1	34	36	6908	Y. Ohara	dummy	2	2011/6/1/14:14:0(130.34.95.37)	Pt --> Cu
1	36	46	6908	Y. Ohara, S. Kanno	dummy	0	2011/6/1/14:14:40(130.34.95.37)	Ta/Cu 田中徹先生　承認済
6	26	36	5810	chin	dummy	0	2011/6/3/12:6:11(130.34.95.49)	ITO
6	36	38	5810	chin	dummy	0	2011/6/6/16:38:36(130.34.95.44)	ITO
6	38	40	5810	chin	dummy	0	2011/6/6/17:58:22(130.34.95.44)	ITO
6	40	42	5810	chin	dummy	0	2011/6/6/17:59:12(130.34.95.44)	ITO
-13	20	32	4119	seino	dummy	0	2011/6/9/9:38:42(130.34.74.84)	Ta/Cu	2011/6/10/14:11:20(130.34.74.84)
-13	20	28	4119	seino	dummy	0	2011/6/10/14:11:50(130.34.74.84)	Ta/Cu	2011/6/10/14:14:5(130.34.74.84)
-13	28	32	4119	seino	dummy	0	2011/6/10/14:13:58(130.34.74.84)	Cu	2011/6/10/14:40:39(130.34.74.84)
-13	20	28	4119	aizawa	dummy	0	2011/6/10/14:14:30(130.34.74.84)	Ta	2011/6/10/14:40:7(130.34.74.84)
-13	20	26	4119	aizawa	dummy	0	2011/6/10/14:40:28(130.34.74.84)	Ta	2011/6/10/14:52:42(130.34.74.84)
-13	26	32	4119	seino	dummy	0	2011/6/10/14:41:4(130.34.74.84)	Ta/Cu	2011/6/10/14:53:14(130.34.74.84)
13	20	26	4119	aizawa	dummy	0	2011/6/10/14:53:7(130.34.74.84)	Cu
-13	30	36	4119	seino	dummy	0	2011/6/10/14:53:54(130.34.74.84)	Ta/Cu	2011/6/10/15:33:12(130.34.74.84)
-13	26	30	4119	seino	dummy	0	2011/6/10/15:33:8(130.34.74.84)	Ta/Cu	2011/6/13/13:20:47(130.34.95.44)
-15	22	34	5810	mitsui	dummy	2	2011/6/10/19:38:52(130.34.95.49)	2->Ti，3->Pt，ヒータ300℃	2011/6/13/14:41:20(130.34.95.49)
-13	31	38	4771	bao	dummy	0	2011/6/12/19:0:49(130.34.95.21)	Al	2011/6/13/10:36:22(130.34.95.44)
-13	32	40	4771	bao	dummy	0	2011/6/13/10:36:53(130.34.95.44)	Al	2011/6/13/11:29:12(130.34.95.44)
-13	32	39	4771	bao	dummy	0	2011/6/13/11:29:44(130.34.95.44)	Al	2011/6/13/11:30:59(130.34.95.44)
13	32	40	4771	bao	dummy	0	2011/6/13/11:31:44(130.34.95.44)	Al
13	26	29	4119	seino	dummy	0	2011/6/10/15:33:8(130.34.74.84)	Ta/Cu
-15	24	36	5810	mitsui	dummy	2	2011/6/13/14:41:48(130.34.95.49)	2->Ti，3->Pt，ヒータ300℃	2011/6/13/14:42:21(130.34.95.49)
-15	26	38	5810	mitsui	dummy	2	2011/6/13/14:42:36(130.34.95.49)	2->Ti，3->Pt，ヒータ300℃	2011/6/13/15:37:48(130.34.95.49)
-15	30	42	5810	mitsui	dummy	2	2011/6/13/15:38:34(130.34.95.49)	2->Pt，3->Ti，ヒータ300℃	2011/6/14/12:13:1(130.34.95.49)
14	24	32	6937	makihata	dummy	0	2011/6/13/20:54:53(130.34.95.43)	Si
14	32	34	6937	ｍａｋｉｈａｔａ	dummy	0	2011/6/14/15:49:35(130.34.95.43)	0
-15	32	44	5810	y.mitsui	dummy	0	2011/6/14/18:22:19(130.34.95.49)	0	2011/6/14/18:43:59(130.34.95.49)
15	32	44	5810	y.mitsui	dummy	2	2011/6/14/18:44:58(130.34.95.49)	2→Ti 3→Pt Heater300℃
-16	26	28	5810	inomata	dummy	1	2011/6/16/12:23:33(130.34.95.49)	3->Cu	2011/6/16/12:24:4(130.34.95.49)
16	26	27	5810	inomata	dummy	1	2011/6/16/12:23:33(130.34.95.49)	3->Cu
17	29	34	6909	watanabe	dummy	1	2011/6/17/14:2:28(130.34.95.44)	0
17	34	46	6909	watanabe	dummy	1	2011/6/17/14:9:53(130.34.95.44)	0
18	16	48	6909	watanabe	dummy	1	2011/6/17/16:14:1(130.34.95.44)	0
19	16	48	6909	watanabe	dummy	1	2011/6/17/16:14:30(130.34.95.44)	0
20	16	48	6909	watanabe	dummy	1	2011/6/17/16:14:48(130.34.95.44)	0
21	16	48	6909	watanabe	dummy	1	2011/6/17/16:15:0(130.34.95.44)	0
-22	16	48	6909	watanabe	dummy	1	2011/6/17/16:15:13(130.34.95.44)	0	2011/6/22/16:57:13(130.34.95.49)
-23	16	48	6909	watanabe	dummy	1	2011/6/17/16:15:28(130.34.95.44)	0	2011/6/22/16:57:17(130.34.95.49)
-24	16	48	6909	watanabe	dummy	1	2011/6/17/16:15:41(130.34.95.44)	0	2011/6/22/16:57:20(130.34.95.49)
-27	26	36	4119	yukaito	dummy	0	2011/6/22/9:30:50(130.34.74.84)	Ta/Cu	2011/6/23/15:24:11(130.34.95.44)
22	16	36	6909	watanabe	dummy	1	2011/6/17/16:15:13(130.34.95.44)	0
27	21	31	4119	yukaito	dummy	0	2011/6/23/15:24:51(130.34.95.44)	Ta/Cu
30	20	26	4119	yukaito	dummy	0	2011/6/29/15:40:1(130.34.95.44)	Ta/Cu
-30	26	29	4119	yukaito	dummy	0	2011/6/30/11:0:45(130.34.95.44)	Ta/Cu	2011/6/30/12:1:59(130.34.74.84)
30	26	27	4119	yukaito	dummy	0	2011/6/30/11:0:45(130.34.95.44)	Ta/Cu
30	27	31	4119	seino	dummy	0	2011/6/30/12:4:12(130.34.74.84)	Ta/Cu
30	39	44	6909	kino	dummy	0	2011/6/30/19:32:6(130.34.95.37)	0