1	16	21	6909	kino	dummy	2	2011/6/30/21:23:49(130.34.95.37)	Al/Ti
1	27	33	6909	kino	dummy	0	2011/7/1/12:38:3(130.34.95.37)	0
1	33	36	6909	kino	dummy	0	2011/7/1/15:16:0(130.34.95.37)	0
-6	36	46	6937	makihata	dummy	0	2011/7/5/11:5:8(130.34.95.43)	0	2011/7/5/11:5:33(130.34.95.43)
7	24	34	6937	makihata	dummy	0	2011/7/5/11:5:56(130.34.95.43)	0
6	26	28	6909	watanabe	dummy	2	2011/7/6/0:58:23(130.34.95.37)	Ti>SiO2
-6	28	38	6909	watanabe	dummy	0	2011/7/6/0:59:0(130.34.95.37)	SiO2/Al	2011/7/6/16:33:7(130.34.95.44)
8	16	22	5810	y.mitsui	dummy	0	2011/7/6/11:34:30(130.34.95.49)	3→Ti 2→Pt Heater300℃
7	34	36	5810	y.mitsui	dummy	2	2011/7/6/11:35:40(130.34.95.49)	2→Pt
7	36	48	5810	y.mitsui	dummy	0	2011/7/6/11:36:11(130.34.95.49)	2→Pt Heater300℃
-8	22	32	4119	seino	dummy	0	2011/7/6/11:40:5(130.34.74.84)	Al→Ta	2011/7/8/9:13:37(130.34.74.84)
11	21	31	4119	S.Watanabe	dummy	0	2011/7/6/12:39:54(130.34.74.84)	Ti/Cu
8	0	16	5810	y.mitsui	dummy	0	2011/7/6/13:1:59(130.34.95.49)	2→Pt Heater300℃
-6	38	42	6909	watanabe	dummy	0	2011/7/6/14:37:1(130.34.95.44)	0	2011/7/6/16:32:59(130.34.95.44)
6	28	36	6909	watanabe	dummy	0	2011/7/6/0:59:0(130.34.95.37)	SiO2/Al
-6	44	48	6909	watanabe&kuriyama	dummy	0	2011/7/6/16:33:44(130.34.95.44)	Al	2011/7/6/16:33:50(130.34.95.44)
6	44	48	6909	watanabe&kuriyama	dummy	0	2011/7/6/16:34:25(130.34.95.44)	Al,ベー先生承認済
-12	20	27	6937	N.Kaushik	dummy	0	2011/7/6/16:45:42(130.34.95.43)	0	2011/7/7/9:15:57(130.34.95.43)
6	40	44	6909	watanabe	dummy	0	2011/7/6/16:50:15(130.34.95.44)	0
-11	31	37	6937	N.Kaushik	dummy	0	2011/7/6/16:58:13(130.34.95.43)	0	2011/7/7/9:7:50(130.34.95.43)
8	36	46	6937	makihata	dummy	0	2011/7/6/20:10:4(130.34.95.43)	Al
7	20	24	6937	matsuzaki	dummy	0	2011/7/6/21:52:51(130.34.95.43)	Cu->Ti
-11	31	33	4119	yukaito	dummy	2	2011/7/7/9:48:2(130.34.74.84)	Ta/Cu	2011/7/7/9:48:9(130.34.74.84)
-11	31	33	4119	yukaito	dummy	2	2011/7/7/9:48:41(130.34.74.84)	->Ta	2011/7/7/9:49:1(130.34.74.84)
-11	31	41	4119	yukaito	dummy	0	2011/7/7/9:50:17(130.34.74.84)	Ta/Cu *Ta target change	2011/7/7/9:50:36(130.34.74.84)
-11	31	41	4119	yukaito	dummy	0	2011/7/7/9:51:25(130.34.74.84)	Ta/Cu	2011/7/11/13:11:25(130.34.95.44)
8	22	34	4119	seino	dummy	2	2011/7/8/9:13:59(130.34.74.84)	Ta/Cu
-12	21	29	4119	yukaito	dummy	0	2011/7/8/13:50:58(130.34.95.44)	Ta/Cu	2011/7/8/13:51:4(130.34.95.44)
-12	18	26	4119	yukaito	dummy	0	2011/7/8/13:51:47(130.34.95.44)	0	2011/7/8/13:52:1(130.34.95.44)
-12	18	26	4119	yukaito	dummy	0	2011/7/8/13:52:33(130.34.95.44)	Ta/Cu	2011/7/11/11:55:45(130.34.74.84)
8	34	35	4119	seino	dummy	0	2011/7/8/16:29:41(130.34.95.44)	0
-12	28	36	4119	S.Watanabe	dummy	0	2011/7/11/10:11:19(130.34.74.84)	Ti/Cu	2011/7/12/13:43:24(130.34.63.131)
12	20	28	4119	yukaito	dummy	0	2011/7/11/11:56:8(130.34.74.84)	Ta/Cu
11	31	39	4119	yukaito	dummy	0	2011/7/11/13:11:47(130.34.95.44)	Ta/Cu
-13	21	23	4119	yukaito	dummy	2	2011/7/11/13:57:22(130.34.95.44)	Ti or Ta -> SiO2	2011/7/11/17:22:31(130.34.95.37)
-13	23	31	4119	yukaito	dummy	0	2011/7/11/13:58:17(130.34.95.44)	SiO2	2011/7/11/17:22:35(130.34.95.37)
-13	17	21	6909	watanabe	dummy	1	2011/7/11/17:14:35(130.34.95.37)	0	2011/7/11/17:22:39(130.34.95.37)
-13	17	28	6909	watanabe	dummy	1	2011/7/11/17:22:51(130.34.95.37)	0	2011/7/13/11:17:16(130.34.95.44)
-13	28	30	4119	yukaito	dummy	2	2011/7/11/17:28:53(130.34.95.44)	Ta>Si	2011/7/11/17:29:45(130.34.95.44)
-13	30	38	4119	yukaito	dummy	0	2011/7/11/17:29:37(130.34.95.44)	SiO2	2011/7/12/12:47:54(130.34.95.44)
-13	28	30	4119	yukaito	dummy	0	2011/7/11/17:30:26(130.34.95.44)	Ta>SiO2	2011/7/11/17:30:32(130.34.95.44)
-13	28	30	4119	yukaito	dummy	2	2011/7/11/17:31:1(130.34.95.44)	Ta>SiO2	2011/7/12/12:47:50(130.34.95.44)
11	39	40	4119	yukaito	dummy	0	2011/7/11/18:46:20(130.34.95.44)	Ta/Cu
-13	28	36	4119	yukaito	dummy	0	2011/7/12/12:48:7(130.34.95.44)	0	2011/7/12/12:48:11(130.34.95.44)
-13	28	36	4119	yukaito	dummy	0	2011/7/12/12:48:22(130.34.95.44)	0	2011/7/12/12:48:26(130.34.95.44)
-13	28	36	4119	yukaito	dummy	0	2011/7/12/12:48:44(130.34.95.44)	Ta/Cu	2011/7/12/12:49:48(130.34.95.44)
-13	28	30	4119	yukaito	dummy	2	2011/7/12/12:50:5(130.34.95.44)	SiO2	2011/7/13/11:17:25(130.34.95.44)
-13	30	38	4119	yukaito	dummy	0	2011/7/12/12:50:20(130.34.95.44)	0	2011/7/12/12:50:30(130.34.95.44)
-13	30	38	4119	yukaito	dummy	0	2011/7/12/12:50:46(130.34.95.44)	SiO2	2011/7/13/11:17:36(130.34.95.44)
-14	18	26	4119	yukaito	dummy	0	2011/7/12/12:54:28(130.34.95.44)	Ta/Cu	2011/7/14/8:31:2(130.34.74.84)
12	28	30	4119	S.Watanabe	dummy	0	2011/7/11/10:11:19(130.34.74.84)	Ti/Cu
13	17	25	6909	watanabe	dummy	1	2011/7/11/17:22:51(130.34.95.37)	0
13	25	33	4119	yukaito	dummy	0	2011/7/13/11:18:8(130.34.95.44)	Ta/Cu
13	33	35	4119	yukaito	dummy	2	2011/7/13/11:18:29(130.34.95.44)	SiO2
13	35	43	4119	yukaito	dummy	0	2011/7/13/11:18:54(130.34.95.44)	0
14	18	20	4119	yukaito	dummy	0	2011/7/12/12:54:28(130.34.95.44)	Ta/Cu
14	20	27	4119	yukaito	dummy	0	2011/7/14/8:38:48(130.34.74.84)	Ta/Cu
-14	32	42	5810	chin	dummy	2	2011/7/14/13:9:28(130.34.95.49)	Cu->ITO	2011/7/14/13:10:0(130.34.95.49)
-14	32	42	5810	chin	dummy	2	2011/7/14/13:10:30(130.34.95.49)	SiO2->ITO	2011/7/14/15:46:12(130.34.95.44)
-20	20	28	4119	seino	dummy	0	2011/7/14/14:7:37(130.34.74.84)	Ta/Cu	2011/7/15/15:32:54(130.34.74.84)
14	32	34	5810	chin	dummy	2	2011/7/14/13:10:30(130.34.95.49)	SiO2->ITO
-14	34	42	5810	chin	dummy	0	2011/7/14/16:1:54(130.34.95.44)	ITO	2011/7/14/16:48:8(130.34.95.44)
14	34	36	5810	chin	dummy	0	2011/7/14/16:1:54(130.34.95.44)	ITO
19	22	30	4119	yukaito	dummy	0	2011/7/19/10:5:32(130.34.74.84)	Ta/Cu
22	20	28	6937	JW Lee	dummy	0	2011/7/20/20:44:57(130.34.95.44)	0
-22	28	36	4119	seino	dummy	0	2011/7/21/14:40:44(130.34.74.84)	Ta/Cu	2011/7/22/12:9:23(130.34.74.84)
21	45	47	6909	watanabe	dummy	2	2011/7/21/21:53:9(130.34.95.44)	Ta>Al
23	28	36	6956	huanghai	dummy	0	2011/7/22/11:6:20(130.34.95.49)	Al，足立先生承認
-22	28	37	4119	seino	dummy	2	2011/7/22/12:9:56(130.34.74.84)	Ta/Cu	2011/7/22/14:2:47(130.34.95.44)
22	28	31	4119	seino	dummy	2	2011/7/22/12:9:56(130.34.74.84)	Ta/Cu
26	20	30	4119	seino	dummy	2	2011/7/22/14:4:4(130.34.95.44)	Ta/Cu
25	27	37	6909	kigure	dummy	0	2011/7/22/22:55:4(130.34.95.44)	Al
-24	22	30	6909	kino	dummy	2	2011/7/24/9:49:10(130.34.95.44)	SiO2->Ti	2011/7/24/9:49:15(130.34.95.44)
24	22	30	6909	kino,watanabe	dummy	2	2011/7/24/9:49:44(130.34.95.44)	SiO2->Ti 田中先生承認
-31	23	30	6909	kigure	dummy	2	2011/7/25/12:49:13(130.34.95.37)	0	2011/7/25/12:49:21(130.34.95.37)
25	37	39	6909	kigure	dummy	0	2011/7/25/17:36:23(130.34.95.44)	0
26	31	42	6909	kigure	dummy	2	2011/7/25/17:59:38(130.34.95.44)	SiO2
26	30	31	4119	seino	dummy	0	2011/7/26/13:32:15(130.34.74.84)	0
26	42	45	6909	kigure	dummy	0	2011/7/26/20:4:39(130.34.95.44)	0
26	45	47	6909	kigure	dummy	0	2011/7/26/21:8:2(130.34.95.44)	0
27	26	36	6937	matsuzaki	dummy	0	2011/7/27/11:8:51(130.34.63.131)	Ti,Cu
27	36	40	6937	matsuzaki	dummy	0	2011/7/27/11:52:54(130.34.95.43)	0
-28	26	36	5810	chin	dummy	0	2011/7/27/15:49:44(130.34.95.49)	SiO2->ITO	2011/7/27/15:49:50(130.34.95.49)
-28	26	36	5810	chin	dummy	2	2011/7/27/15:50:23(130.34.95.49)	SiO2->ITO	2011/7/27/21:33:52(130.34.95.49)
-28	27	39	5810	chin	dummy	0	2011/7/27/21:34:16(130.34.95.49)	SiO2->ITO	2011/7/27/21:34:30(130.34.95.49)
28	27	37	5810	chin	dummy	2	2011/7/27/21:35:9(130.34.95.49)	SiO2->ITO
-29	27	37	5810	chin	dummy	0	2011/7/28/10:49:51(130.34.95.49)	3#->ZnO	2011/7/28/10:49:58(130.34.95.49)
29	27	37	5810	chin	dummy	2	2011/7/28/10:50:51(130.34.95.49)	3#->ZnO
28	37	39	5810	chin	dummy	0	2011/7/28/15:8:33(130.34.95.44)	ITO
28	39	40	5810	chin	dummy	0	2011/7/28/17:8:38(130.34.95.44)	ITO
28	40	42	5810	chin	dummy	0	2011/7/28/17:13:56(130.34.95.44)	0
29	37	39	5810	chin	dummy	0	2011/7/29/14:43:40(130.34.95.44)	訂正2#->ZnO
29	39	41	5810	chin	dummy	0	2011/7/29/19:0:11(130.34.95.49)	ZnO