AlƒGƒbƒ`ƒƒ[
“ϊ•t	ŠJŽnŽžŠΤ	I—ΉŽžŠΤ	Žg—pŽžŠΤ	Œ€‹†ŽΊ–Ό	–Ό‘O	ƒpƒXƒ[ƒh	—\–ρŽž(IPƒAƒhƒŒƒX)	ƒRƒƒ“ƒg
9	10	16	6	¬–φŒ€	konno	dummy	2007/1/9/7:26:11(130.34.95.37)	SiN etch •O2 ash
10	10.5	15.5	5	¬–φŒ€	konno	dummy	2007/1/10/7:41:11(130.34.95.37)	SiN etch •O2 ash
12	10	16	6	¬–φŒ€	konno	dummy	2007/1/12/7:44:34(130.34.95.37)	Cl2ABcl3Žg—p
16	10	17	7	¬–φŒ€	konno	dummy	2007/1/16/7:8:20(130.34.95.37)	Bcl3ACl2
17	12	18	6	¬–φŒ€	satou	dummy	2007/1/17/2:20:21(130.34.95.37)	0
25	13	19	6	‰HͺŒ€	R.Ito	dummy	2007/1/23/21:36:18(130.34.95.31)	FAB‚Ι‚Δ‰–‘fƒKƒXŽg—p
24	13	19	6	¬–φŒ€	satou	dummy	2007/1/24/2:54:7(172.16.44.210)	0
25	7	13	6	¬–φŒ€	konno	dummy	2007/1/24/7:41:12(130.34.95.37)	Cl2ABcl3Žg—p
29	9	16	7	¬–φŒ€	konno	dummy	2007/1/29/7:6:40(130.34.95.37)	Cl2ABcl3Žg—p
1	14	18	4	¬–φŒ€	komiya	dummy	2007/1/31/23:31:51(130.34.95.37)	0
6	14	20	6	‰HͺŒ€	R.Ito	dummy	2007/2/5/15:17:41(130.34.95.31)	FAB‚Ι‚ΔCl2ƒKƒXŽg—p
13	9	16	7	¬–φŒ€	konno	dummy	2007/2/12/8:3:50(130.34.95.37)	Cl2ABcl3Žg—p
15	9	17	8	¬–φŒ€	konno	dummy	2007/2/13/12:2:50(172.16.44.131)	Cl2ABcl3Žg—p
17	12	19	7	¬–φŒ€	komiya	dummy	2007/2/16/21:43:35(130.34.95.37)	0
22	17.5	22	4.5	¬–φŒ€	kikuchi	dummy	2007/2/22/16:53:24(172.16.44.131)	0
7	9	18	9	¬–φŒ€	konno	dummy	2007/3/5/15:10:35(130.34.95.37)	Bcl3ACl2
8	15	24	9	¬–φŒ€	Watanabe	dummy	2007/3/8/0:42:25(172.16.44.210)	O2
12	9.5	17.5	8	¬–φŒ€	konno	dummy	2007/3/10/10:52:6(172.16.44.210)	0
14	9	16	7	¬–φŒ€	konno	dummy	2007/3/13/15:52:22(172.16.44.210)	Cl2ABcl3
20	14	20	6	‰HͺŒ€	R.Ito	dummy	2007/3/19/14:54:24(130.34.95.31)	0
21	9	17	8	¬–φŒ€	konno	dummy	2007/3/20/6:50:57(130.34.95.37)	Cl2ABcl3Žg—p
12	20	24	4	¬–φŒ€	satou	dummy	2007/4/9/21:51:48(130.34.95.37)	0
10	9	17	8	¬–φŒ€	konno	dummy	2007/4/10/6:57:18(172.16.44.132)	Cl2ABcl3
12	8	16	8	¬–φŒ€	konno	dummy	2007/4/11/8:36:43(172.16.44.132)	0
16	11	16	5	¬–φŒ€	konno	dummy	2007/4/16/8:21:13(172.16.44.210)	0
17	17	21	4	¬–φŒ€	satou	dummy	2007/4/17/14:25:25(172.16.44.210)	0
18	9	18	9	¬–φŒ€	konno	dummy	2007/4/17/16:8:12(172.16.44.132)	Bcl3ACl2
19	15	18	3	¬–φŒ€	satou	dummy	2007/4/19/14:52:52(172.16.44.131)	0
20	16	21	5	¬–φŒ€	SATOU	dummy	2007/4/19/23:56:31(130.34.95.43)	0
20	13	16	3	¬–φŒ€	KOMIYA	dummy	2007/4/19/23:59:17(130.34.95.43)	0
23	13.5	18	4.5	¬–φŒ€	komiya	dummy	2007/4/23/13:27:3(130.34.95.37)	0
25	9	17	8	¬–φŒ€	konno	dummy	2007/4/24/8:59:40(172.16.44.131)	Bcl3,Cl2
27	10.5	18.5	8	¬–φŒ€	konno	dummy	2007/4/25/10:1:4(172.16.44.132)	Bcl3,Cl2