TEL LPCVD
“ϊ•t	ŠJŽnŽžŠΤ	I—ΉŽžŠΤ	Žg—pŽžŠΤ	Œ€‹†ŽΊ–Ό	–Ό‘O	ƒpƒXƒ[ƒh	—\–ρŽž(IPƒAƒhƒŒƒX)	ƒRƒƒ“ƒg
9	14	20	6	ƒGƒlˆΐŽO‰YŒ€	sasaki	dummy	2007/1/5/17:29:51(130.34.95.30)	0
6	13	17	4	¬–φŒ€	komiya	dummy	2007/1/5/12:54:12(130.34.95.37)	LP-SiN
10	14	24	10	¬–φŒ€	komiya	dummy	2007/1/6/15:36:24(130.34.95.37)	0
12	14	18	4	¬–φŒ€	T.konno	dummy	2007/1/12/13:19:42(130.34.95.37)	0
12	18	22	4	¬–φŒ€	T.Konno	dummy	2007/1/12/18:28:55(172.16.44.210)	0
17	15	20	5	¬–φŒ€	Kikuchi	dummy	2007/1/16/12:57:54(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
16	17	22	5	¬–φŒ€	beatrix	dummy	2007/1/16/16:47:40(172.16.44.132)	0
22	12	16	4	ƒGƒlˆΐŽO‰YŒ€	sasaki	dummy	2007/1/22/10:21:0(172.16.44.132)	TEOS Žg—p
22	17.5	19.5	2	¬–φŒ€	kino	dummy	2007/1/22/16:11:17(172.16.44.210)	TEOS
23	13	17	4	¬–φŒ€	T.konno	dummy	2007/1/23/12:25:16(130.34.95.37)	0
25	20	24	4	¬–φŒ€	kino	dummy	2007/1/25/18:38:2(172.16.44.131)	0
29	16.5	19	2.5	ƒGƒlˆΐŽO‰YŒ€	sasaki	dummy	2007/1/29/15:42:35(130.34.95.30)	LP-TEOS Žg—p
31	17.5	18	0.5	ƒGƒlˆΐŽO‰YŒ€	miura lab sasaki	dummy	2007/1/31/16:47:22(172.16.44.132)	0
31	18	20	2	ƒGƒlˆΐŽO‰YŒ€	miura lab SASAKI	dummy	2007/1/31/16:49:5(172.16.44.132)	LP-TEOSŽg—p
1	15	20	5	¬–φŒ€	kino	dummy	2007/2/1/13:47:53(130.34.95.37)	TEOS
6	13.5	19.5	6	ƒGƒlˆΐŽO‰YŒ€	M. Otani	dummy	2007/2/5/21:25:41(130.34.95.30)	TEOS‚Μ‚έ
13	13	18	5	¬–φŒ€	komiya	dummy	2007/2/10/15:23:9(130.34.95.37)	0
13	10	11.5	1.5	¬–φŒ€	Liang	dummy	2007/2/10/17:43:14(172.16.44.142)	0
14	11	21	10	¬–φŒ€	Ali	dummy	2007/2/13/12:54:34(130.34.95.37)	0
15	11	21	10	¬–φŒ€	Ali	dummy	2007/2/13/12:54:53(130.34.95.37)	0
13	18	20	2	¬–φŒ€	liang	dummy	2007/2/13/15:32:23(172.16.44.132)	0
14	21	24	3	¬–φŒ€	komiya	dummy	2007/2/13/22:29:43(130.34.95.37)	0
20	13.5	19.5	6	ƒGƒlˆΐŽO‰YŒ€	M. Otani	dummy	2007/2/15/13:18:9(130.34.95.30)	TEOS
16	7	9	2	¬–φŒ€	kino	dummy	2007/2/16/6:11:21(172.16.44.132)	TEOS
19	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:34:14(130.34.95.37)	0
20	19.5	22	2.5	¬–φŒ€	Ali	dummy	2007/2/16/16:34:40(130.34.95.37)	0
20	11	13.5	2.5	¬–φŒ€	Ali	dummy	2007/2/16/16:35:1(130.34.95.37)	0
21	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:35:15(130.34.95.37)	0
22	11	21	10	¬–φŒ€	Ali	dummy	2007/2/16/16:35:32(130.34.95.37)	0
19	21	23.5	2.5	¬–φŒ€	Fukushima	dummy	2007/2/19/15:4:43(130.34.95.37)	0
20	0	3	3	¬–φŒ€	komiya	dummy	2007/2/19/17:15:1(172.16.44.210)	0
23	14	22	8	¬–φŒ€	Liang	dummy	2007/2/21/22:57:51(172.16.44.131)	0
22	21	24	3	¬–φŒ€	komiya	dummy	2007/2/21/23:51:18(172.16.44.131)	0
23	22	24	2	¬–φŒ€	Ali	dummy	2007/2/23/19:21:38(172.16.44.131)	0
26	9	24	15	¬–φŒ€	Kikuchi	dummy	2007/2/25/15:29:26(130.34.95.37)	0
27	11	21	10	¬–φŒ€	Ali	dummy	2007/2/25/22:33:27(130.34.95.37)	0
28	13	16	3	—¬‘ΜŒ€Š¦μŒ€	wada	dummy	2007/2/27/15:44:48(130.34.231.209)	0
2	10	14	4	¬–φŒ€	Liang	dummy	2007/2/28/19:23:54(172.16.44.142)	0
2	14	23	9	¬–φŒ€	Ali	dummy	2007/3/1/20:29:15(130.34.95.37)	0
12	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/3/9/20:11:9(172.16.44.131)	ƒ†[ƒeƒbƒNCVDŽg—p
13	10	14	4	¬–φŒ€	liang	dummy	2007/3/12/13:59:33(172.16.44.142)	0
23	9	16	7	¬–φŒ€	konno	dummy	2007/3/22/16:3:9(130.34.95.37)	0
24	10	17	7	¬–φŒ€	konno	dummy	2007/3/23/15:11:10(172.16.44.131)	youtec CVD
30	19	23	4	¬–φŒ€	kino	dummy	2007/3/30/18:29:43(172.16.44.132)	P_CVDŽg—p
2	14.5	20	5.5	¬–φŒ€	kino	dummy	2007/4/2/13:39:18(130.34.95.37)	SiNŽg—p
2	21.5	24	2.5	¬–φŒ€	kino	dummy	2007/4/2/21:17:37(130.34.95.37)	0
4	22	24	2	¬–φŒ€	Ali	dummy	2007/4/4/11:5:24(130.34.95.37)	0
6	18	24	6	¬–φŒ€	kino	dummy	2007/4/6/17:16:26(130.34.95.37)	0
7	17	23	6	¬–φŒ€	kino	dummy	2007/4/7/16:33:56(172.16.44.132)	0
12	12	20	8	—¬‘ΜŒ€Š¦μŒ€	kubota	dummy	2007/4/9/11:22:49(130.34.231.209)	poly-SiŽg—p
11	14	16	2	ƒGƒlˆΐŽO‰YŒ€	ueta	dummy	2007/4/11/13:47:23(172.16.44.132)	0
11	17	20.5	3.5	ƒGƒlˆΐŽO‰YŒ€	ueta	dummy	2007/4/11/16:37:2(172.16.44.132)	0
12	20	23	3	¬–φŒ€	kino	dummy	2007/4/12/17:2:46(130.34.95.37)	0
16	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/4/16/9:16:56(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
18	15	18	3	¬–φŒ€	kino	dummy	2007/4/18/13:23:59(130.34.95.37)	0
18	18	21	3	¬–φŒ€	kino	dummy	2007/4/18/16:59:38(130.34.95.37)	youtec_CVDŽg—p
19	11	23	12	¬–φŒ€	Ali	dummy	2007/4/18/19:15:49(130.34.95.37)	0
19	0	2	2	¬–φŒ€	kino	dummy	2007/4/19/0:24:19(130.34.95.37)	0
21	20	24	4	¬–φŒ€	kino	dummy	2007/4/21/19:28:57(172.16.44.132)	0
24	13	20	7	¬–φŒ€	Kikuchi	dummy	2007/4/23/11:26:4(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
23	15.5	22	6.5	¬–φŒ€	beatrix	dummy	2007/4/23/14:33:52(172.16.44.132)	0
23	23	24	1	¬–φŒ€	kino	dummy	2007/4/23/22:28:38(172.16.44.210)	TEOSŽg—p
24	20	23	3	¬–φŒ€	beatrix	dummy	2007/4/24/9:25:2(130.34.95.37)	0
25	14	21	7	¬–φŒ€	beatrix	dummy	2007/4/25/10:38:42(130.34.95.37)	0
26	16	23	7	¬–φŒ€	Ali	dummy	2007/4/25/21:10:52(130.34.95.37)	0
27	9.5	14	4.5	¬–φŒ€	Kikuchi	dummy	2007/4/26/9:32:59(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
28	16	20	4	¬–φŒ€	Kikuchi	dummy	2007/4/26/9:40:6(130.34.95.37)	ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p
27	15	18	3	¬–φŒ€	Liang	dummy	2007/4/26/19:58:25(172.16.44.174)	0
27	18	22	4	¬–φŒ€	beatrix	dummy	2007/4/27/10:14:56(172.16.44.132)	0
29	14	18	4	¬–φŒ€	kino	dummy	2007/4/29/9:26:7(130.34.95.37)	0