	dummy	2007/4/12/17:5:27(130.34.95.37)	YOUTEC_CVDŽg—p
16	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/4/16/9:17:41(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
18	15	18	3	¬–φŒ€	kino	dummy	2007/4/18/13:25:17(130.34.95.37)	0
18	18	21	3	¬–φŒ€	kino	dummy	2007/4/18/16:58:59(130.34.95.37)	youtec_CVDŽg—p
19	11	23	12	¬–φŒ€	Ali	dummy	2007/4/18/19:16:31(130.34.95.37)	0
24	13	20	7	¬–φŒ€	Kikuchi	dummy	2007/4/23/11:27:43(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
23	15.5	22	6.5	¬–φŒ€	beatrix	dummy	2007/4/23/14:35:16(172.16.44.132)	0
26	16	22.5	6.5	¬–φŒ€	Ali	dummy	2007/4/25/21:11:19(130.34.95.37)	0
27	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/4/26/9:33:39(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
28	16	20	4	¬–φŒ€	Kikuchi	dummy	2007/4/26/9:41:24(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
30	9	23	14	¬–φŒ€	Kikuchi	dummy	2007/4/26/9:41:50(130.34.95.37)	0
29	14	18	4	¬–φŒ€	kino	dummy	2007/4/29/13:37:11(130.34.95.37)	youtecŽg—p