20 18 28 4119 nagai dummy 0 2012/8/10/16:43:22(130.34.74.84) SiO2 -21 28 38 4119 nagai dummy 0 2012/8/10/16:52:13(130.34.74.84) Ti/Cu 2012/8/21/10:10:56(130.34.74.84) 20 28 38 4119 yabata dummy 0 2012/8/17/9:13:37(130.34.63.131) 0 17 34 38 6909 kigure dummy 1 2012/8/17/13:25:57(130.34.95.37) 装置立ち上げ -18 18 28 6908 hashiguchi, kigure dummy 2 2012/8/17/16:20:23(130.34.95.37) Ti->Al, ベー先生承認 2012/8/18/10:12:35(130.34.95.44) 18 18 23 6908 hashiguchi, kigure dummy 2 2012/8/17/16:20:23(130.34.95.37) Ti->Al, ベー先生承認 18 23 28 6908 hashiguchi, kigure dummy 2 2012/8/18/10:13:6(130.34.95.44) Pt->Al 18 28 32 6908 hashiguchi dummy 0 2012/8/18/11:26:51(130.34.95.44) 延長 -22 26 38 5810 inomata dummy 1 2012/8/18/12:40:38(130.34.95.49) #2の電源接続のため 2012/8/22/10:51:35(130.34.95.49) 19 24 34 6908 hashiguchi, kigure dummy 2 2012/8/18/16:27:32(130.34.95.37) Ti->W, ベー先生承認 19 34 36 6908 hashiguchi, kigure dummy 2 2012/8/19/15:23:59(130.34.95.44) 延長 21 19 28 4771 cao dummy 0 2012/8/20/9:17:19(130.34.95.21) Pt/Ti -22 18 25 4119 konno dummy 0 2012/8/20/12:14:21(130.34.63.131) Cu/Ti 2012/8/22/9:0:21(130.34.95.44) -23 18 26 4119 fushimi dummy 0 2012/8/20/12:32:32(130.34.95.44) 0 2012/8/20/12:33:35(130.34.95.44) -23 18 26 4119 fushimi dummy 0 2012/8/20/12:38:59(130.34.95.44) Ir 2012/8/22/10:35:46(130.34.63.131) -21 38 42 5810 inomata dummy 1 2012/8/20/13:3:0(130.34.95.49) 0 2012/8/21/10:15:1(130.34.95.49) -22 38 48 4119 nagai dummy 0 2012/8/21/10:12:11(130.34.74.84) Ti/Cu 2012/8/21/10:17:27(130.34.74.84) 21 28 34 5810 inomata dummy 1 2012/8/21/10:15:19(130.34.95.49) #2の電源接続のため -22 38 46 4119 nagai dummy 0 2012/8/21/12:19:51(130.34.74.84) Ti/Cu 2012/8/21/12:58:15(130.34.74.84) -22 38 48 4119 nagai dummy 0 2012/8/21/12:58:39(130.34.74.84) Ti/Cu 福島先生承認 2012/8/22/13:28:44(130.34.95.44) -23 0 16 4119 nagai dummy 0 2012/8/21/12:59:30(130.34.74.84) Ti/Cu 福島先生承認 2012/8/21/12:59:40(130.34.74.84) -23 0 17 4119 nagai dummy 0 2012/8/21/13:0:11(130.34.74.84) Ti/Cu 福島先生承認 2012/8/22/13:29:31(130.34.95.44) 21 34 48 5810 inomata dummy 1 2012/8/21/15:2:23(130.34.95.49) 0 22 18 20 4119 konno dummy 0 2012/8/20/12:14:21(130.34.63.131) Cu/Ti 22 20 23 4119 konno dummy 0 2012/8/22/9:0:41(130.34.95.44) 0 23 18 28 4119 fushimi&kigure dummy 2 2012/8/22/10:36:35(130.34.63.131) Ir/Ti -22 34 42 4119 nagai dummy 0 2012/8/22/13:29:18(130.34.95.44) Ti/Cu 福島先生承認 2012/8/22/19:6:17(130.34.74.84) 22 34 41 4119 nagai dummy 0 2012/8/22/13:29:18(130.34.95.44) Ti/Cu 福島先生承認 23 28 30 4119 fushimi dummy 0 2012/8/23/9:5:59(130.34.95.44) 時間延長 23 30 40 4771 He dummy 2 2012/8/23/9:40:59(130.34.95.21) Pt/Ti 24 32 36 6909 kigure dummy 1 2012/8/23/11:59:7(130.34.95.37) 装置立ち下げ -28 18 26 4119 konno dummy 0 2012/8/23/15:30:38(130.34.95.37) Ti/Cu 2012/8/24/6:8:47(130.34.95.37) -28 18 30 4119 konno dummy 0 2012/8/24/6:9:8(130.34.95.37) Ti/Cu 2times 2012/8/27/21:11:57(130.34.95.37) -29 32 40 5318 Rahman dummy 0 2012/8/24/14:43:18(130.34.231.209) Ti 2012/8/24/14:49:34(130.34.231.209) 24 40 48 6908 Y. Ohara, A. Noriki dummy 0 2012/8/24/17:36:52(130.34.95.44) Ti/Cu, 木野先生 承認済 25 0 2 6908 Y. Ohara, A. Noriki dummy 0 2012/8/24/17:37:52(130.34.95.44) 木野先生 承認済 25 2 4 6908 Y. Ohara, A. Noriki dummy 1 2012/8/24/17:38:16(130.34.95.44) たち下げ 30 20 30 4119 S.Watanabe dummy 0 2012/8/27/15:7:59(130.34.63.131) Ti/Cu -28 32 41 4830 endo dummy 0 2012/8/27/15:8:57(130.34.95.30) Cu/Ti 2012/8/27/16:5:15(130.34.95.30) 28 36 40 6909 sasaki&kigure dummy 1 2012/8/27/16:5:58(130.34.95.37) 立ち上げ -30 37 38 5318 Ti dummy 0 2012/8/27/16:25:54(130.34.231.209) 0 2012/8/27/16:29:48(130.34.231.209) -30 30 38 5318 Rahman (Ti) dummy 0 2012/8/27/16:30:48(130.34.231.209) 0 2012/8/27/16:42:1(130.34.231.209) -30 30 41 5318 Rahman (Ti/SiC) dummy 0 2012/8/27/16:43:3(130.34.231.209) 0 2012/8/29/9:34:52(130.34.231.209) 29 20 32 6965 hokari dummy 2 2012/8/27/17:47:47(130.34.95.31) Si 28 0 36 6909 sasaki&kigure dummy 1 2012/8/27/21:12:26(130.34.95.37) 立ち下げ中 -29 16 20 4119 konno dummy 0 2012/8/28/9:49:50(130.34.95.37) Cu/Ti 2012/8/28/15:16:58(130.34.63.131) -29 32 40 4119 yabata dummy 0 2012/8/28/12:36:39(130.34.95.37) 0 2012/8/29/9:1:50(130.34.95.44) -28 40 48 4119 konno dummy 0 2012/8/28/14:11:22(130.34.63.131) 0 2012/8/28/16:28:40(130.34.95.44) 31 20 29 4830 endo dummy 0 2012/8/28/14:52:38(130.34.95.30) Cu/Ti -29 0 17 4119 konno dummy 0 2012/8/28/15:17:28(130.34.63.131) 0 2012/8/28/16:29:35(130.34.95.44) -29 40 48 6909 yukaito dummy 0 2012/8/28/16:14:2(130.34.63.131) 0 2012/8/28/21:13:55(130.34.95.37) 28 40 48 4119 konno dummy 0 2012/8/28/16:29:18(130.34.95.44) Cu/Ti 李先生承認 29 0 17 4119 konno dummy 0 2012/8/28/16:30:14(130.34.95.44) Cu/Ti 李先生承認 31 29 39 4119 yabata dummy 0 2012/8/29/9:1:36(130.34.95.44) Cu/Ti -29 32 43 5318 Rahman (Ti/SiC) dummy 0 2012/8/29/9:35:59(130.34.231.209) 0 2012/8/29/9:38:55(130.34.231.209) 29 32 44 5318 Rahman(Ti/SiC) dummy 0 2012/8/29/9:39:43(130.34.231.209) 0 -30 30 41 5318 Rahman (Ti/SiC) dummy 0 2012/8/29/9:41:26(130.34.231.209) 0 2012/8/29/21:1:12(130.34.95.44) -30 0 12 6965 hokari dummy 2 2012/8/29/15:47:40(130.34.95.31) Si 2012/8/29/15:48:4(130.34.95.31) -30 0 12 6965 hokari dummy 2 2012/8/29/15:50:9(130.34.95.31) Si 2012/8/30/0:3:21(130.34.95.31) -30 30 42 6965 hokari dummy 0 2012/8/30/0:3:11(130.34.95.31) Si 2012/8/30/11:11:9(130.34.95.31) 30 0 3 6965 hokari dummy 2 2012/8/29/15:50:9(130.34.95.31) Si 30 44 48 6909 sasaki&kigure dummy 1 2012/8/30/20:32:39(130.34.95.44) リークチェック 31 0 20 6909 sasaki&kigure dummy 1 2012/8/30/20:33:29(130.34.95.44) リークチェック 31 39 41 6909 kigure&sasaki dummy 1 2012/8/31/19:45:26(130.34.95.44) リークチェック 31 42 48 6908 Y. Ohara, A. Noriki dummy 0 2012/8/31/20:33:3(130.34.95.44) Cu