4	24	30	6965	R.Ito	dummy	0	2008/1/4/0:59:45(130.34.95.31)	Cr/Au
4	30	33	6909	kaiho	dummy	0	2008/1/4/14:41:44(172.16.44.137)	Cr
4	36	40	6968	azuma	dummy	0	2008/1/5/18:34:44(172.16.44.137)	cr/au
-7	25	30	6936	Honjoya	dummy	0	2008/1/6/19:29:20(130.34.95.43)	Cr/Au	2008/1/7/12:30:8(130.34.95.43)
7	25	27	6936	Honjoya	dummy	0	2008/1/6/19:29:20(130.34.95.43)	Cr/Au
7	27	31	6936	Honjoya	dummy	0	2008/1/7/12:31:0(130.34.95.43)	Cr/Au
9	28	32	6898	settsu	dummy	0	2008/1/7/14:24:49(130.34.95.28)	Cr
9	22	28	6937	Y.G. JIANG	dummy	0	2008/1/7/20:0:59(130.34.95.43)	Cr/Au
11	19	24	6937	Y.G. JIANG	dummy	0	2008/1/7/20:7:35(130.34.95.43)	Cr/Au
-8	38	48	7359	Yamamoto	dummy	0	2008/1/7/20:33:3(130.34.64.185)	Cr/Au	2008/1/8/12:0:38(130.34.64.185)
-8	1	6	6421	T.BABA	dummy	0	2008/1/7/22:55:19(130.34.248.180)	Au	2008/1/8/0:11:37(130.34.248.180)
8	28	32	6968	hirota	dummy	0	2008/1/7/23:5:35(130.34.95.15)	Cr/Au
8	1	3	6421	T.BABA	dummy	0	2008/1/7/22:55:19(130.34.248.180)	Au
8	3	5	6421	T.BABA	dummy	0	2008/1/8/0:11:56(130.34.248.180)	0
-9	38	44	6909	fujiwara	dummy	0	2008/1/8/0:30:34(130.34.95.37)	Ta/Au	2008/1/8/23:41:37(130.34.95.37)
-8	22	28	6965	R.Ito	dummy	0	2008/1/8/1:18:6(130.34.95.31)	Cr/Au	2008/1/8/10:39:31(172.16.44.137)
8	22	24	6965	R.Ito	dummy	0	2008/1/8/1:18:6(130.34.95.31)	Cr/Au
8	42	48	7359	yamamoto	dummy	0	2008/1/8/12:1:59(130.34.64.185)	Cr/Au
9	0	2	7359	yamamoto	dummy	0	2008/1/8/12:2:48(130.34.64.185)	Cr/Au
8	38	42	6968	hirota	dummy	0	2008/1/8/14:18:30(130.34.95.15)	Cr/Au
-10	19	24	6909	fujiwara	dummy	0	2008/1/8/23:42:8(130.34.95.37)	Ta/Au	2008/1/9/22:39:17(130.34.95.37)
9	8	14	6937	kashu	dummy	0	2008/1/9/3:52:51(130.34.94.170)	Cr/Au
-10	30	42	6909	yamada	dummy	0	2008/1/9/10:23:19(172.16.44.136)	Cu/Ta	2008/1/10/11:22:3(172.16.44.141)
-9	32	36	6421	T.BABA	dummy	0	2008/1/9/11:13:43(130.34.248.180)	0	2008/1/9/14:54:4(130.34.248.180)
-10	42	48	6909	Y.KANNO	dummy	0	2008/1/9/11:41:48(172.16.44.136)	Cu/Ta	2008/1/10/13:43:54(172.16.44.141)
9	40	44	6968	hirota	dummy	0	2008/1/9/15:9:40(130.34.95.15)	Cr/Au
-11	30	36	3586	higuchi	dummy	1	2008/1/9/16:40:45(130.34.95.17)	レートチェック	2008/1/10/15:5:59(130.34.95.17)
10	0	4	6968	A.Asakura	dummy	0	2008/1/9/18:20:17(130.34.95.15)	Cr/Au
-11	0	4	6968	A.Asakura	dummy	0	2008/1/9/18:58:22(130.34.95.15)	Cr/Au	2008/1/10/3:10:52(130.34.95.15)
15	18	32	7359	ITO	dummy	0	2008/1/9/18:59:51(130.34.74.56)	Cr/Au
-10	24	30	6909	fujiwara	dummy	0	2008/1/9/22:39:9(130.34.95.37)	Ta/Au	2008/1/9/23:56:41(130.34.95.37)
-11	30	40	3586	higuchi	dummy	1	2008/1/10/15:7:47(130.34.95.17)	レートチェック	2008/1/11/18:30:24(130.34.95.17)
-11	24	30	4404	Lee(Au)	dummy	0	2008/1/10/20:57:7(130.34.248.30)	0	2008/1/11/12:41:30(130.34.248.30)
11	44	48	6968	A.Asakura	dummy	0	2008/1/10/21:3:35(130.34.95.15)	Cr/Au
11	24	28	4404	Lee(Au)	dummy	0	2008/1/10/20:57:7(130.34.248.30)	0
-15	32	40	4404	Lee(Au)	dummy	0	2008/1/11/12:42:43(130.34.248.30)	0	2008/1/11/12:48:42(130.34.248.30)
15	36	48	4404	Lee(Au)	dummy	0	2008/1/11/14:7:37(130.34.248.30)	0
11	30	39	3586	higuchi	dummy	1	2008/1/10/15:7:47(130.34.95.17)	レートチェック
12	24	30	6909	satou	dummy	0	2008/1/11/23:49:35(130.34.95.37)	Au
-12	38	48	6909	satou	dummy	0	2008/1/11/23:52:33(130.34.95.37)	Cr/Pt	2008/1/12/14:34:19(172.16.44.137)
12	14	20	6909	komiya	dummy	0	2008/1/12/0:51:20(130.34.95.37)	Au
-12	40	46	6909	sato	dummy	0	2008/1/12/14:34:44(172.16.44.137)	Au	2008/1/12/16:50:49(172.16.44.141)
12	44	48	4249	abe	dummy	0	2008/1/12/21:45:40(130.34.95.17)	0
13	0	2	4249	abe	dummy	0	2008/1/12/21:46:48(130.34.95.17)	0
13	2	4	4249	Abe	dummy	0	2008/1/12/22:59:47(130.34.95.43)	0
13	30	44	6909	yamada	dummy	0	2008/1/13/0:1:57(130.34.95.37)	Ta
-13	23	28	6968	hirota	dummy	0	2008/1/13/9:58:5(130.34.95.15)	Cr/Au	2008/1/13/10:39:36(130.34.95.43)
-13	28	30	6968	hirota	dummy	0	2008/1/13/10:10:11(130.34.95.15)	Cr/Au	2008/1/13/10:10:23(130.34.95.15)
13	23	24	6968	hirota	dummy	0	2008/1/13/9:58:5(130.34.95.15)	Cr/Au
13	24	29	6968	hirota	dummy	0	2008/1/13/10:39:58(130.34.95.43)	Cr\Au
13	29	30	6968	hirota	dummy	0	2008/1/13/13:8:42(130.34.95.15)	Cr/Au
14	20	24	6421	T.BABA	dummy	0	2008/1/13/17:35:40(130.34.248.180)	Au
14	24	25	6421	T.BABA	dummy	0	2008/1/13/21:33:32(130.34.248.180)	Au
14	0	6	4249	Abe	dummy	0	2008/1/14/0:4:35(130.34.95.43)	0
14	25	26	6421	T.BABA	dummy	0	2008/1/14/10:19:46(130.34.248.180)	0
15	32	34	6936	kawaguchi	dummy	2	2008/1/14/14:23:30(130.34.95.43)	Cr ターゲット取り外し
14	34	46	6909	yamada	dummy	0	2008/1/14/15:31:19(130.34.95.37)	Ta
-16	16	28	6909	yamada	dummy	0	2008/1/14/19:55:23(130.34.95.37)	(Cu/Ta)	2008/1/14/19:56:22(130.34.95.37)
-16	16	28	6909	yamada	dummy	2	2008/1/14/19:56:48(130.34.95.37)	(Cu/Ta)	2008/1/14/19:58:11(130.34.95.37)
-16	8	28	6909	yamada	dummy	2	2008/1/14/19:59:3(130.34.95.37)	(Cu/Ta)	2008/1/14/23:41:12(130.34.95.37)
14	46	48	6968	azuma	dummy	0	2008/1/14/20:49:47(130.34.95.15)	Cr/Au
15	0	6	6968	azuma	dummy	0	2008/1/14/20:50:14(130.34.95.15)	Cr/Au
16	0	6	6909	yamada	dummy	2	2008/1/14/23:42:20(130.34.95.37)	Taターゲット取り外し
15	6	10	6968	azuma	dummy	0	2008/1/15/0:4:56(130.34.95.15)	Cr/Au
15	10	14	6968	azuma	dummy	0	2008/1/15/2:54:14(130.34.95.15)	Cr/Au
16	18	32	5318	IKOMA	dummy	0	2008/1/15/14:31:10(130.34.231.209)	Au
-15	34	36	6936	kawaguchi	dummy	0	2008/1/15/16:22:23(130.34.95.43)	0	2008/1/15/16:23:39(130.34.95.43)
15	34	35	6936	kawaguchi	dummy	0	2008/1/15/16:22:23(130.34.95.43)	0
-16	42	48	6937	Tsukamoto	dummy	0	2008/1/15/17:29:11(130.34.95.43)	Au/Cr	2008/1/16/16:18:11(130.34.95.43)
-18	26	32	6937	Tsukamoto	dummy	0	2008/1/15/17:32:5(130.34.95.43)	Au/Cr	2008/1/16/17:49:29(130.34.95.43)
17	24	32	7359	yamamoto	dummy	0	2008/1/15/21:23:23(130.34.64.185)	Cr/Au
16	6	12	6909	noriki	dummy	0	2008/1/16/1:36:7(172.16.44.137)	0
-16	32	38	5318	Koyama	dummy	0	2008/1/16/10:23:54(130.34.231.209)	Au	2008/1/16/16:1:3(172.16.44.137)
16	32	35	5318	Koyama	dummy	0	2008/1/16/10:23:54(130.34.231.209)	Au
17	32	40	3586	kishi	dummy	0	2008/1/16/16:5:19(130.34.95.17)	Cr/Au
-18	32	40	6937	Cho, Wonje	dummy	0	2008/1/16/17:19:54(130.34.95.43)	Cr/Au	2008/1/16/17:31:4(130.34.95.43)
-17	40	46	6937	Tsukamoto	dummy	0	2008/1/16/17:49:6(130.34.95.43)	0	2008/1/16/17:55:11(130.34.95.43)
17	40	46	6937	Tsukamoto	dummy	0	2008/1/16/17:55:32(130.34.95.43)	Au/Cr
16	46	48	6937	Kashu	dummy	2	2008/1/16/18:35:56(130.34.94.170)	2:Cu-->Cr
17	0	6	6937	Kashu	dummy	0	2008/1/16/18:36:27(130.34.94.170)	Cr/Au
17	46	48	6937	Tsukamoto	dummy	0	2008/1/17/16:49:51(130.34.95.43)	Au/Cr
-18	0	5	6968	hirota	dummy	0	2008/1/17/17:21:27(130.34.95.15)	Cr/Au	2008/1/17/17:21:48(130.34.95.15)
18	0	6	6968	hirota	dummy	0	2008/1/17/17:22:6(130.34.95.15)	Cr/Au
-18	24	29	6968	azuma	dummy	0	2008/1/17/18:1:35(130.34.95.15)	Cr/Au	2008/1/17/21:31:48(130.34.95.43)
18	18	24	6968	azuma	dummy	0	2008/1/17/21:31:25(130.34.95.43)	cr/au
-20	36	44	6945	murase	dummy	0	2008/1/17/23:57:46(130.34.95.48)	0	2008/1/20/13:38:31(130.34.95.48)
-18	24	28	6968	matsumoto	dummy	0	2008/1/18/9:25:58(130.34.95.15)	0	2008/1/18/9:26:17(130.34.95.15)
18	24	28	6968	matsumoto	dummy	0	2008/1/18/9:26:46(130.34.95.15)	CrAu
-18	30	36	4771	Miyashita	dummy	2	2008/1/18/10:35:42(172.16.44.137)	Cr/Au	2008/1/18/10:35:49(172.16.44.137)
18	30	36	4771	Miyashita	dummy	0	2008/1/18/10:36:8(172.16.44.137)	Au/Cr
18	36	48	6909	yamada	dummy	0	2008/1/18/13:31:21(172.16.44.137)	逆スパッタ条件だし
19	0	22	6909	yamada	dummy	2	2008/1/18/16:18:12(172.16.44.137)	Cu/Ta
19	24	32	6909	ki	dummy	0	2008/1/18/16:47:38(172.16.44.137)	Ta/Cu
20	24	32	6937	Tsukamoto	dummy	0	2008/1/18/19:7:0(130.34.95.43)	Au/Cr
19	38	48	6909	yamada	dummy	0	2008/1/19/19:7:41(172.16.44.137)	Cu/Ta
20	0	22	6909	yamada	dummy	0	2008/1/19/22:27:12(172.16.44.137)	0
20	32	36	6937	Tsukamoto	dummy	0	2008/1/20/10:27:11(130.34.95.43)	Au/Cr
20	44	48	6909	fujiwara	dummy	0	2008/1/20/11:42:57(130.34.95.37)	Cr/Au
-21	18	25	6909	fujiwara	dummy	2	2008/1/20/11:46:50(130.34.95.37)	Ta/Cu	2008/1/20/11:46:58(130.34.95.37)
-21	32	40	6909	fujiwara	dummy	2	2008/1/20/11:48:12(130.34.95.37)	Ta/Cu	2008/1/20/11:57:59(130.34.95.37)
-21	32	40	6909	fujiwara	dummy	2	2008/1/20/11:59:21(130.34.95.37)	Ta/Cu	2008/1/20/12:1:41(130.34.95.37)
-21	40	48	6909	fujiwara	dummy	2	2008/1/20/12:2:11(130.34.95.37)	Ta/Cu	2008/1/20/23:20:9(172.16.44.137)
20	36	44	6945	Murase	dummy	0	2008/1/20/13:38:49(130.34.95.48)	Cr/Au
21	35	46	6909	fujiwara	dummy	2	2008/1/20/23:21:36(172.16.44.137)	Ta/Cu(長時間スパッタ）
21	14	18	6968	A.Asakura	dummy	0	2008/1/21/6:57:14(130.34.95.15)	Cr/Au
21	28	34	4830	Y.Sato	dummy	0	2008/1/21/10:12:17(130.34.95.30)	Cr/Cu
21	46	48	6909	fujiwara	dummy	0	2008/1/21/15:45:23(130.34.95.37)	Ta/Cu
-22	0	6	6909	ki	dummy	0	2008/1/21/16:2:14(172.16.44.137)	Ta/Cu	2008/1/21/19:41:45(130.34.95.37)
22	12	18	6909	ki	dummy	0	2008/1/21/19:42:18(130.34.95.37)	0
22	0	2	6909	fujiwara	dummy	0	2008/1/21/22:38:23(130.34.95.43)	0
-22	24	34	6909	noriki	dummy	0	2008/1/21/23:11:39(172.16.44.136)	Ta/Cu	2008/1/22/9:32:21(130.34.95.37)
22	18	20	6909	ki	dummy	0	2008/1/22/8:54:52(172.16.44.137)	Ta/Cu
22	26	36	6909	noriki	dummy	0	2008/1/22/9:32:42(130.34.95.37)	Ta/Cu
-22	40	44	6968	narumi	dummy	0	2008/1/22/13:1:18(130.34.95.15)	Cr	2008/1/22/19:32:46(130.34.95.15)
22	36	38	6909	noriki	dummy	0	2008/1/22/16:51:51(172.16.44.136)	0
22	40	42	6968	narumi	dummy	0	2008/1/22/13:1:18(130.34.95.15)	Cr
-23	30	42	6909	yamada	dummy	0	2008/1/22/22:40:36(130.34.95.37)	Cu/Ta	2008/1/23/14:23:17(172.16.44.137)
23	30	31	6909	yamada	dummy	0	2008/1/22/22:40:36(130.34.95.37)	Cu/Ta
23	36	48	6909	yamada	dummy	0	2008/1/23/14:24:8(172.16.44.137)	Ta
24	12	24	6936	kawaguchi	dummy	0	2008/1/23/14:55:58(130.34.95.43)	Cr
-24	34	42	6909	Y.KANNO	dummy	0	2008/1/23/18:29:39(172.16.44.137)	Cu/Ta	2008/1/24/16:28:32(172.16.44.137)
24	24	32	6937	Tsukamoto	dummy	2	2008/1/23/19:31:27(130.34.95.43)	Au/Cr
24	0	10	6909	yamada	dummy	0	2008/1/23/21:17:40(130.34.95.37)	Ta
25	30	42	4404	HA,Jun-Seok	dummy	0	2008/1/23/22:54:3(130.34.248.212)	Cr
-24	42	46	6968	Asakkura	dummy	0	2008/1/24/15:18:14(130.34.95.15)	Cr/Au	2008/1/24/15:18:35(130.34.95.15)
-24	42	46	6968	A.Asakura	dummy	0	2008/1/24/15:19:5(130.34.95.15)	Cu	2008/1/24/17:14:48(130.34.95.15)
24	34	35	6909	Y.KANNO	dummy	0	2008/1/23/18:29:39(172.16.44.137)	Cu/Ta
24	36	40	6968	A.Asakura	dummy	0	2008/1/24/17:15:33(130.34.95.15)	Cu
25	18	30	6909	Y.KANNO	dummy	0	2008/1/24/17:23:58(172.16.44.137)	Cu/Ta
24	40	42	6968	A.Asakura	dummy	0	2008/1/24/19:17:24(130.34.95.15)	0
-25	42	48	6909	noriki	dummy	0	2008/1/24/20:29:49(172.16.44.136)	0	2008/1/24/20:29:55(172.16.44.136)
25	42	48	6909	noriki	dummy	0	2008/1/24/20:30:13(172.16.44.136)	Ta/Cu
-26	0	6	6909	ki	dummy	0	2008/1/25/6:51:34(130.34.95.37)	Ta/cu	2008/1/25/23:52:39(172.16.44.141)
26	42	48	4404	Lee	dummy	0	2008/1/25/10:33:18(130.34.248.30)	Zr, Hf, Sc
27	0	6	4404	Lee	dummy	0	2008/1/25/10:33:43(130.34.248.30)	Zr, Hf, Sc
26	29	40	6909	jeong	dummy	0	2008/1/25/14:43:27(172.16.44.137)	Cr/Au
-26	6	14	6968	A.Asakura	dummy	0	2008/1/25/15:16:42(130.34.95.15)	Cr/Au	2008/1/26/5:4:30(130.34.95.15)
26	14	24	6909	ki	dummy	2	2008/1/25/23:53:36(172.16.44.141)	Ta/Cu
26	6	13	6968	A.Asakura	dummy	0	2008/1/25/15:16:42(130.34.95.15)	Cr/Au
-27	20	24	6937	Kashu	dummy	0	2008/1/27/1:22:44(130.34.95.8)	Cr/Au	2008/1/27/9:26:29(130.34.94.170)
27	20	21	6937	Kashu	dummy	0	2008/1/27/1:22:44(130.34.95.8)	Cr/Au
-27	36	40	6937	kashu	dummy	0	2008/1/27/9:27:6(130.34.94.170)	Cr/Au	2008/1/27/14:58:55(130.34.95.8)
-27	40	48	6909	liang	dummy	0	2008/1/27/16:21:6(172.16.44.134)	Ta tar	2008/1/27/16:23:4(172.16.44.134)
28	0	6	6909	liang	dummy	0	2008/1/27/16:22:11(172.16.44.134)	Ta
27	40	48	6909	liang	dummy	0	2008/1/27/16:23:56(172.16.44.134)	Ta
28	20	32	6909	yamada	dummy	0	2008/1/28/1:8:37(172.16.44.137)	Ta
28	32	38	3586	kishi	dummy	0	2008/1/28/8:57:51(130.34.95.17)	 Cr/Au
-28	38	46	6909	ki	dummy	2	2008/1/28/11:8:55(130.34.95.37)	Ta/Cu	2008/1/28/18:10:11(172.16.44.141)
28	38	39	6909	ki	dummy	2	2008/1/28/11:8:55(130.34.95.37)	Ta/Cu
29	20	24	6968	A.Asakura	dummy	0	2008/1/29/0:54:23(130.34.95.15)	Cr/Au
29	10	14	6937	kashu	dummy	0	2008/1/29/1:14:42(130.34.95.8)	Cr/Au
29	24	36	6909	yamada	dummy	0	2008/1/29/1:43:55(172.16.44.137)	Ta
-30	24	36	6909	noriki	dummy	2	2008/1/29/6:13:40(130.34.95.37)	Ta/Cu	2008/1/29/11:45:14(172.16.44.136)
30	26	38	6909	noriki	dummy	2	2008/1/29/11:45:33(172.16.44.136)	Ta/Cu
-29	38	44	3586	kishi	dummy	0	2008/1/29/12:17:10(130.34.95.17)	Cr/Au@RT	2008/1/29/16:51:23(130.34.95.17)
-30	18	24	6965	hokari	dummy	0	2008/1/29/16:3:53(130.34.95.31)	Cr/Au	2008/1/30/4:25:37(130.34.95.43)
29	40	47	3586	kishi	dummy	0	2008/1/29/16:52:3(130.34.95.17)	Cr/Au@RT
30	0	12	6909	やまだ	dummy	0	2008/1/29/17:5:7(130.34.95.37)	0
-30	38	44	6909	fujiwara	dummy	0	2008/1/29/20:25:52(172.16.44.136)	0	2008/1/29/20:25:59(172.16.44.136)
-30	38	48	6909	fujiwara	dummy	0	2008/1/29/20:26:18(172.16.44.136)	0	2008/1/29/20:26:24(172.16.44.136)
-30	38	46	6909	fujiwara	dummy	0	2008/1/29/20:26:50(172.16.44.136)	Ta/Cu	2008/1/30/0:35:55(130.34.95.37)
-30	46	48	6968	narumi	dummy	0	2008/1/29/21:31:15(130.34.95.15)	Cr/Pt	2008/1/30/21:57:4(130.34.95.15)
-31	0	4	6968	narumi	dummy	0	2008/1/29/21:31:37(130.34.95.15)	Cr/Pt	2008/1/30/21:56:56(130.34.95.15)
30	24	26	6909	noriki	dummy	0	2008/1/29/23:38:3(172.16.44.136)	0
30	40	46	6909	ki	dummy	0	2008/1/30/0:47:55(130.34.95.37)	Cu
-30	12	20	6965	hokari	dummy	0	2008/1/30/4:26:11(130.34.95.43)	Cr/Au	2008/1/30/5:27:21(130.34.95.31)
30	12	13	6965	hokari	dummy	0	2008/1/30/4:26:11(130.34.95.43)	Cr/Au
30	13	18	6965	hokari	dummy	0	2008/1/30/5:27:42(130.34.95.31)	Cr/Au
30	18	22	6965	hokari	dummy	0	2008/1/30/9:2:30(172.16.44.137)	Cr/Au
31	18	23	6968	azuma	dummy	0	2008/1/30/9:39:23(130.34.95.15)	Cr/Au
30	22	24	6965	hokari	dummy	0	2008/1/30/9:57:31(130.34.95.31)	0
-31	44	48	6421	T.BABA	dummy	0	2008/1/30/10:45:13(130.34.248.180)	Au	2008/1/30/10:45:40(130.34.248.180)
-31	44	48	6421	T.BABA	dummy	0	2008/1/30/13:30:7(130.34.248.180)	0	2008/1/30/13:30:19(130.34.248.180)
31	44	48	6421	T.BABA	dummy	0	2008/1/30/13:30:33(130.34.248.180)	Au
30	46	48	6968	narumi	dummy	0	2008/1/30/21:57:17(130.34.95.15)	Cr/Au
31	0	4	6968	narumi	dummy	0	2008/1/30/21:57:37(130.34.95.15)	Cr/Au
-31	38	44	6937	Tsukamoto	dummy	0	2008/1/31/1:50:4(130.34.95.43)	Au/Cr	2008/1/31/17:5:54(130.34.94.141)