-3	26	34	6937	Kano	dummy	0	2008/2/28/22:11:57(130.34.95.43)	Ti	2008/2/28/22:13:37(130.34.95.43)
3	26	34	6937	Kano	dummy	0	2008/2/28/22:14:23(130.34.95.43)	Ti
1	21	29	6909	fujiwara	dummy	2	2008/2/29/1:10:4(130.34.95.37)	Al
1	29	34	6968	iyanagi	dummy	0	2008/2/29/21:11:12(130.34.88.130)	Cr/Au
1	34	39	6909	fujiwara	dummy	0	2008/3/1/15:15:55(172.16.44.141)	Cr/Au
-3	36	48	4404	Hyo-Jong Lee	dummy	0	2008/3/2/20:59:15(130.34.248.30)	Cr/Ti	2008/3/2/20:59:31(130.34.248.30)
-3	36	48	4404	Ha, Jun-Seok	dummy	0	2008/3/2/20:59:58(130.34.248.30)	Ti/Cr	2008/3/2/21:0:43(130.34.248.30)
4	19	26	4404	Ha, Jun-Seok	dummy	0	2008/3/2/21:0:34(130.34.248.30)	Ti/Cr
-3	36	48	4404	Lee, Hyo-Jong	dummy	0	2008/3/2/21:1:10(130.34.248.30)	Sc	2008/3/2/21:1:18(130.34.248.30)
-3	36	48	4404	Lee, Hyo-Jong	dummy	0	2008/3/2/21:1:39(130.34.248.30)	Zr	2008/3/3/14:23:44(130.34.248.30)
4	0	6	4404	Lee, Hyo-Jong	dummy	0	2008/3/2/21:2:0(130.34.248.30)	Zr
3	34	48	4404	Lee, Hyo-Jong	dummy	0	2008/3/3/14:24:5(130.34.248.30)	Zr
-4	26	34	6937	k.hirano	dummy	0	2008/3/3/14:59:8(130.34.95.43)	Cr	2008/3/3/15:45:32(130.34.95.43)
-4	26	34	6936	kawaguchi	dummy	0	2008/3/3/18:43:29(130.34.95.43)	0	2008/3/3/18:47:45(130.34.95.43)
-4	26	34	6936	kawaguchi	dummy	0	2008/3/3/18:48:0(130.34.95.43)	Cr	2008/3/4/15:0:17(130.34.95.43)
-4	34	41	6936	watanabe	dummy	0	2008/3/3/21:24:58(130.34.95.43)	Cr/Au	2008/3/3/21:25:49(130.34.95.43)
-4	34	42	6936	watanabe	dummy	0	2008/3/3/21:26:30(130.34.95.43)	Cr/Au	2008/3/4/18:22:57(172.16.44.136)
4	26	32	6936	kawaguchi	dummy	0	2008/3/3/18:48:0(130.34.95.43)	Cr
5	26	32	6937	Kano	dummy	0	2008/3/4/16:53:18(130.34.95.43)	Ti
4	34	39	6936	watanabe	dummy	0	2008/3/3/21:26:30(130.34.95.43)	Cr/Au
-5	32	40	4771	Miyashita	dummy	0	2008/3/5/14:7:31(130.34.95.43)	0	2008/3/5/14:8:0(130.34.95.43)
-5	32	40	4771	Miyashita	dummy	0	2008/3/5/14:8:30(130.34.95.43)	Au/Cr	2008/3/5/17:29:40(130.34.89.180)
5	42	48	4249	hori	dummy	0	2008/3/5/17:15:0(130.34.95.17)	Cr/Au
5	32	37	4771	Miyashita	dummy	0	2008/3/5/14:8:30(130.34.95.43)	Au/Cr
5	37	38	4771	Miyashita	dummy	0	2008/3/5/17:30:12(130.34.89.180)	Au/Cr
5	38	40	4771	Miyashita	dummy	0	2008/3/5/17:51:41(130.34.89.180)	Au/Cr
5	40	42	4771	Miyashita	dummy	0	2008/3/5/19:32:14(130.34.89.180)	Au/Cr
-7	28	36	6968	Asakura	dummy	0	2008/3/6/19:58:46(130.34.88.130)	Cr/Au	2008/3/7/16:27:14(130.34.88.130)
-13	40	48	6909	fujiwara	dummy	2	2008/3/7/11:25:38(130.34.95.43)	Ta/Au/Cr	2008/3/13/17:35:29(130.34.95.37)
7	28	35	6968	Asakura	dummy	0	2008/3/6/19:58:46(130.34.88.130)	Cr/Au
-7	40	48	6936	kawaguchi	dummy	0	2008/3/7/16:58:9(130.34.95.43)	Cr	2008/3/7/19:20:20(130.34.95.43)
7	40	41	6936	kawaguchi	dummy	0	2008/3/7/16:58:9(130.34.95.43)	Cr
-10	30	37	6936	honjoya	dummy	0	2008/3/7/21:45:40(130.34.95.43)	Cr/Pt/Au	2008/3/8/11:52:37(130.34.95.43)
8	0	6	6968	narumi	dummy	0	2008/3/7/22:42:51(130.34.88.130)	Cr/Au
-10	26	33	6936	honjoya	dummy	0	2008/3/8/11:53:20(130.34.95.43)	Cr/Pt/Au	2008/3/9/19:47:20(130.34.95.43)
8	28	35	6968	iyanagi	dummy	0	2008/3/8/12:51:9(130.34.88.130)	0
8	42	48	4249	hori	dummy	0	2008/3/8/17:43:48(130.34.95.17)	Au/Cr
9	20	27	6936	kawaguchi	dummy	0	2008/3/8/17:55:17(130.34.95.43)	Cr
9	42	48	4249	hori	dummy	0	2008/3/9/19:34:42(130.34.95.43)	Ti/Au
-10	24	31	6936	honjoya	dummy	0	2008/3/9/19:48:1(130.34.95.43)	Cr/Pt/Au	2008/3/10/10:55:27(130.34.95.43)
10	4	10	6936	kawaguchi	dummy	0	2008/3/10/2:11:50(130.34.95.43)	0
-10	27	34	6936	honjoya	dummy	0	2008/3/10/10:56:28(130.34.95.43)	Cr/Pt/Au	2008/3/10/12:39:17(130.34.95.43)
-10	34	40	4249	hori	dummy	0	2008/3/10/11:26:9(130.34.95.17)	Ti/Au	2008/3/10/17:15:14(130.34.95.43)
10	27	28	6936	honjoya	dummy	0	2008/3/10/10:56:28(130.34.95.43)	Cr/Pt/Au
10	40	48	6936	honjoya	dummy	0	2008/3/10/12:40:25(130.34.95.43)	Cr/Pt/Au
-11	30	36	6968	azuma	dummy	0	2008/3/10/13:59:24(130.34.88.130)	cr/au	2008/3/11/12:41:7(130.34.88.130)
11	36	44	6909	fujiwara	dummy	2	2008/3/10/15:49:53(130.34.95.37)	Ta/Au/Cr
10	34	37	4249	hori	dummy	0	2008/3/10/11:26:9(130.34.95.17)	Ti/Au
11	18	26	6936	kasuga	dummy	2	2008/3/10/18:52:31(130.34.95.43)	Cr/Pt/Au 逆スパッタ
11	0	2	6936	honjoya	dummy	2	2008/3/10/23:17:55(130.34.95.43)	Cr/Pt/Au
-12	18	25	6937	Yanagida	dummy	0	2008/3/11/10:34:30(130.34.95.8)	Au/Cr	2008/3/11/14:27:21(130.34.95.8)
11	26	28	6936	kasuga	dummy	0	2008/3/11/11:39:32(130.34.95.43)	Cr/Pt/Au 
-12	18	25	6937	Yanagida	dummy	0	2008/3/11/14:30:29(130.34.95.8)	Au/Cr	2008/3/12/9:16:29(130.34.95.8)
-12	32	38	6968	iyanagi	dummy	0	2008/3/11/20:41:7(130.34.88.130)	Cr/Au	2008/3/12/10:26:22(130.34.88.130)
12	18	21	6937	Yanagida	dummy	0	2008/3/11/14:30:29(130.34.95.8)	Au/Cr
12	28	34	6968	iyanagi	dummy	0	2008/3/12/10:26:51(130.34.88.130)	0
12	36	44	6909	komiya	dummy	0	2008/3/12/16:3:14(172.16.44.141)	0
13	20	26	6968	azuma	dummy	0	2008/3/12/18:9:22(130.34.88.130)	cr/au
13	36	48	6937	Kurahashi	dummy	2	2008/3/13/18:31:34(172.16.44.137)	Tiと1号機のＴａを交換
-14	20	26	6937	Kurahashi	dummy	0	2008/3/13/19:42:36(130.34.95.43)	Ti/Pt	2008/3/13/23:3:19(130.34.95.43)
14	28	38	6936	kasuga	dummy	2	2008/3/13/21:20:11(172.16.44.137)	Cr/Pt/Au
14	20	28	6937	Kurahashi	dummy	0	2008/3/13/23:3:38(130.34.95.43)	Ti/Pt
14	38	44	6937	ファイズル	dummy	0	2008/3/14/11:15:16(130.34.95.43)	Cr/Au
-18	22	28	6936	honjoya	dummy	0	2008/3/14/11:25:45(130.34.95.43)	Cr/Au	2008/3/17/12:1:12(130.34.95.43)
-15	25	32	6909	fujiwara	dummy	2	2008/3/15/10:29:28(172.16.44.137)	Ta/Au/VC	2008/3/15/10:29:39(172.16.44.137)
15	24	31	6909	fujiwara	dummy	2	2008/3/15/10:30:25(172.16.44.137)	Ta/Au/Ta
-15	31	37	6968	azuma	dummy	0	2008/3/15/10:35:29(130.34.88.130)	cr/au	2008/3/15/10:36:6(130.34.88.130)
15	31	38	6968	azuma	dummy	2	2008/3/15/10:36:25(130.34.88.130)	cr/au
15	38	43	6968	iyanagi	dummy	0	2008/3/15/11:57:59(130.34.88.130)	0
17	26	34	6936	honjoya	dummy	0	2008/3/16/15:10:33(130.34.95.43)	Cr/Au
17	42	48	6937	Kurahashi	dummy	0	2008/3/17/11:52:25(130.34.95.43)	W
17	36	42	6937	Kurahashi	dummy	2	2008/3/17/11:52:47(130.34.95.43)	0
-18	26	34	6968	azuma	dummy	0	2008/3/17/12:52:19(130.34.88.130)	cr/au	2008/3/17/12:52:26(130.34.88.130)
-18	26	36	6968	azuma	dummy	0	2008/3/17/12:52:39(130.34.88.130)	azuma	2008/3/18/11:59:27(130.34.88.130)
17	34	36	6936	honjoya	dummy	0	2008/3/17/15:15:19(172.16.44.137)	Cr/Au
20	20	28	6909	fujiwara	dummy	2	2008/3/18/17:4:19(172.16.44.137)	Ta/Au/Ta
-19	24	30	7281	date	dummy	0	2008/3/18/17:52:19(130.34.77.72)	Cr	2008/3/19/12:7:13(130.34.77.72)
19	24	27	7281	date	dummy	0	2008/3/18/17:52:19(130.34.77.72)	Cr
19	32	36	6968	Asakura	dummy	0	2008/3/19/14:29:53(130.34.88.130)	Cr/Au
19	36	38	6968	Asakura	dummy	0	2008/3/19/16:31:24(130.34.95.43)	Cr/Au
-20	28	34	6965	T.Sasaki	dummy	0	2008/3/19/22:21:44(130.34.92.82)	0	2008/3/19/22:24:31(130.34.92.82)
20	30	36	6965	T.Sasaki	dummy	0	2008/3/19/22:24:51(130.34.92.82)	0
20	28	30	6909	fujiwara	dummy	0	2008/3/20/12:34:10(172.16.44.141)	0
20	36	40	6965	T.Sasaki	dummy	0	2008/3/20/17:43:15(130.34.92.82)	0
21	26	32	6936	kawaguchi	dummy	0	2008/3/21/10:58:26(130.34.95.43)	0
21	38	44	6937	ファイズル	dummy	0	2008/3/21/14:20:8(130.34.95.43)	Cr/Au
21	32	34	6936	kawaguchi	dummy	0	2008/3/21/14:22:6(130.34.95.43)	0
-24	20	28	6909	fujiwara	dummy	2	2008/3/23/16:10:8(172.16.44.141)	Ta/Au/Ta	2008/3/24/0:41:17(172.16.44.137)
-24	16	24	6909	fujiwara	dummy	2	2008/3/24/0:41:35(172.16.44.137)	0	2008/3/24/0:43:17(172.16.44.137)
-24	22	30	6909	fujiwara	dummy	2	2008/3/24/0:43:36(172.16.44.137)	0	2008/3/24/0:44:53(172.16.44.137)
-24	8	14	6965	hokari	dummy	0	2008/3/24/3:5:43(130.34.95.43)	0	2008/3/24/3:5:58(130.34.95.43)
24	8	9	6965	hokari	dummy	0	2008/3/24/3:5:43(130.34.95.43)	0
24	9	14	6965	hokari	dummy	0	2008/3/24/3:6:43(130.34.95.43)	Au/Cr
24	22	29	6909	fujiwara	dummy	2	2008/3/24/11:18:35(172.16.44.141)	Ta/Au/Ta
-24	29	30	6909	fujiwara	dummy	2	2008/3/24/11:19:44(172.16.44.141)	Ta→Ti	2008/3/24/13:9:38(172.16.44.137)
25	36	48	6909	noriki	dummy	2	2008/3/25/17:22:40(130.34.95.37)	Ta
26	26	34	6937	Yanagida	dummy	0	2008/3/26/13:29:21(130.34.95.8)	0
26	34	48	6909	s.kanno	dummy	2	2008/3/26/15:25:8(172.16.44.141)	Ta
27	16	29	6909	s,kanno	dummy	2	2008/3/27/0:0:2(172.16.44.137)	Ta,逆スパッタ
-31	42	48	6937	Y.G. JIANG	dummy	0	2008/3/30/20:14:13(130.34.95.43)	Cr-Au	2008/3/30/20:18:40(130.34.95.43)
31	35	43	6968	azuma	dummy	0	2008/3/31/17:12:8(130.34.88.130)	cr/au
-31	43	45	6968	azuma	dummy	0	2008/3/31/19:20:8(130.34.88.130)	cr/au	2008/3/31/20:19:42(130.34.88.130)