1 21 28 5810 Toan dummy 0 2011/11/30/10:46:37(130.34.95.49) 0 -1 28 38 6908 noriki dummy 0 2011/11/30/15:52:18(130.34.95.37) Cr 2011/12/1/17:4:48(130.34.95.44) -2 20 22 4119 S.Watanabe dummy 2 2011/11/30/16:19:42(130.34.63.131) Ti:#2->#1 2011/12/1/8:36:50(130.34.95.37) -1 39 48 6937 makihata dummy 0 2011/11/30/16:58:9(130.34.95.43) Al 2011/12/1/5:18:55(130.34.95.43) 2 27 36 5810 tanahashi dummy 0 2011/12/1/0:45:32(130.34.95.49) Al 1 38 44 4771 Minh dummy 0 2011/12/1/7:9:5(130.34.95.21) 0 1 16 20 6937 makihata dummy 0 2011/12/1/8:28:7(130.34.95.43) 0 1 28 37 6908 noriki dummy 0 2011/11/30/15:52:18(130.34.95.37) Cr 1 46 48 6909 sasaki&watanabe dummy 2 2011/12/1/22:11:24(130.34.95.37) Al>Ti 田中先生承認 2 0 7 6909 sasaki&watanabe dummy 0 2011/12/1/22:12:42(130.34.95.37) Ti/Au/Ti/Au 田中先生承認 2 7 8 6909 sasaki&watanabe dummy 2 2011/12/1/22:13:52(130.34.95.37) Ti>Al 田中先生承認 -6 34 44 6956 huang dummy 0 2011/12/2/14:22:20(130.34.95.38) Al 2011/12/6/19:32:29(130.34.95.49) -5 18 26 5810 tanahashi dummy 0 2011/12/4/21:37:23(130.34.95.44) Al 2011/12/5/10:1:50(130.34.95.43) 5 18 23 5810 tanahashi dummy 0 2011/12/4/21:37:23(130.34.95.44) Al 5 24 32 5810 tanahashi dummy 0 2011/12/5/10:2:23(130.34.95.43) Al 5 32 40 4830 nakahira dummy 0 2011/12/5/14:14:32(130.34.95.30) Cr/Au 6 20 28 6937 yoshida-m dummy 0 2011/12/5/17:43:38(130.34.95.43) Au/Cr -6 44 48 6908 noriki,ohara dummy 0 2011/12/6/3:43:8(130.34.95.37) Al,ベー先生承認済み 2011/12/6/20:20:36(130.34.95.44) -7 0 6 6908 noriki dummy 0 2011/12/6/3:43:17(130.34.95.37) 0 2011/12/6/20:20:41(130.34.95.44) 6 32 34 6956 huang dummy 0 2011/12/6/15:26:47(130.34.95.38) Al 6 34 42 6956 huang dummy 0 2011/12/2/14:22:20(130.34.95.38) Al 8 16 26 6937 Moriwaki dummy 0 2011/12/7/9:14:13(130.34.95.43) Pt 8 27 33 4771 Minh dummy 0 2011/12/8/7:43:48(130.34.95.21) 0 8 26 27 5810 inomata dummy 1 2011/12/8/12:42:23(130.34.95.43) 0 8 33 42 6937 Huang Li-Chung dummy 0 2011/12/8/14:24:44(130.34.95.43) Cr/Au 9 42 48 4771 Minh dummy 0 2011/12/9/19:25:58(130.34.95.21) with Phan, Prof. Kuwano's permission 10 21 30 6937 Huang dummy 0 2011/12/9/20:37:54(130.34.95.43) 0 10 32 34 6937 Huang dummy 0 2011/12/10/15:31:25(130.34.95.44) 0 -13 23 33 4119 S.Watanabe dummy 0 2011/12/13/9:26:27(130.34.95.44) Al 2011/12/13/9:50:34(130.34.95.44) 13 22 30 4119 S.Watanabe dummy 0 2011/12/13/9:50:53(130.34.95.44) Al -14 22 30 6909 sasaki dummy 0 2011/12/13/14:52:15(130.34.95.37) Cr 2011/12/13/14:53:39(130.34.95.37) 14 20 28 6909 sasaki dummy 0 2011/12/13/14:53:57(130.34.95.37) Cr 13 40 48 6937 makihata dummy 0 2011/12/13/16:56:1(130.34.95.44) Ti/Au 14 4 6 6909 sasaki&watanabe dummy 2 2011/12/14/1:59:7(130.34.95.44) Ti>Al ベー先生承認 14 37 43 5810 Toan dummy 0 2011/12/14/9:46:31(130.34.95.49) 0 14 28 37 6937 makihata dummy 0 2011/12/14/10:36:5(130.34.95.43) Ti 15 22 28 5810 inomata dummy 0 2011/12/14/12:33:19(130.34.95.49) Au/Cr 15 28 34 4771 Phan dummy 0 2011/12/14/18:58:13(130.34.95.21) Al 14 43 48 4771 Minh dummy 0 2011/12/14/20:22:8(130.34.95.21) with Phan, Prof. Kuwano's permission (Au,Pt,Cr) 15 0 2 4771 Minh dummy 0 2011/12/14/20:22:45(130.34.95.21) with Phan, Prof. Kuwano's permission (Au,Pt,Cr) 15 35 43 4771 sugimoto dummy 0 2011/12/14/20:51:24(130.34.95.21) Al -15 14 22 6937 Kubota dummy 0 2011/12/14/22:23:2(130.34.95.43) 0 2011/12/14/22:23:19(130.34.95.43) -15 14 22 6937 Kubota,Takahashi dummy 0 2011/12/14/22:23:56(130.34.95.43) Al 2011/12/15/7:31:36(130.34.95.43) 15 2 4 4771 Minh dummy 0 2011/12/14/23:22:51(130.34.95.44) with Phan, Prof. Kuwano's permission -15 43 48 4771 Minh dummy 0 2011/12/15/2:11:43(130.34.95.21) with Phan, Prof. Kuwano's permission 2011/12/15/21:15:48(130.34.95.44) 15 14 18 6937 Kubota,Takahashi dummy 0 2011/12/14/22:23:56(130.34.95.43) Al 15 34 35 4771 Phan dummy 0 2011/12/15/15:51:42(130.34.95.21) 0 16 24 30 5810 inomata dummy 0 2011/12/15/16:15:2(130.34.95.49) Cr/Au 16 30 38 6937 Kubota dummy 0 2011/12/15/17:52:26(130.34.95.43) Cr/Au 15 43 45 4771 Minh dummy 0 2011/12/15/2:11:43(130.34.95.21) with Phan, Prof. Kuwano's permission 16 6 16 6937 Moriwaki, Matsuo dummy 0 2011/12/16/1:36:35(130.34.95.43) Al. 田中先生許可。 16 38 44 4771 Minh dummy 0 2011/12/16/10:57:54(130.34.95.21) 0 20 42 48 6909 sasaki&kigure dummy 0 2011/12/16/19:45:57(130.34.95.37) Cr 17 0 6 6937 yoshida-m dummy 0 2011/12/16/22:55:41(130.34.95.43) &hatakeyama 田中先生承認 Cr/Au -19 24 30 5810 inomata dummy 0 2011/12/18/17:2:31(130.34.95.43) cr/au 2011/12/19/8:48:57(130.34.95.49) 19 30 36 4771 Phan dummy 0 2011/12/18/22:37:30(130.34.95.21) 0 19 21 27 5810 inomata dummy 0 2011/12/19/8:49:16(130.34.95.49) cr/au 19 36 38 4771 Phan dummy 0 2011/12/19/13:11:19(130.34.95.44) 0 19 38 44 4771 Phan dummy 0 2011/12/19/18:24:42(130.34.95.43) Al -22 30 41 6937 Kochhar dummy 2 2011/12/20/16:20:9(130.34.95.43) Al -> Ru; After finishing, Ru -> Al 2011/12/22/13:56:20(130.34.95.43) 21 20 22 6937 Weichih Lin dummy 2 2011/12/20/19:24:9(130.34.95.43) Target change from Al to Zn 21 22 28 6937 Weichih Lin dummy 0 2011/12/20/19:25:0(130.34.95.43) Zn deposition testing 20 0 2 6909 sasaki dummy 0 2011/12/20/23:10:43(130.34.95.37) 延長 -26 26 32 6937 Weichih Lin dummy 0 2011/12/21/10:18:13(130.34.95.43) Zn deposition testing 2011/12/21/16:26:29(130.34.95.43) 21 36 42 4771 Phan dummy 2 2011/12/21/15:17:0(130.34.95.43) Al 27 20 22 6937 Weichih Lin dummy 2 2011/12/21/16:26:56(130.34.95.43) Zn target 27 22 28 6937 Weichih Lin dummy 0 2011/12/21/16:27:22(130.34.95.43) Cr/Zn -22 18 26 4771 Minh dummy 2 2011/12/22/8:14:23(130.34.95.21) Change target: Zn->Si 2011/12/22/8:46:10(130.34.95.21) 22 18 20 4771 Minh dummy 2 2011/12/22/8:14:23(130.34.95.21) Change target: Zn->Si 22 20 26 4771 Minh dummy 0 2011/12/22/8:47:47(130.34.95.21) (Not change target: Use Ar and Cr targets for deposition) -22 31 39 4771 Minh dummy 0 2011/12/22/14:42:30(130.34.95.21) change target: Al->Si 2011/12/22/14:42:39(130.34.95.21) 22 31 32 4771 Minh dummy 0 2011/12/22/14:42:30(130.34.95.21) change target: Al->Si -22 32 39 4771 Minh dummy 2 2011/12/22/14:43:12(130.34.95.21) change target: Al->Si 2011/12/22/16:28:18(130.34.95.49) 22 32 35 4771 Minh dummy 2 2011/12/22/14:43:12(130.34.95.21) change target: Al->Si -26 20 26 4771 bao dummy 0 2011/12/23/11:33:5(130.34.95.21) Au 2011/12/23/11:39:55(130.34.95.21) -26 20 26 4771 bao dummy 0 2011/12/23/11:42:20(130.34.95.21) Au 2011/12/23/11:42:50(130.34.95.21) -26 20 26 4771 bao dummy 0 2011/12/23/11:43:19(130.34.95.21) Cr/Au 2011/12/24/20:11:20(130.34.95.21) -27 28 38 6937 Kochhar dummy 0 2011/12/23/12:43:51(130.34.94.146) 3->Ru target; after finishing back to 3 2011/12/26/9:6:9(130.34.95.43) 26 20 27 4771 bao dummy 0 2011/12/24/20:11:39(130.34.95.21) Cr/Au -27 28 38 6937 Kochhar dummy 2 2011/12/26/9:6:27(130.34.95.43) 3->Ru target; after finishing back to 3 2011/12/26/17:21:2(130.34.95.43) -27 38 44 5810 inomata dummy 2 2011/12/26/11:41:2(130.34.95.49) 3->Pt,Cr/Pt 2011/12/26/17:22:26(130.34.95.49) 26 32 34 4771 bao dummy 0 2011/12/26/15:8:38(130.34.95.21) Auターゲット取り外す -26 34 40 4771 Minh dummy 0 2011/12/26/15:28:47(130.34.95.44) Au/Cr 2011/12/26/15:44:3(130.34.95.21) -26 42 48 4771 Minh dummy 0 2011/12/26/15:44:31(130.34.95.21) 0 2011/12/26/15:44:40(130.34.95.21) -26 42 48 4771 Minh dummy 0 2011/12/26/15:44:57(130.34.95.21) Au/Cr 2011/12/26/17:54:14(130.34.95.21) 26 34 42 5810 inomata dummy 1 2011/12/26/16:43:44(130.34.95.44) 0 -27 28 36 5810 inomata dummy 0 2011/12/26/17:21:55(130.34.95.49) 3->Pt,Cr/Pt 2011/12/26/17:21:59(130.34.95.49) 27 28 36 5810 inomata dummy 2 2011/12/26/17:22:23(130.34.95.49) 3 -> Pt.Cr/Pt 26 43 48 4771 Minh dummy 0 2011/12/26/17:54:42(130.34.95.21) with Phan, Prof. Kuwano's permission (Au,Cr) 27 38 48 6937 Huang Li-Chung dummy 2 2011/12/26/19:4:26(130.34.95.43) 3. => Ge High vacuum needed 28 16 23 6937 Huang Li-Chung dummy 0 2011/12/26/19:5:1(130.34.95.43) Ge High vacuum needed -28 40 46 4771 Phan dummy 0 2011/12/27/0:38:34(130.34.95.43) Al target 2011/12/27/0:39:5(130.34.95.43) 27 14 20 4771 Minh dummy 0 2011/12/27/6:2:34(130.34.95.43) 0 28 34 44 6937 makihata dummy 0 2011/12/27/21:14:25(130.34.95.43) Ti/Au -28 23 30 6937 Wei-Shan Wang dummy 0 2011/12/28/9:1:48(130.34.95.43) Ge 2011/12/28/9:9:37(130.34.95.43) 28 23 30 6937 Wei-Shan Wang dummy 0 2011/12/28/9:10:4(130.34.95.43) Ge sputter delayed due to MNC cleaning 28 44 47 6937 makihata dummy 0 2011/12/28/10:16:0(130.34.95.43) 0 29 20 30 6937 makihata dummy 0 2011/12/28/21:57:12(130.34.95.43) 0 29 30 39 6909 sasaki dummy 2 2011/12/28/23:1:19(130.34.95.37) Ge->Al Al -30 24 34 6956 huang dummy 0 2011/12/29/14:15:48(130.34.95.38) Al 2011/12/30/10:17:45(130.34.95.38) -30 39 46 6937 Huang Li-Chung dummy 0 2011/12/30/18:55:37(130.34.95.44) Cr/Au 2011/12/30/18:55:44(130.34.95.44) 30 39 40 6937 Huang Li-Chung dummy 0 2011/12/30/18:55:37(130.34.95.44) Cr/Au 30 40 48 6937 Huang Li-Chung dummy 0 2011/12/30/18:56:7(130.34.95.44) Cr/Au -31 0 23 6937 Huang Li-Chung dummy 0 2011/12/30/18:57:16(130.34.95.44) Touble side Cr/Au 2011/12/30/23:58:50(130.34.95.44) -31 28 34 5810 inomata dummy 0 2011/12/30/21:28:42(130.34.95.49) tanaka, 2011/12/30/21:28:51(130.34.95.49) 31 28 34 5810 inomata dummy 0 2011/12/30/21:29:16(130.34.95.49) tanaka, 川合先生承認, Cr-Au 31 0 6 6937 Huang Li-Chung dummy 0 2011/12/30/23:59:38(130.34.95.44) Cr/Au 31 36 42 5810 inomata dummy 0 2011/12/31/13:26:45(130.34.95.43) cr/au