ANELVA ƒvƒ‰ƒYƒ}SiN-CVD “ϊ•t ŠJŽnŽžŠΤ I—ΉŽžŠΤ Žg—pŽžŠΤ Œ€‹†ŽΊ–Ό –Ό‘O ƒpƒXƒ[ƒh —\–ρŽž(IPƒAƒhƒŒƒX) ƒRƒƒ“ƒg 9 14 20 6 ƒGƒlˆΐŽO‰YŒ€ sasaki dummy 2007/1/5/17:30:53(130.34.95.30) LP-CVD Žg—p 12 14 18 4 ¬–φŒ€ T.konno dummy 2007/1/12/13:19:26(130.34.95.37) 0 12 18 22 4 ¬–φŒ€ T.Konno dummy 2007/1/12/18:28:33(172.16.44.210) 0 17 15 20 5 ¬–φŒ€ Kikuchi dummy 2007/1/16/12:57:34(130.34.95.37) ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p 17 9 15 6 ¬–φŒ€ konno dummy 2007/1/17/7:16:5(130.34.95.37) 0 23 13 17 4 ¬–φŒ€ T.konno dummy 2007/1/23/12:24:59(130.34.95.37) 0 8 9 16 7 ¬–φŒ€ konno dummy 2007/2/7/12:40:42(130.34.95.37) 0 13 13 18 5 ¬–φŒ€ komiya dummy 2007/2/10/15:22:28(130.34.95.37) 0 13 10 11.5 1.5 ¬–φŒ€ liang dummy 2007/2/10/17:43:0(172.16.44.142) 0 14 11 21 10 ¬–φŒ€ Ali dummy 2007/2/13/12:53:3(130.34.95.37) 0 15 11 21 10 ¬–φŒ€ Ali dummy 2007/2/13/12:53:31(130.34.95.37) 0 13 18 20 2 ¬–φŒ€ liang dummy 2007/2/13/15:31:58(172.16.44.132) 0 14 21 24 3 ¬–φŒ€ komiya dummy 2007/2/13/22:29:28(130.34.95.37) 0 19 11 21 10 ¬–φŒ€ Ali dummy 2007/2/16/16:31:53(130.34.95.37) 0 20 11 21 10 ¬–φŒ€ Ali dummy 2007/2/16/16:32:9(130.34.95.37) 0 21 11 21 10 ¬–φŒ€ Ali dummy 2007/2/16/16:32:25(130.34.95.37) 0 22 11 21 10 ¬–φŒ€ Ali dummy 2007/2/16/16:32:40(130.34.95.37) 0 19 21 23.5 2.5 ¬–φŒ€ Fukushima dummy 2007/2/19/15:4:19(130.34.95.37) 0 20 0 3 3 ¬–φŒ€ komiya dummy 2007/2/19/17:14:29(172.16.44.210) 0 23 14 22 8 ¬–φŒ€ Liang dummy 2007/2/21/22:52:24(172.16.44.131) 0 22 21 24 3 ¬–φŒ€ komiya dummy 2007/2/21/23:51:38(172.16.44.131) 0 23 22 24 2 ¬–φŒ€ Ali dummy 2007/2/23/19:21:14(172.16.44.131) 0 26 9 24 15 ¬–φŒ€ Kikichi dummy 2007/2/25/15:28:37(130.34.95.37) 0 27 11 21 10 ¬–φŒ€ Ali dummy 2007/2/25/22:33:4(130.34.95.37) 0 28 13 16 3 —¬‘ΜŒ€Š¦μŒ€ wada dummy 2007/2/27/15:44:20(130.34.231.209) 0 2 10 14 4 ¬–φŒ€ Liang dummy 2007/2/28/19:23:21(172.16.44.142) 0 2 14 23 9 ¬–φŒ€ Ali dummy 2007/3/1/20:28:40(130.34.95.37) 0 8 8 16 8 ¬–φŒ€ konno dummy 2007/3/5/15:12:15(130.34.95.37) P-SiN CVDŽg—p 9 9 16 7 —¬‘ΜŒ€Š¦μŒ€ A.ueno dummy 2007/3/8/15:46:30(130.34.231.209) P-SiN cvd 12 9.5 14 4.5 ¬–φŒ€ Kikuchi dummy 2007/3/9/20:10:35(172.16.44.131) ƒ†[ƒeƒbƒNCVDŽg—p 12 14 23 9 ¬–φŒ€ Ali dummy 2007/3/9/23:0:2(130.34.95.37) 0 13 10 14 4 ¬–φŒ€ liang dummy 2007/3/12/13:59:2(172.16.44.142) 0 15 10 17 7 ¬–φŒ€ konno dummy 2007/3/14/10:23:45(172.16.44.210) 0 23 9 16 7 ¬–φŒ€ konno dummy 2007/3/22/16:2:44(130.34.95.37) 0 24 10 17 7 ¬–φŒ€ konno dummy 2007/3/23/15:10:47(172.16.44.131) youtec CVD 30 19 23 4 ¬–φŒ€ kino dummy 2007/3/30/18:30:43(172.16.44.132) P_CVDŽg—p 4 22 24 2 ¬–φŒ€ Ali dummy 2007/4/4/11:4:53(130.34.95.37) 0 10 10 14.5 4.5 ¬–φŒ€ konno dummy 2007/4/10/6:58:39(172.16.44.132) 0 10 16.5 19 2.5 ¬–φŒ€ Jeong dummy 2007/4/10/15:51:36(130.34.95.37) 0 13 9 16 7 ¬–φŒ€ konno dummy 2007/4/12/11:34:25(172.16.44.132) 0 12 20 23 3 ¬–φŒ€ kino dummy 2007/4/12/17:3:43(130.34.95.37) YOUTECƒvƒ‰ƒYƒ}CVDŽg—p 16 9.5 14 4.5 ¬–φŒ€ Kikuchi dummy 2007/4/16/9:16:38(130.34.95.37) W-CVDŽg—p 18 15 18 3 ¬–φŒ€ kino dummy 2007/4/18/13:24:20(130.34.95.37) 0 18 18 21 3 ¬–φŒ€ kino dummy 2007/4/18/17:0:35(130.34.95.37) youtec_CVDŽg—p 19 11 23 12 ¬–φŒ€ Ali dummy 2007/4/18/19:15:23(130.34.95.37) 0 24 13 20 7 ¬–φŒ€ Kikuchi dummy 2007/4/23/11:25:43(130.34.95.37) ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p 23 15.5 22 6.5 ¬–φŒ€ beatrix dummy 2007/4/23/14:35:54(172.16.44.132) 0 26 16 23 7 ¬–φŒ€ Ali dummy 2007/4/25/21:10:1(130.34.95.37) 0 27 9.5 14 4.5 ¬–φŒ€ Kikuchi dummy 2007/4/26/9:32:38(130.34.95.37) ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p 28 16 20 4 ¬–φŒ€ Kikuchi dummy 2007/4/26/9:36:20(130.34.95.37) ƒ†[ƒeƒbƒN‚b‚u‚cŽg—p 26 9 15.5 6.5 ¬–φŒ€ konno dummy 2007/4/25/8:39:5(172.16.44.210) 0 27 15 18 3 ¬–φŒ€ Liang dummy 2007/4/26/19:58:1(172.16.44.174) 0 28 9 16 7 ¬–φŒ€ konno dummy 2007/4/27/8:8:8(172.16.44.210) 0 29 14 18 4 ¬–φŒ€ kino dummy 2007/4/29/13:38:21(130.34.95.37) youtecŽg—p