PE-CVD
“ú•t	ŠJŽnŽžŠÔ	�I—¹ŽžŠÔ	Žg—pŽžŠÔ	Œ¤‹†Žº–¼	–¼‘O	ƒpƒXƒ��[ƒh	—\–ñŽž��(IPƒAƒhƒŒƒX)	ƒRƒ�ƒ“ƒg
2	13	14.5	1.5	�]ŽhŒ¤	Oda	dummy	2007/5/1/17:32:17(130.34.95.43)	0
7	14	15.5	1.5	�]ŽhŒ¤	Oda	dummy	2007/5/7/13:48:14(130.34.95.43)	0