1	36	44	4771	SIMON	dummy	0	2010/8/31/17:27:34(130.34.95.21)	Pt
-1	20	21	5810	Y.Hoshino	dummy	2	2010/8/31/18:32:40(130.34.95.49)	Ta,Cu→Cr,Au	2010/8/31/18:35:36(130.34.95.49)
-1	21	30	5810	Y.Hoshino	dummy	0	2010/8/31/18:33:21(130.34.95.49)	Cr/Au	2010/8/31/18:35:28(130.34.95.49)
-1	30	31	5810	Y.Hoshino	dummy	2	2010/8/31/18:34:3(130.34.95.49)	Cr,Au→Ta,Cu	2010/8/31/18:35:32(130.34.95.49)
1	0	4	6908	Y. Ohara, A. Noriki	dummy	0	2010/8/31/22:58:48(130.34.95.44)	Bea 先生 承認済　Ta
1	22	32	4119	S.Watanabe	dummy	0	2010/9/1/10:8:36(130.34.95.44)	Ta/Cu
1	34	36	4771	SIMON	dummy	0	2010/9/1/16:41:14(130.34.95.44)	Pt
3	32	44	6937	makihata	dummy	0	2010/9/3/15:31:31(130.34.95.43)	0
4	16	28	6908	Y. Ohara, A. Noriki	dummy	0	2010/9/4/5:35:6(130.34.95.44)	田中先生 承認済 Ti/Cu
4	28	30	6908	Y. Ohara, A. Noriki	dummy	0	2010/9/4/8:4:1(130.34.95.37)	田中徹先生　承認済
5	22	32	6937	makihata	dummy	0	2010/9/5/4:59:8(130.34.95.43)	0
5	32	40	6937	Makihata	dummy	0	2010/9/5/11:40:10(130.34.95.43)	SiO2 with Moriyama 吉田助教承認
-8	18	20	6937	fukushi	dummy	2	2010/9/6/13:33:52(130.34.95.43)	Pt -> #2へ	2010/9/8/7:28:6(130.34.95.43)
7	16	26	6908	Ohara Yuki	dummy	0	2010/9/6/18:26:26(130.34.95.44)	Ti/Cu
7	26	28	6908	Ohara Yuki	dummy	0	2010/9/7/12:11:2(130.34.95.44)	Ti/Cu
8	22	34	4771	shiraki	dummy	0	2010/9/7/15:31:32(130.34.95.21)	Al
-8	34	44	6908	noriki	dummy	2	2010/9/7/22:53:7(130.34.95.37)	Ta/Cu	2010/9/8/5:42:33(130.34.95.44)
8	34	46	6908	Y. Ohara, A. Noriki	dummy	0	2010/9/8/5:49:52(130.34.95.44)	Ti/Cu 
9	0	6	6908	noriki,ohara	dummy	2	2010/9/8/18:5:30(130.34.95.37)	Ta/Cu
9	6	18	6908	noriki,ohara	dummy	0	2010/9/9/0:55:19(130.34.95.44)	ペイ先生承認済み
-10	25	34	5810	asai	dummy	0	2010/9/9/10:43:50(130.34.95.49)	Cu	2010/9/9/11:23:27(130.34.95.49)
10	24	26	5810	asai	dummy	2	2010/9/9/11:25:42(130.34.95.49)	Cuターゲット取り外し．13:00～17:00#2で使用
9	31	39	6936	Lin	dummy	0	2010/9/9/14:59:2(130.34.95.43)	SiO2
9	44	48	6909	Noriki, Ohara	dummy	0	2010/9/9/21:46:1(130.34.95.44)	Cu 田中先生承認済み
10	0	18	6909	Noriki, Ohara	dummy	0	2010/9/9/21:46:37(130.34.95.44)	Cu 田中先生承認済み
11	16	28	6908	Y. Ohara, S. Kanno	dummy	0	2010/9/11/3:23:53(130.34.95.44)	田中先生 承認済 Ti/Cu
11	28	31	6908	Y. Ohara, S. Kanno	dummy	0	2010/9/11/13:19:33(130.34.95.37)	田中先生　承認済
11	31	41	4771	cao	dummy	0	2010/9/11/14:39:41(130.34.95.21)	Al
-13	21	32	4771	cao	dummy	0	2010/9/11/20:44:12(130.34.95.44)	0	2010/9/11/20:44:27(130.34.95.44)
13	21	32	4771	cao	dummy	0	2010/9/11/20:44:57(130.34.95.44)	Al
-14	19	28	4119	konno	dummy	0	2010/9/13/7:20:40(130.34.74.84)	0	2010/9/14/9:23:40(130.34.95.44)
-14	28	40	5318	Tomura	dummy	0	2010/9/13/15:58:29(130.34.95.43)	0	2010/9/13/19:59:33(130.34.95.49)
14	28	40	5318	Tomura	dummy	0	2010/9/13/20:0:20(130.34.95.49)	Al
14	19	21	4119	konno	dummy	0	2010/9/13/7:20:40(130.34.74.84)	0
17	19	29	4119	konno	dummy	2	2010/9/15/8:17:58(130.34.63.131)	SiO2
-16	24	36	6909	takeshita	dummy	0	2010/9/15/12:39:53(130.34.95.37)	Al	2010/9/15/17:14:31(130.34.95.44)
-15	28	40	6937	KIM	dummy	0	2010/9/15/13:10:56(130.34.95.43)	0	2010/9/15/13:11:37(130.34.95.43)
15	28	29	6937	KIM	dummy	0	2010/9/15/13:10:56(130.34.95.43)	0
-15	29	39	6937	KIM	dummy	0	2010/9/15/13:12:20(130.34.95.43)	0	2010/9/15/13:18:3(130.34.95.43)
15	29	39	6937	KIM	dummy	0	2010/9/15/13:18:23(130.34.95.43)	Pt
-16	22	34	6909	takeshita	dummy	0	2010/9/15/17:14:47(130.34.95.44)	0	2010/9/15/17:15:2(130.34.95.44)
16	22	34	6909	takeshita	dummy	0	2010/9/15/17:15:36(130.34.95.44)	Al
17	29	42	6937	Kim	dummy	0	2010/9/15/21:23:27(130.34.95.43)	Pt
-21	20	32	6909	takeshita	dummy	0	2010/9/16/13:2:20(130.34.95.37)	Pt	2010/9/21/11:28:54(130.34.95.44)
22	20	32	4771	shiraki	dummy	0	2010/9/17/13:31:39(130.34.95.21)	Al
-21	32	44	4771	yabe	dummy	0	2010/9/17/19:11:39(130.34.95.21)	0	2010/9/17/19:11:53(130.34.95.21)
-21	32	44	4771	yabe	dummy	0	2010/9/17/19:12:35(130.34.95.21)	Al	2010/9/21/14:46:42(130.34.95.21)
17	42	46	6937	KIM	dummy	0	2010/9/17/20:27:23(130.34.95.43)	Pt
-22	32	40	6936	(江) 王偉姍 	dummy	0	2010/9/18/11:26:30(130.34.95.43)	Cr/Au	2010/9/18/11:27:7(130.34.95.43)
22	32	44	6909	takeshita	dummy	2	2010/9/20/14:40:36(130.34.95.37)	Ta/Cu
21	20	25	6909	takeshita	dummy	0	2010/9/16/13:2:20(130.34.95.37)	Pt
24	20	32	5318	Tomura	dummy	0	2010/9/21/14:46:27(130.34.231.209)	Al
21	32	42	6909	takeshita	dummy	0	2010/9/21/15:13:17(130.34.95.44)	Pt
-24	32	44	4771	Bao	dummy	0	2010/9/21/15:56:6(130.34.95.21)	AI	2010/9/24/14:44:50(130.34.95.21)
-21	42	44	6909	takeshita	dummy	0	2010/9/21/17:29:5(130.34.95.37)	Pt	2010/9/21/18:47:18(130.34.95.44)
23	20	32	6909	watanabe	dummy	0	2010/9/22/21:39:1(130.34.95.37)	Ti
23	34	44	6909	watanabe	dummy	0	2010/9/22/21:39:21(130.34.95.37)	Ti
-24	44	48	6909	watanabe	dummy	0	2010/9/22/21:39:55(130.34.95.37)	Ti	2010/9/24/16:58:9(130.34.95.37)
27	19	31	6937	fukushi	dummy	2	2010/9/24/7:53:6(130.34.95.43)	Zn
-28	21	26	4771	SIMON	dummy	0	2010/9/24/11:4:36(130.34.95.21)	Ti	2010/9/27/19:27:47(130.34.95.21)
24	32	44	4771	Bao	dummy	0	2010/9/24/14:45:18(130.34.95.21)	Al
24	44	48	6909	watanabe&kanno	dummy	0	2010/9/24/16:58:54(130.34.95.37)	Ti,ペイ先生承認済み
25	0	24	6909	watanabe&kanno	dummy	0	2010/9/24/17:0:6(130.34.95.37)	Ti,ペイ先生承認済み
-27	31	41	6937	satou	dummy	0	2010/9/24/17:20:23(130.34.95.43)	Zn	2010/9/27/13:36:49(130.34.95.44)
25	24	38	6909	watanabe&kanno	dummy	0	2010/9/24/17:24:55(130.34.95.37)	Ti,ペイ先生承認済み
27	42	48	6908	Y. Ohara, A. Noriki	dummy	0	2010/9/27/12:23:27(130.34.95.37)	Ti, 田中先生 承認済
-28	0	4	6908	Y. Ohara, A. Noriki	dummy	0	2010/9/27/12:23:47(130.34.95.37)	Ti, 田中先生 承認済	2010/9/27/16:23:21(130.34.95.44)
28	26	38	6908	Ohara Yuki	dummy	0	2010/9/27/12:31:47(130.34.95.37)	Ti
-27	31	36	6937	satou	dummy	0	2010/9/27/13:37:15(130.34.95.44)	Zn	2010/9/27/13:37:48(130.34.95.44)
-27	31	36	6937	fukushi	dummy	0	2010/9/27/13:38:12(130.34.95.44)	0	2010/9/27/15:21:29(130.34.95.44)
-30	18	38	6937	fukushi, satou	dummy	0	2010/9/27/14:54:51(130.34.95.44)	Al / Zn	2010/9/27/14:55:36(130.34.95.44)
-30	19	38	6937	fukushi Satou	dummy	0	2010/9/27/14:56:56(130.34.95.44)	Al / Zn	2010/9/27/14:57:41(130.34.95.44)
-30	18	39	6937	Fukushi Satou	dummy	0	2010/9/27/14:58:39(130.34.95.44)	Al / Zn	2010/9/28/12:21:26(130.34.95.43)
27	31	33	6937	fukushi	dummy	0	2010/9/27/13:38:12(130.34.95.44)	0
-29	20	30	6909	takeshita	dummy	0	2010/9/27/16:9:44(130.34.95.37)	Al	2010/9/28/16:23:41(130.34.95.37)
27	34	42	6908	Ohara Yuki	dummy	0	2010/9/27/16:23:11(130.34.95.44)	Ti
-29	30	42	6937	matsuzaki	dummy	0	2010/9/28/8:57:35(130.34.95.43)	0	2010/9/28/8:58:45(130.34.95.43)
28	38	42	6908	Ohara Yuki	dummy	0	2010/9/28/13:44:3(130.34.95.44)	0
29	24	34	6909	takeshita	dummy	0	2010/9/28/16:24:1(130.34.95.37)	Al
29	34	40	4771	SIMON	dummy	0	2010/9/28/18:33:45(130.34.95.21)	Ti
29	20	24	6937	JW Lee	dummy	0	2010/9/28/23:11:5(130.34.95.44)	0
29	0	2	6937	JW Lee	dummy	0	2010/9/28/23:12:15(130.34.95.44)	Target change
29	40	44	4771	SIMON	dummy	0	2010/9/29/14:6:6(130.34.95.21)	Ti
30	30	40	4771	Simon	dummy	0	2010/9/29/19:26:56(130.34.95.44)	Pt