-1 33 46 5318 rahman dummy 0 2013/1/30/11:6:23(130.34.231.209) Au/Cr deposition 2013/1/31/11:59:21(130.34.95.44) -4 26 36 6937 Miyaguchi dummy 0 2013/1/30/15:42:9(130.34.95.43) Cr/Pt/Au 2013/1/30/15:46:31(130.34.95.43) 4 26 36 6937 Miyaguchi dummy 2 2013/1/30/15:48:54(130.34.95.43) Au/Pt/Cr 4 36 42 6937 Asano dummy 0 2013/1/30/21:50:50(130.34.95.43) Pt -1 24 32 5810 Xue dummy 0 2013/1/31/9:16:9(130.34.95.49) Au/Cr 2013/1/31/17:20:24(130.34.95.49) -1 18 24 5810 hayashi dummy 0 2013/1/31/11:39:29(130.34.95.49) 0 2013/1/31/14:15:58(130.34.95.49) 1 34 40 6937 makihata dummy 0 2013/1/31/13:32:7(130.34.95.43) 0 -4 18 26 6937 saito dummy 0 2013/1/31/14:14:23(130.34.95.43) 0 2013/1/31/14:14:30(130.34.95.43) 4 18 26 6937 saito dummy 0 2013/1/31/14:14:47(130.34.95.43) Al 1 18 24 5810 hayashi dummy 0 2013/1/31/14:16:26(130.34.95.49) Au/Cr -5 18 28 6936 Samoto dummy 0 2013/1/31/14:28:49(130.34.95.43) Au/Ti 2013/1/31/14:29:22(130.34.95.43) 5 18 28 6936 Samoto dummy 2 2013/1/31/14:30:3(130.34.95.43) Au/Ti 1 26 32 5810 Xue dummy 0 2013/1/31/17:20:50(130.34.95.49) Au/Cr 2 19 29 6909 kigure&sasaki dummy 0 2013/1/31/20:11:42(130.34.95.37) エッチング　木野先生承認 1 0 9 6937 Asano dummy 0 2013/1/31/23:10:8(130.34.95.43) Au/Cr 1 9 11 6937 Asano dummy 0 2013/2/1/4:12:13(130.34.95.43) 0 -4 42 48 5810 Xue dummy 0 2013/2/1/14:22:52(130.34.95.49) 0 2013/2/1/14:22:58(130.34.95.49) 4 42 48 5810 Xue dummy 0 2013/2/1/14:23:50(130.34.95.49) Au 1 40 42 6937 makihata dummy 0 2013/2/1/17:50:23(130.34.95.43) 0 1 42 48 6965 yoshida dummy 0 2013/2/1/18:46:49(130.34.95.31) Au 佐々木先生承認 2 29 37 5318 Rahman dummy 0 2013/2/1/19:55:53(130.34.95.44) Al 5 28 38 6937 Simon Hamel dummy 0 2013/2/4/11:11:5(130.34.94.146) Au, Cr, Ti -5 38 46 6937 Rakeshchand dummy 0 2013/2/4/16:14:0(130.34.95.43) Pt 2013/2/5/17:9:59(130.34.95.43) 6 26 34 6937 Rakeshchand dummy 0 2013/2/4/16:15:26(130.34.95.43) Pt -7 30 38 6937 niikawa dummy 0 2013/2/5/9:16:19(130.34.95.43) Pt/Ti 2013/2/5/9:22:7(130.34.95.43) -7 32 40 6937 niikawa dummy 0 2013/2/5/9:23:45(130.34.95.43) Pt/Ti 2013/2/7/10:14:33(130.34.95.43) 7 20 32 6937 Miyaguchi dummy 2 2013/2/5/13:7:26(130.34.95.43) Cr/Pt/Au -8 18 26 6936 Rakeshchand dummy 0 2013/2/5/17:9:26(130.34.95.43) Pt 2013/2/8/9:46:31(130.34.95.43) -5 44 48 4771 sugimoto dummy 0 2013/2/5/21:34:23(130.34.95.21) 原先生承認済 2013/2/5/21:35:44(130.34.95.21) 6 0 4 4771 sugimoto dummy 0 2013/2/5/21:34:51(130.34.95.21) 原先生承認済 5 44 46 4771 sugimoto dummy 0 2013/2/5/21:34:23(130.34.95.21) 原先生承認済 -5 46 48 4771 sugimoto dummy 0 2013/2/5/21:36:10(130.34.95.21) Ti->Al 2013/2/5/21:36:23(130.34.95.21) 5 46 48 4771 sugimoto dummy 2 2013/2/5/21:36:50(130.34.95.21) Ti->Al 6 34 42 5810 Toan dummy 0 2013/2/5/23:23:7(130.34.95.49) Cr/Au -8 36 48 6909 sasaki&ito dummy 2 2013/2/6/6:10:59(130.34.95.37) Ti Au/Cr/Ti 木野先生承認 2013/2/6/18:32:49(130.34.95.37) -6 42 48 6936 Samoto dummy 0 2013/2/6/11:36:19(130.34.95.43) Au/Ti 2013/2/6/18:55:48(130.34.95.44) -8 26 35 6937 saito dummy 0 2013/2/6/16:30:6(130.34.95.43) Al 2013/2/6/16:35:41(130.34.95.43) -7 40 48 6937 Samoto dummy 0 2013/2/6/18:57:37(130.34.95.44) Au 2013/2/7/10:50:52(130.34.95.43) -12 24 36 6937 Miyaguchi dummy 2 2013/2/6/19:30:25(130.34.95.43) 0 2013/2/6/19:31:38(130.34.95.43) 12 24 36 6937 Miyaguchi dummy 2 2013/2/6/19:32:48(130.34.95.43) Cr/Pt/Au -8 26 34 6937 saito dummy 0 2013/2/7/10:11:26(130.34.95.43) Al 2013/2/7/12:52:54(130.34.95.43) -12 18 24 6937 niikawa dummy 0 2013/2/7/10:16:28(130.34.95.43) Pt/Ti 2013/2/7/10:17:28(130.34.95.43) -12 18 24 6937 niikawa dummy 2 2013/2/7/10:17:54(130.34.95.43) Pt/Ti 2013/2/7/10:43:56(130.34.95.43) 8 34 42 6937 niikawa dummy 2 2013/2/7/10:44:44(130.34.95.43) Pt/Ti 7 32 40 6936 Samoto dummy 0 2013/2/7/10:50:40(130.34.95.43) Au 8 26 34 6937 saito, muroyama dummy 0 2013/2/7/12:53:17(130.34.95.43) Al -11 32 38 6965 hokari dummy 0 2013/2/7/18:49:19(130.34.95.31) Cr, Au 金森先生承認 2013/2/8/10:30:31(130.34.95.31) 8 18 22 6936 Rakeshchand dummy 0 2013/2/5/17:9:26(130.34.95.43) Pt -8 42 48 6937 Rakeshchand dummy 0 2013/2/8/9:47:30(130.34.95.43) 0 2013/2/8/20:12:59(130.34.95.43) -9 34 40 6965 hokari dummy 0 2013/2/8/10:30:28(130.34.95.31) Cr, Au 金森先生承認 2013/2/9/16:10:49(130.34.95.44) 9 28 34 6965 Nagai, Hokari dummy 0 2013/2/8/12:38:39(130.34.95.31) Cr 8 42 43 6937 Rakeshchand dummy 0 2013/2/8/9:47:30(130.34.95.43) 0 9 21 27 6937 Rakesh chand dummy 0 2013/2/8/20:13:54(130.34.95.43) 0 -9 41 46 6937 Kojima dummy 0 2013/2/9/9:41:11(130.34.95.44) 0 2013/2/9/9:41:16(130.34.95.44) -9 41 46 6937 Kojima dummy 0 2013/2/9/9:41:52(130.34.95.44) Cu/Ar 2013/2/9/13:33:56(130.34.95.43) 9 34 35 6965 hokari dummy 0 2013/2/8/10:30:28(130.34.95.31) Cr, Au 金森先生承認 12 18 24 6965 hokari dummy 0 2013/2/9/16:11:20(130.34.95.44) Cr Au 11 28 34 6937 Kojima dummy 0 2013/2/11/13:6:46(130.34.95.43) Au/Cr 11 34 38 6937 Kojima dummy 0 2013/2/11/15:37:5(130.34.95.43) 0 -13 26 36 5318 rahman dummy 0 2013/2/12/8:50:10(130.34.231.209) Au/Cr 2013/2/12/8:51:37(130.34.231.209) -13 23 35 5318 Rahman dummy 0 2013/2/12/8:52:27(130.34.231.209) Au/Cr 2013/2/12/11:18:53(130.34.226.199) 12 36 44 5318 Rahman dummy 0 2013/2/12/11:18:37(130.34.226.199) Au/Cr 13 34 44 6909 sasaki dummy 2 2013/2/12/23:35:14(130.34.95.44) Pt>Ti 長時間のスパッタが必要なため長めに取ってます。 13 44 48 6965 yoshida dummy 0 2013/2/13/15:48:9(130.34.95.31) Cr 佐々木先生承認 14 0 2 6965 yoshida dummy 0 2013/2/13/15:48:33(130.34.95.31) Cr 佐々木先生承認 15 18 26 6937 Hayasaka dummy 2 2013/2/14/16:41:50(130.34.95.43) Ti -> Al -18 20 26 5810 hayashi dummy 0 2013/2/14/20:25:3(130.34.95.49) Cr Au 2013/2/18/9:25:42(130.34.95.43) 15 28 34 6937 K.Hikichi dummy 0 2013/2/15/7:38:59(130.34.95.43) Al 18 28 34 5810 inomata dummy 0 2013/2/15/16:24:15(130.34.95.49) Cr-Au -20 22 34 6936 Au 4inch wafer 3枚 dummy 0 2013/2/17/10:14:8(130.34.95.43) 0 2013/2/17/10:14:21(130.34.95.43) 20 22 34 6936 Hirano dummy 0 2013/2/17/10:15:23(130.34.95.43) Au 4inch 3枚 19 22 34 6937 K.Hiichi dummy 0 2013/2/18/9:19:36(130.34.95.43) Au/Cr 4in3枚 18 20 21 5810 hayashi dummy 0 2013/2/14/20:25:3(130.34.95.49) Cr Au 18 21 27 5810 hayashi dummy 0 2013/2/18/9:46:20(130.34.95.49) 0 19 34 43 5318 Rahman dummy 0 2013/2/18/11:11:35(130.34.231.209) Au/Cr deposition 22 18 26 6953 ohba dummy 0 2013/2/18/16:26:13(130.34.95.39) Au/Cr 18 37 44 6937 saito dummy 0 2013/2/18/17:53:49(130.34.95.43) Al -20 34 40 5810 hayashi dummy 0 2013/2/18/18:32:12(130.34.95.49) 0 2013/2/18/18:32:27(130.34.95.49) 20 34 40 5810 hayashi dummy 0 2013/2/18/18:32:59(130.34.95.49) Cr-Au 19 44 48 6937 Chu dummy 0 2013/2/18/23:8:41(130.34.95.43) Au/Cr 20 0 2 6937 Chu dummy 0 2013/2/18/23:8:59(130.34.95.43) Au/Cr -20 40 46 5810 kobayashi dummy 0 2013/2/19/8:21:17(130.34.95.49) 0 2013/2/19/11:46:51(130.34.95.49) 25 20 27 5810 趙 dummy 0 2013/2/19/9:50:44(130.34.95.49) 0 -21 22 29 5810 tanaka dummy 2 2013/2/19/12:25:37(130.34.95.49) Al>W 2013/2/20/14:27:25(130.34.95.49) 21 30 38 5810 レミ dummy 2 2013/2/19/12:41:31(130.34.95.49) 3: W -> Pt 19 43 44 5318 rahman dummy 0 2013/2/19/13:40:45(130.34.226.199) au/cr -20 16 22 5810 zhao dummy 0 2013/2/19/14:45:23(130.34.95.43) Cr/Au 2013/2/19/15:58:44(130.34.95.49) -20 40 46 5810 zhao dummy 0 2013/2/19/15:56:47(130.34.95.49) au 2013/2/20/17:52:56(130.34.95.49) -20 46 48 5810 hayashi dummy 0 2013/2/20/16:52:35(130.34.95.49) 0 2013/2/20/16:52:45(130.34.95.49) -20 46 48 5810 hayashi dummy 0 2013/2/20/16:53:12(130.34.95.49) Cr-Au 2013/2/20/16:55:10(130.34.95.49) -21 0 4 5810 hayashi dummy 0 2013/2/20/16:53:32(130.34.95.49) Cr-Au 2013/2/20/16:55:42(130.34.95.49) -20 46 48 5810 hayashi dummy 0 2013/2/20/16:55:33(130.34.95.49) Cr-Au 戸田先生承認 2013/2/20/19:7:36(130.34.95.44) -21 0 4 5810 hayashi dummy 0 2013/2/20/16:56:9(130.34.95.49) Cr-Au 戸田先生承認 2013/2/20/19:7:29(130.34.95.44) -20 40 46 5810 hayashi dummy 0 2013/2/20/17:53:11(130.34.95.49) 0 2013/2/20/19:7:58(130.34.95.44) -21 4 10 6965 yoshida dummy 0 2013/2/20/18:7:1(130.34.95.31) Al 佐々木先生承認 2013/2/20/19:31:42(130.34.95.31) 20 40 41 5810 hayashi dummy 0 2013/2/20/17:53:11(130.34.95.49) 0 20 41 42 5810 hayashi dummy 0 2013/2/20/19:8:19(130.34.95.44) 0 -20 42 48 6965 yoshida dummy 0 2013/2/20/19:32:2(130.34.95.31) 0 2013/2/20/19:32:5(130.34.95.31) 20 42 48 6965 yoshida dummy 0 2013/2/20/19:32:17(130.34.95.31) Al 佐々木先生承認 22 26 40 6937 K.Hikichi dummy 2 2013/2/21/10:24:10(130.34.95.43) Cu/Cr-Cu/Cr×２ -21 38 44 6937 Nishino dummy 0 2013/2/21/15:20:39(130.34.95.43) 0 2013/2/21/15:20:43(130.34.95.43) 21 38 44 6937 Nishino dummy 0 2013/2/21/15:20:56(130.34.95.43) Au/Cr 22 41 46 7281 Cr/Au dummy 0 2013/2/21/18:2:41(130.34.77.72) 0 21 44 45 6937 Nishino dummy 0 2013/2/21/18:40:0(130.34.95.44) 0 25 40 48 6937 K.Hikichi dummy 0 2013/2/22/10:37:50(130.34.95.43) Cu/Cr-Cu/Cr,装置担当者と田中先生承認 26 40 48 6937 K.Hikichi dummy 0 2013/2/22/10:38:35(130.34.95.43) Cu/Cr-Cu/Cr,装置担当者と田中先生承認 26 0 6 6937 K.Hikichi, Nakano dummy 2 2013/2/22/10:40:2(130.34.95.43) Au/Cu,装置担当者と田中先生承認 27 0 6 6937 K.Hikichi, Nakano dummy 2 2013/2/22/10:40:30(130.34.95.43) Au/Cu,装置担当者と田中先生承認 25 36 40 5810 hayashi dummy 1 2013/2/22/15:52:54(130.34.95.49) 0 23 24 30 6965 hokari dummy 0 2013/2/22/17:7:3(130.34.95.31) Cr, Au 金森先生承認 25 28 36 5810 kobayashi dummy 2 2013/2/22/17:32:9(130.34.95.49) 3 ->W, Cr-W 23 40 46 6937 chu dummy 0 2013/2/23/19:34:44(130.34.95.44) with Lin-san permission 25 3 14 6937 chu dummy 0 2013/2/25/0:50:44(130.34.95.43) Au/Cr*2 with Lin-san permission 26 27 33 6965 hokari dummy 0 2013/2/25/9:7:32(130.34.95.31) Cr, Au -27 26 32 5810 山田 dummy 0 2013/2/25/14:57:14(130.34.95.49) Cr-Au 2013/2/26/20:54:27(130.34.95.49) -26 34 40 6937 Kojima dummy 0 2013/2/26/11:23:53(130.34.95.43) 0 2013/2/26/11:42:21(130.34.95.43) 26 34 40 6937 Kojima dummy 0 2013/2/26/11:42:40(130.34.95.43) cr/Au 28 20 28 6937 Simon Hamel dummy 2 2013/2/26/11:56:32(130.34.94.148) Cr-Au-Al 27 19 25 6937 fukushi dummy 0 2013/2/26/15:27:14(130.34.95.43) Cr / Au 27 33 40 6937 chu dummy 0 2013/2/26/17:1:1(130.34.95.43) Au/Cr -27 40 46 6937 Kojima dummy 0 2013/2/26/20:44:0(130.34.95.43) 0 2013/2/26/20:44:7(130.34.95.43) 27 40 46 6937 Kojima dummy 0 2013/2/26/20:44:24(130.34.95.43) Au/Cr 28 30 36 5810 yamada dummy 0 2013/2/26/20:57:5(130.34.95.49) Cr-Au 27 25 30 6937 fukushi dummy 0 2013/2/27/8:0:14(130.34.95.43) Cr / Au 28 37 43 6936 Hirano dummy 0 2013/2/27/12:38:36(130.34.95.43) Au/Cr