-4	26	36	4119	nagai	dummy	0	2011/12/28/13:40:55(130.34.74.84)	Ti/Cu	2012/1/4/14:45:47(130.34.95.44)
5	17	25	4119	konno	dummy	0	2011/12/28/15:13:26(130.34.63.131)	Ta/Cu
5	26	28	6937	Weichih Lin	dummy	2	2012/1/4/8:43:54(130.34.95.43)	SiO2 to Si3N4
5	28	38	6937	Weichih Lin	dummy	0	2012/1/4/8:44:20(130.34.95.43)	Si3N4 dopositon
4	24	26	4119	nagai	dummy	0	2012/1/4/11:39:27(130.34.95.44)	0
4	26	32	4119	nagai	dummy	0	2011/12/28/13:40:55(130.34.74.84)	Ti/Cu
6	21	33	4119	hioki	dummy	2	2012/1/5/13:0:31(130.34.95.37)	Cu/Ta
6	4	19	6908	Y. Ohara, H. Kino	dummy	0	2012/1/5/22:57:10(130.34.95.44)	Ti/Cu 田中先生 承認済
6	33	40	4119	Beatrix	dummy	0	2012/1/6/13:26:49(130.34.95.44)	Cu/Ta
6	40	48	6909	watanabe	dummy	1	2012/1/6/14:36:21(130.34.95.44)	0
10	26	30	6909	watanabe	dummy	1	2012/1/10/11:57:4(130.34.95.37)	0
11	12	18	6909	kino	dummy	0	2012/1/11/3:27:33(130.34.95.44)	Ti
-12	20	22	4119	S.Watanabe	dummy	2	2012/1/11/8:45:46(130.34.95.44)	0	2012/1/11/8:46:30(130.34.95.44)
-12	22	30	4119	S.Watanabe	dummy	0	2012/1/11/8:46:6(130.34.95.44)	Al	2012/1/11/8:46:27(130.34.95.44)
-11	20	22	4119	S.Watanabe	dummy	2	2012/1/11/8:48:14(130.34.95.44)	0	2012/1/11/8:51:41(130.34.95.44)
-11	22	30	4119	S.Watanabe	dummy	0	2012/1/11/8:48:32(130.34.95.44)	Al	2012/1/11/8:51:43(130.34.95.44)
12	18	28	4119	nagai	dummy	0	2012/1/11/11:10:29(130.34.74.84)	Ti/Cu
-12	28	38	4771	bao	dummy	0	2012/1/11/13:45:26(130.34.95.44)	Cu	2012/1/11/13:45:43(130.34.95.44)
13	19	28	4771	bao	dummy	0	2012/1/11/13:46:43(130.34.95.44)	Cu
16	19	30	4119	hioki	dummy	2	2012/1/11/16:54:19(130.34.95.37)	SIO2
12	28	40	6937	samoto	dummy	0	2012/1/12/11:23:10(130.34.95.43)	SiO2
13	38	42	6965	wu	dummy	2	2012/1/12/16:29:31(130.34.95.31)	Ti→Al
-16	30	39	4771	sugimoto	dummy	0	2012/1/13/17:50:46(130.34.95.21)	Al	2012/1/15/14:40:5(130.34.95.21)
14	18	28	6937	Wei-Shan Wang	dummy	0	2012/1/13/19:22:43(130.34.95.43)	Al
14	28	32	6937	huang li-chung	dummy	0	2012/1/14/8:32:31(130.34.95.43)	Al
14	32	33	6937	Wei-Shan Wang	dummy	2	2012/1/14/14:50:37(130.34.95.44)	Al->Ti
16	31	33	6937	Weichih Lin	dummy	2	2012/1/16/13:17:16(130.34.95.43)	SiO2 to Pt
16	33	42	6937	Weichih Lin	dummy	0	2012/1/16/13:17:48(130.34.95.43)	Ti/Pt deposition
-18	18	33	4830	kawakami	dummy	0	2012/1/17/15:5:55(130.34.95.30)	0	2012/1/17/15:51:50(130.34.95.30)
20	20	22	4119	S.Watanabe	dummy	2	2012/1/17/15:40:49(130.34.95.44)	0
20	22	30	4119	S.Watanabe	dummy	0	2012/1/17/15:41:7(130.34.95.44)	Ta/Cu
18	18	28	4830	Kawakami	dummy	0	2012/1/17/15:53:30(130.34.95.30)	Ti
-19	16	22	6908	Ohara Yuki	dummy	0	2012/1/17/23:7:19(130.34.95.44)	Ti/Cu 田中先生 承認済	2012/1/19/1:42:45(130.34.63.131)
-23	19	30	4119	hioki	dummy	0	2012/1/18/13:15:6(130.34.95.37)	Pt→SiO2	2012/1/19/14:14:31(130.34.95.44)
20	30	37	4771	Phan	dummy	0	2012/1/19/0:6:36(130.34.95.21)	Pt/Ti
19	18	26	6908	Ohara Yuki	dummy	0	2012/1/19/1:43:57(130.34.63.131)	Ti/Cu
-19	32	42	4771	Minh	dummy	0	2012/1/19/11:31:20(130.34.95.43)	0	2012/1/19/11:31:55(130.34.95.43)
19	32	42	4771	Minh	dummy	0	2012/1/19/11:32:18(130.34.95.43)	Pt
19	26	30	6908	Ohara Yuki	dummy	0	2012/1/19/13:7:6(130.34.95.44)	0
25	19	30	4119	hioki	dummy	2	2012/1/19/14:15:29(130.34.95.44)	SiO2
-23	19	28	4771	bao	dummy	0	2012/1/19/15:16:51(130.34.95.21)	0	2012/1/19/15:17:50(130.34.95.21)
-23	30	40	4771	wang	dummy	0	2012/1/19/15:17:41(130.34.95.21)	0	2012/1/19/15:18:52(130.34.95.21)
23	20	30	4771	bao 	dummy	0	2012/1/19/15:18:46(130.34.95.21)	Cu/Al
23	30	40	4771	wang	dummy	0	2012/1/19/15:19:11(130.34.95.21)	Al
-24	26	36	4830	Furuya	dummy	0	2012/1/19/15:45:7(130.34.95.30)	Ta/Cu	2012/1/23/16:28:15(130.34.95.30)
20	37	40	4771	Phan	dummy	0	2012/1/19/16:40:6(130.34.95.21)	0
20	4	16	6908	Y. Ohara, A. Noriki	dummy	0	2012/1/19/23:28:42(130.34.95.44)	Ti/Cu 田中先生 承認済
-26	18	27	4119	konno	dummy	0	2012/1/23/8:27:58(130.34.95.37)	Ti/Cu	2012/1/24/8:35:6(130.34.95.44)
24	18	26	4119	S.Watanabe	dummy	0	2012/1/23/11:39:5(130.34.95.37)	Al
23	40	42	4771	wang	dummy	0	2012/1/23/19:21:30(130.34.95.44)	0
24	0	8	6909	watanabe&ohara	dummy	0	2012/1/23/23:40:7(130.34.95.44)	Ti,べー先生承認
-24	27	34	4119	konno	dummy	0	2012/1/24/8:35:0(130.34.95.44)	0	2012/1/24/10:2:7(130.34.95.44)
-24	26	34	4119	konno	dummy	0	2012/1/24/10:2:18(130.34.95.44)	0	2012/1/24/10:24:31(130.34.95.44)
24	26	34	4119	konno	dummy	0	2012/1/24/10:24:48(130.34.95.44)	Ti/Cu
25	30	39	6937	Yoshida	dummy	0	2012/1/24/20:42:8(130.34.95.43)	Al
26	20	30	4119	S.Watanabe	dummy	0	2012/1/25/11:2:27(130.34.95.44)	Ta/Cu
26	30	39	6937	Wei-Shan Wang	dummy	0	2012/1/25/13:48:50(130.34.95.43)	Al
27	18	28	4119	nagai	dummy	0	2012/1/25/14:1:44(130.34.74.84)	Ti/Cu
-26	39	47	6956	huang	dummy	0	2012/1/26/10:30:37(130.34.95.38)	Al	2012/1/26/10:33:34(130.34.95.38)
26	40	48	6956	huang	dummy	0	2012/1/26/10:33:49(130.34.95.38)	Al
27	28	36	6937	Wei-Shan Wang	dummy	0	2012/1/26/19:41:16(130.34.95.43)	Al
27	0	18	6956	huang	dummy	0	2012/1/26/23:33:23(130.34.95.44)	Al
30	26	36	4830	Furuya	dummy	0	2012/1/27/14:53:13(130.34.95.30)	Ta/Cu
28	17	31	6909	sasaki&watanabe	dummy	2	2012/1/27/15:31:13(130.34.95.37)	Al>SiO2 SiO2 ベー先生承認済み
28	31	33	6909	sasaki&watanabe	dummy	0	2012/1/28/12:13:1(130.34.95.44)	延長
28	33	34	6909	sasaki	dummy	0	2012/1/28/15:10:21(130.34.95.44)	延長
29	18	27	4771	Phan	dummy	0	2012/1/28/20:24:30(130.34.95.44)	SiO2 target, with Minh, Kuwano sensei's permission
30	36	38	4830	Furuya	dummy	0	2012/1/30/12:47:59(130.34.95.44)	延長
31	28	30	4830	Furuya	dummy	2	2012/1/31/13:10:32(130.34.95.30)	0
31	30	32	4830	Furuya	dummy	2	2012/1/31/14:22:50(130.34.95.44)	ターゲット消耗のため、一時的にCu>Al