Metal RIE (ANELVA) “ú•t ŠJŽnŽžŠÔ I—¹ŽžŠÔ Žg—pŽžŠÔ Œ¤‹†Žº–¼ –¼‘O ƒpƒXƒ[ƒh —\–ñŽž(IPƒAƒhƒŒƒX) ƒRƒƒ“ƒg 15 11 15 4 ¬–öŒ¤ konno dummy 2007/1/15/7:6:51(130.34.95.37) 0 24 10 13 3 ¬–öŒ¤ konno dummy 2007/1/24/7:41:46(130.34.95.37) 0 29 9 11 2 ¬–öŒ¤ konno dummy 2007/1/29/7:7:2(130.34.95.37) 0 9 10 14 4 ¬–öŒ¤ konno dummy 2007/2/7/15:38:53(130.34.95.37) 0 19 10 11.5 1.5 ¬–öŒ¤ konno dummy 2007/2/19/7:35:40(172.16.44.132) 0 9 9 15 6 ¬–öŒ¤ konno dummy 2007/3/8/7:34:16(130.34.95.37) 0 16 10 13 3 ¬–öŒ¤ konno dummy 2007/3/16/8:13:2(172.16.44.210) 0 16 10.5 15.5 5 ¬–öŒ¤ konno dummy 2007/4/16/8:21:38(172.16.44.210) 0 18 16 21 5 ¬–öŒ¤ beatrix dummy 2007/4/18/14:32:26(172.16.44.132) 0 20 12 17 5 ¬–öŒ¤ komiya dummy 2007/4/19/14:58:37(172.16.44.210) 0 19 15 16.5 1.5 ¬–öŒ¤ beatrix dummy 2007/4/19/14:34:51(172.16.44.132) 0 20 10 12 2 ¬–öŒ¤ konno dummy 2007/4/20/10:4:29(172.16.44.132) 0 25 11 14 3 ¬–öŒ¤ konno dummy 2007/4/25/10:14:45(172.16.44.132) 0 27 12 13 1 ¬–öŒ¤ konno dummy 2007/4/27/8:7:25(172.16.44.210) 0