-2 34 44 4771 he dummy 0 2012/6/29/14:30:58(130.34.95.21) Ti/Pt; Cr→Pt 2012/7/1/10:19:28(130.34.95.21) -2 26 34 6937 Kochhar dummy 0 2012/6/29/19:30:35(130.34.95.43) AU/Cr 2012/6/30/16:49:47(130.34.95.43) -2 26 34 6937 Kochhar dummy 0 2012/6/30/16:53:37(130.34.95.43) Au, Cr 2012/7/2/11:19:5(130.34.95.43) -3 31 40 6937 Kochhar dummy 0 2012/6/30/16:54:2(130.34.95.43) 3->Al 2012/6/30/16:58:16(130.34.95.43) -3 26 34 6937 Kochhar dummy 0 2012/6/30/16:58:28(130.34.95.43) 3->Al 2012/7/2/11:19:16(130.34.95.43) -3 34 36 6937 Kochhar dummy 0 2012/6/30/16:58:41(130.34.95.43) 0 2012/7/2/11:19:18(130.34.95.43) -2 38 45 6937 Konno dummy 0 2012/7/2/7:52:10(130.34.95.43) 0 2012/7/2/9:52:20(130.34.95.43) 3 18 26 6956 huang dummy 0 2012/7/2/9:27:20(130.34.95.38) Ti->Al 3 26 34 6937 Kochhar dummy 0 2012/7/2/11:19:38(130.34.95.43) Au/Cr 3 34 41 6937 Asano dummy 0 2012/7/2/11:20:40(130.34.95.43) Al -4 18 24 6937 K.Hikichi dummy 0 2012/7/2/20:40:48(130.34.95.43) 0 2012/7/2/20:40:55(130.34.95.43) 4 28 36 6937 Kochhar dummy 0 2012/7/3/9:43:56(130.34.95.43) Au/Cr -4 18 26 6936 Hirano dummy 0 2012/7/3/10:42:22(130.34.95.43) Au/Ti 2012/7/3/11:59:52(130.34.95.43) -3 41 47 6937 hatakeyama dummy 0 2012/7/3/11:48:24(130.34.95.43) 0 2012/7/3/18:44:16(130.34.95.43) -4 36 44 6936 Hirano dummy 0 2012/7/3/12:0:21(130.34.95.43) Au/Ti 2012/7/4/9:39:39(130.34.95.43) -5 26 35 6965 wu dummy 0 2012/7/3/13:21:50(130.34.95.31) Au(1000nm) 2012/7/3/21:21:51(130.34.95.31) 3 43 48 6937 hatakeyama dummy 0 2012/7/3/18:44:29(130.34.95.43) 0 4 0 1 6937 hatakeyama dummy 0 2012/7/3/18:44:47(130.34.95.43) 0 5 21 29 6965 wu dummy 0 2012/7/3/21:23:19(130.34.95.31) Au(1000nm) 4 20 28 6937 makihata dummy 0 2012/7/3/22:9:14(130.34.95.44) 0 4 38 46 6937 makihata dummy 0 2012/7/4/10:58:2(130.34.95.43) 0 4 36 38 6937 Kochhar dummy 0 2012/7/4/12:18:46(130.34.95.43) 0 -10 28 36 6909 S.Kanno dummy 0 2012/7/4/15:37:18(130.34.95.37) Ti/Au 2012/7/9/17:49:25(130.34.95.44) 6 34 40 6937 k.tanaka dummy 0 2012/7/4/19:57:55(130.34.95.43) Cr/Au 9 20 29 6937 Wei-Shan Wang dummy 2 2012/7/5/10:14:22(130.34.95.44) Ge 5 29 34 6937 makihata dummy 0 2012/7/5/11:26:59(130.34.95.43) 0 6 25 33 5810 zhao dummy 0 2012/7/5/12:32:45(130.34.95.43) Cr/Au 6 18 25 6937 Asano dummy 0 2012/7/5/12:42:5(130.34.95.43) Au/Ti 7 20 28 4771 sugimoto dummy 0 2012/7/6/9:50:24(130.34.95.21) Ti→Al 原先生承認済 -12 20 28 6937 Kochhar dummy 0 2012/7/6/11:19:6(130.34.95.43) Au/Cr 2012/7/6/11:20:52(130.34.95.43) -13 28 36 6937 Kochhar dummy 0 2012/7/6/11:19:56(130.34.95.43) Au/Cr 2012/7/6/11:20:55(130.34.95.43) -17 20 28 6937 Kochhar dummy 0 2012/7/6/11:21:39(130.34.95.43) Au/Cr 2012/7/11/18:6:28(130.34.95.43) -18 28 36 6937 Kochhar dummy 0 2012/7/6/11:21:52(130.34.95.43) Au/Cr 2012/7/11/18:5:46(130.34.95.43) -10 36 44 6936 Hirano dummy 0 2012/7/6/13:30:32(130.34.95.43) Au/Ti 2012/7/6/13:31:16(130.34.95.43) -6 40 48 6936 Au/Ti dummy 0 2012/7/6/13:31:33(130.34.95.43) 0 2012/7/6/13:31:55(130.34.95.43) 6 40 48 6936 Hirano dummy 0 2012/7/6/13:32:24(130.34.95.43) Au/Ti 吉田先生承認 9 30 39 6909 kigure dummy 2 2012/7/6/15:38:34(130.34.95.37) Ti/Au 8 34 40 6937 makihata dummy 0 2012/7/8/14:48:0(130.34.95.43) 0 8 40 42 6937 makihata dummy 0 2012/7/8/16:9:47(130.34.95.43) 0 9 29 30 6937 Wei-Shan Wang dummy 0 2012/7/9/10:10:17(130.34.95.44) Ge 9 39 41 6909 kigure dummy 0 2012/7/9/16:51:5(130.34.95.37) 時間延長 -10 32 40 4771 Minh dummy 0 2012/7/10/6:48:5(130.34.95.21) Cr/Au 2012/7/10/11:54:29(130.34.95.21) -11 30 38 6909 S.Kanno dummy 0 2012/7/10/10:29:59(130.34.95.37) Ti/Au 2012/7/11/14:1:49(130.34.95.44) -11 38 46 6936 Samoto dummy 0 2012/7/10/10:46:16(130.34.95.43) Au/Cr 2012/7/10/10:46:44(130.34.95.43) 10 24 32 6936 Samoto dummy 0 2012/7/10/10:47:43(130.34.95.43) Au/Cr 10 35 42 4771 Minh dummy 0 2012/7/10/11:54:56(130.34.95.21) Cr/Au -11 20 30 6937 Wei-Shan Wang dummy 0 2012/7/10/13:19:54(130.34.95.43) AuCr 2012/7/10/13:28:54(130.34.95.43) -12 21 28 6937 Wei-Shan Wang dummy 0 2012/7/10/13:29:56(130.34.95.43) AuCr 2012/7/10/13:30:43(130.34.95.43) -12 21 28 6937 Wei-Shan Wang dummy 0 2012/7/10/13:31:32(130.34.95.43) AuCr 2012/7/11/12:55:14(130.34.95.43) 11 38 46 6937 k.suzuki dummy 0 2012/7/10/14:19:12(130.34.95.43) Cr/Au 11 22 30 6937 makihata dummy 0 2012/7/10/23:55:0(130.34.95.44) 0 -12 36 44 6937 makihata dummy 0 2012/7/11/0:6:38(130.34.95.44) Al 2012/7/12/15:2:11(130.34.95.44) -12 28 36 6937 makihata dummy 0 2012/7/11/0:8:17(130.34.95.44) Ti/Au 2012/7/12/15:2:15(130.34.95.44) 13 17 24 6956 huang dummy 0 2012/7/11/12:37:37(130.34.95.38) Al 13 24 30 6956 huang dummy 0 2012/7/11/12:37:52(130.34.95.38) Al -13 30 37 6937 Wei-Shan Wang dummy 0 2012/7/11/12:55:1(130.34.95.43) AuSn 2012/7/11/14:40:15(130.34.95.44) -24 28 34 6937 Wei-Shan Wang dummy 0 2012/7/11/13:0:46(130.34.95.43) AuCr 2012/7/24/9:56:32(130.34.95.43) 25 21 28 6937 Wei-Shan Wang dummy 0 2012/7/11/13:1:38(130.34.95.43) AuCr 26 29 36 6937 Wei-Shan Wang dummy 0 2012/7/11/13:35:7(130.34.95.44) AuCr 11 30 31 6909 S.Kanno dummy 0 2012/7/10/10:29:59(130.34.95.37) Ti/Au 12 20 28 6909 S.Kanno dummy 0 2012/7/11/14:2:32(130.34.95.44) Ti/Au 13 30 37 6937 Wei-Shan Wang dummy 0 2012/7/11/14:40:38(130.34.95.44) AuCr -18 18 26 6937 Kochhar dummy 0 2012/7/11/18:6:23(130.34.95.43) Au/Cr 2012/7/17/19:2:4(130.34.95.44) 17 28 36 6937 Kochhar dummy 0 2012/7/11/18:6:41(130.34.95.43) 0 -19 18 26 6937 Kochhar dummy 0 2012/7/11/18:7:6(130.34.95.43) Au/Cr 2012/7/17/19:2:10(130.34.95.44) 12 28 33 6937 makihata dummy 0 2012/7/11/0:8:17(130.34.95.44) Ti/Au 12 39 47 6965 ohara,T.Sasaki dummy 0 2012/7/12/17:35:4(130.34.95.31) 佐々木先生承認 -12 47 48 6965 ohara,T.Sasaki dummy 0 2012/7/12/20:13:6(130.34.95.31) 佐々木先生承認 2012/7/12/20:14:20(130.34.95.31) 12 47 48 6965 ohara,T.Sasaki dummy 0 2012/7/12/20:15:24(130.34.95.31) Cr/Au 佐々木先生承認 13 37 43 6937 k.tanaka dummy 0 2012/7/13/2:34:13(130.34.95.43) Au/Cr 17 18 26 6965 ohara dummy 0 2012/7/13/12:42:41(130.34.95.31) Cr/Au -18 26 34 6937 Niikawa dummy 0 2012/7/13/15:23:50(130.34.95.43) 0 2012/7/18/13:55:51(130.34.95.43) -18 35 41 6937 Kojima dummy 0 2012/7/13/18:16:8(130.34.95.43) Au/Cr 2012/7/18/12:19:6(130.34.95.43) 15 28 36 5810 He and Xue dummy 0 2012/7/14/13:22:30(130.34.95.49) 0 -16 26 34 6937 N.WANG dummy 0 2012/7/14/13:24:51(130.34.95.43) Cr/Au 2012/7/16/9:50:59(130.34.95.43) 15 36 42 4771 Minh dummy 0 2012/7/15/16:22:21(130.34.95.21) with Phan, Prof, Kuwano's permission 17 36 44 6937 N.WANG dummy 0 2012/7/16/9:51:16(130.34.95.43) Cr/Au 16 41 46 4771 Minh dummy 0 2012/7/16/19:18:48(130.34.95.21) with Wang san, Prof. Kuwano's permission 19 20 30 6937 Kochhar dummy 0 2012/7/17/19:2:23(130.34.95.44) Au/Cr 18 16 21 6937 k.tanaka dummy 0 2012/7/17/21:19:2(130.34.95.43) Au/Cr -19 37 44 4771 he dummy 0 2012/7/18/8:0:25(130.34.95.21) 0 2012/7/18/8:0:43(130.34.95.21) -19 37 44 4771 he dummy 0 2012/7/18/8:1:15(130.34.95.21) Al 2012/7/19/12:21:33(130.34.95.21) 18 21 26 6937 Kojima dummy 0 2012/7/18/9:11:47(130.34.95.43) 0 20 24 32 5810 zhao dummy 0 2012/7/18/12:11:34(130.34.95.49) Cr/Au 18 26 30 6937 Niikawa dummy 0 2012/7/13/15:23:50(130.34.95.43) 0 18 34 42 4771 Wang dummy 0 2012/7/18/14:58:45(130.34.95.21) Al 19 30 37 6937 Niikawa dummy 0 2012/7/18/16:25:57(130.34.95.43) Au 20 32 38 5810 Hayashi dummy 0 2012/7/18/18:30:55(130.34.95.49) Cr 18 42 47 4771 Wang dummy 0 2012/7/18/19:9:6(130.34.95.44) Al -19 44 48 6937 makihata dummy 0 2012/7/18/20:20:12(130.34.95.43) 0 2012/7/18/20:20:41(130.34.95.43) -20 0 4 6937 makihata dummy 0 2012/7/18/20:20:27(130.34.95.43) 0 2012/7/18/20:20:46(130.34.95.43) -20 18 24 6937 makihata dummy 0 2012/7/18/20:22:17(130.34.95.43) Ti/Au 2012/7/20/5:7:58(130.34.95.43) 19 44 48 6937 makihata dummy 0 2012/7/18/20:22:27(130.34.95.43) 0 20 0 4 6937 makihata dummy 0 2012/7/18/20:22:38(130.34.95.43) 0 -20 38 44 6937 k.tanaka dummy 0 2012/7/19/1:4:15(130.34.95.43) 0 2012/7/19/1:4:23(130.34.95.43) 20 38 44 6937 k.tanaka dummy 0 2012/7/19/1:4:38(130.34.95.43) Au/Cr -25 32 39 6908 nakajima dummy 0 2012/7/19/10:30:40(130.34.95.37) Au/Cr 2012/7/23/13:8:18(130.34.95.37) -26 38 45 6908 nakajima dummy 0 2012/7/19/10:32:1(130.34.95.37) Au/Cr 2012/7/26/15:6:8(130.34.95.37) -23 26 34 6937 Samoto dummy 0 2012/7/19/13:43:53(130.34.63.131) Au,Cr 2012/7/20/23:3:37(130.34.95.44) -19 37 39 6937 Niikawa dummy 0 2012/7/19/14:25:38(130.34.95.43) Au 2012/7/19/17:23:1(130.34.95.44) -24 21 28 5810 tanaka dummy 2 2012/7/19/15:7:22(130.34.95.49) w 2012/7/23/15:50:27(130.34.95.49) 20 4 10 6937 makihata dummy 0 2012/7/20/2:18:36(130.34.95.43) 0 -23 38 46 6937 makihata dummy 0 2012/7/20/5:8:13(130.34.95.43) 0 2012/7/23/12:18:16(130.34.95.43) 20 15 21 6937 nishino dummy 0 2012/7/20/6:25:1(130.34.95.43) 0 -20 44 47 6936 Samoto dummy 2 2012/7/20/11:23:19(130.34.95.43) Ti 2012/7/20/11:24:56(130.34.95.43) -20 44 47 6936 Samoto dummy 1 2012/7/20/11:25:44(130.34.95.43) Al -> Ti 2012/7/20/11:26:9(130.34.95.43) 20 44 47 6936 Samoto dummy 2 2012/7/20/11:26:40(130.34.95.43) Al -> Ti 22 18 26 6937 makihata dummy 0 2012/7/20/13:45:52(130.34.95.44) Ti/Au on opened LSI -22 34 42 6937 makihata dummy 0 2012/7/20/13:46:39(130.34.95.44) Al sputter on planarized polymer 2012/7/22/0:46:41(130.34.95.44) -21 18 36 6936 Samoto dummy 0 2012/7/20/17:14:30(130.34.95.43) Au,Ti 2012/7/20/23:12:24(130.34.95.44) 23 18 25 4771 he dummy 0 2012/7/20/18:44:6(130.34.95.21) Al -21 0 6 6908 noriki dummy 0 2012/7/20/21:17:37(130.34.95.37) Cr/Au 2012/7/20/23:11:25(130.34.95.44) 21 0 8 6936 Samoto dummy 0 2012/7/20/23:12:14(130.34.95.44) Au,Ti 21 18 26 6908 noriki dummy 0 2012/7/20/23:12:51(130.34.95.44) Cr/Au 21 26 28 6908 noriki, ohara dummy 0 2012/7/21/8:56:50(130.34.95.37) 木野先生承認済み 22 36 46 6937 makihata dummy 0 2012/7/22/0:47:3(130.34.95.44) 0 22 27 35 6937 makihata dummy 0 2012/7/22/12:44:51(130.34.95.43) 0 23 25 31 5810 inomata dummy 0 2012/7/22/14:53:58(130.34.95.49) cr-au 24 35 42 5810 zhao dummy 0 2012/7/23/9:46:52(130.34.95.49) Cr/Au -27 32 39 6908 nakajima dummy 0 2012/7/23/12:45:4(130.34.95.37) Cr/Au 2012/7/24/20:30:58(130.34.95.44) -23 32 38 5810 tanahashi dummy 0 2012/7/23/13:24:53(130.34.95.49) Cr 2012/7/23/14:14:20(130.34.95.49) 25 28 34 6937 chu dummy 0 2012/7/23/13:41:4(130.34.95.43) Au/Cr 21 28 30 6908 noriki dummy 0 2012/7/23/14:13:24(130.34.95.37) Ti/Au 23 31 48 5810 inomata dummy 1 2012/7/23/14:14:29(130.34.95.49) 0 -24 0 21 5810 inomata dummy 0 2012/7/23/14:14:40(130.34.95.49) 0 2012/7/23/14:14:45(130.34.95.49) 24 0 21 5810 inomata dummy 1 2012/7/23/14:14:59(130.34.95.49) 0 -24 21 28 5810 inotama dummy 2 2012/7/23/15:51:2(130.34.95.49) 0 2012/7/23/15:51:15(130.34.95.49) 24 21 28 5810 inotama dummy 1 2012/7/23/15:51:31(130.34.95.49) 0 26 19 29 6965 wu dummy 0 2012/7/23/16:2:34(130.34.95.43) Cr/Au 25 19 21 6937 Wei-Shan Wang dummy 0 2012/7/23/21:56:7(130.34.95.43) etch 24 42 48 6908 noriki,ohara dummy 0 2012/7/24/1:5:34(130.34.95.44) Au, 木野先生承認済み 25 0 4 6908 noriki dummy 0 2012/7/24/1:5:44(130.34.95.44) 0 25 34 42 6937 makihata dummy 0 2012/7/24/5:37:48(130.34.95.43) Ti/Au 25 17 19 6937 makihata dummy 2 2012/7/24/5:38:44(130.34.95.43) Al -> Ti -25 42 48 6937 Wei-Shan Wang dummy 0 2012/7/24/9:57:6(130.34.95.43) AuCr 2012/7/25/14:1:23(130.34.95.44) 24 28 35 5810 inomata dummy 1 2012/7/24/9:58:40(130.34.95.43) 0 26 12 19 6937 Niikawa dummy 0 2012/7/24/13:18:7(130.34.95.43) 0 -27 22 29 6908 nakajima dummy 0 2012/7/24/20:31:32(130.34.95.44) Cr/Au 2012/7/25/18:24:0(130.34.95.37) 25 4 16 6908 noriki dummy 0 2012/7/24/21:36:30(130.34.95.44) 0 -26 36 38 6937 Wei-Shan Wang dummy 0 2012/7/25/14:2:37(130.34.95.44) etch 2012/7/26/16:25:4(130.34.95.44) -27 29 38 6909 S.Kanno dummy 0 2012/7/25/14:54:14(130.34.95.37) Ti/AU 2012/7/25/18:23:53(130.34.95.37) 25 42 46 6937 makihata dummy 0 2012/7/25/17:31:22(130.34.95.43) 0 -27 26 36 6909 S.Kanno dummy 0 2012/7/26/15:6:39(130.34.95.37) Au/Ti 2012/7/26/19:15:11(130.34.95.44) -26 36 42 6937 Wei-Shan Wang dummy 0 2012/7/26/16:25:24(130.34.95.44) Au/Cr 2012/7/26/16:27:19(130.34.95.44) 30 20 48 5810 inomata dummy 1 2012/7/27/11:56:58(130.34.95.49) 0 31 0 48 5810 inomata dummy 1 2012/7/27/11:58:59(130.34.95.49) 0 -29 34 42 6937 Wei-Shan Wang dummy 0 2012/7/27/16:15:34(130.34.95.43) AuCr 2012/7/27/16:18:8(130.34.95.43) -29 32 39 6937 Wei-Shan Wang dummy 0 2012/7/27/16:18:21(130.34.95.43) AuCr 2012/7/27/16:18:36(130.34.95.43) -29 31 40 6937 Wei-Shan Wang dummy 0 2012/7/27/16:18:54(130.34.95.43) AuCr 2012/7/29/11:1:41(130.34.94.147) 29 40 46 6936 hatakeyama dummy 0 2012/7/27/21:30:59(130.34.95.43) Au/Cr -29 18 31 6937 konno dummy 0 2012/7/27/22:6:49(130.34.95.43) 0 2012/7/28/12:36:48(130.34.95.43) 28 33 39 6937 Konno dummy 0 2012/7/28/11:42:14(130.34.95.43) 0 -28 39 46 6937 Konno dummy 0 2012/7/28/12:37:3(130.34.95.43) 0 2012/7/28/19:41:16(130.34.95.43) 28 28 33 6965 wu,sasaki dummy 0 2012/7/28/12:37:30(130.34.95.31) 0 28 39 42 6937 Konno dummy 0 2012/7/28/12:37:3(130.34.95.43) 0 28 42 44 6937 Konno dummy 0 2012/7/28/19:41:29(130.34.95.43) 0 29 34 40 6937 Wei-Shan Wang dummy 0 2012/7/29/11:2:3(130.34.94.147) AuCr 29 28 34 6937 N.WANG dummy 0 2012/7/29/11:53:1(130.34.95.43) Cr/Au 30 2 12 6937 makihata dummy 0 2012/7/29/18:35:1(130.34.95.43) 0 29 46 48 6936 hatakeyama dummy 0 2012/7/29/19:2:49(130.34.95.43) 0 30 12 18 6937 makihata dummy 0 2012/7/30/2:51:47(130.34.95.43) 0