1 20 34 4771 zhang dummy 0 2010/2/25/17:19:24(130.34.95.44) Pt -1 34 48 6909 kaiho,kanno dummy 2 2010/2/26/21:18:23(130.34.95.37) SiO2 ベー先生承認 2010/2/27/20:41:0(130.34.95.44) 1 34 36 4771 zhang dummy 0 2010/3/1/12:47:49(130.34.95.21) Pt 3 18 44 6968 narumi dummy 1 2010/3/1/16:36:52(130.34.88.130) メンテナンス -4 28 38 6937 Thien Thuy dummy 0 2010/3/3/22:7:7(130.34.95.43) 0 2010/3/4/11:12:23(130.34.95.43) 4 18 28 4771 ueda dummy 0 2010/3/3/23:9:22(130.34.95.21) Pt/Ta -9 30 42 6937 JW Lee dummy 0 2010/3/8/10:13:48(130.34.95.44) Pt 2010/3/8/11:43:39(130.34.95.44) -11 30 42 6937 JW Lee dummy 0 2010/3/8/10:14:32(130.34.95.44) Pt 2010/3/9/18:4:43(130.34.95.44) -10 20 34 6937 JW Lee dummy 0 2010/3/8/11:43:35(130.34.95.44) Pt 2010/3/9/18:4:15(130.34.95.44) 8 28 40 5810 tomono dummy 2 2010/3/8/13:33:9(130.34.95.49) W 8 40 44 5810 tomono dummy 0 2010/3/8/15:48:37(130.34.95.43) 0 -9 28 40 6937 Thien Thuy dummy 0 2010/3/8/18:12:19(130.34.95.43) 0 2010/3/8/21:17:47(130.34.95.43) -12 18 28 4771 ueda dummy 0 2010/3/8/20:7:45(130.34.95.21) Pt/Ta 2010/3/11/17:13:25(130.34.95.21) -12 28 38 6937 Thien Thuy dummy 0 2010/3/8/21:18:16(130.34.95.43) 0 2010/3/12/12:55:17(130.34.95.43) 9 28 40 7281 takano dummy 0 2010/3/9/14:32:20(130.34.95.44) Pt1号機へ移動 -13 28 38 6937 Thien Thuy dummy 0 2010/3/12/12:57:29(130.34.95.43) Tanaka sensei 2010/3/12/19:23:47(130.34.95.43) 7 26 38 6937 Lee ,Park dummy 0 2010/3/14/12:8:40(130.34.95.44) Pt permission from S. Tanaka sensei 14 26 38 6937 Lee, Park dummy 0 2010/3/14/12:9:7(130.34.95.44) Pt permission from S. Tanaka sensei 15 28 39 6937 JW Lee dummy 0 2010/3/15/8:52:9(130.34.95.44) Pt 16 38 40 6937 kim dummy 2 2010/3/15/11:9:35(130.34.95.43) 0 -16 40 48 6937 kim dummy 0 2010/3/16/19:2:57(130.34.95.43) Pt 2010/3/16/19:14:10(130.34.95.43) -17 0 20 6937 kim dummy 0 2010/3/16/19:3:41(130.34.95.43) Pt 2010/3/16/20:4:26(130.34.95.43) 16 40 41 6937 kim dummy 0 2010/3/16/19:2:57(130.34.95.43) Pt -16 41 48 6937 kim dummy 0 2010/3/16/19:14:31(130.34.95.43) Pt 2010/3/16/20:4:21(130.34.95.43) 16 41 43 6937 kim dummy 0 2010/3/16/19:14:31(130.34.95.43) Pt 19 26 34 6909 beatrix dummy 2 2010/3/17/0:28:41(130.34.95.44) Cu 19 36 48 6909 beatrix dummy 0 2010/3/17/0:29:14(130.34.95.44) Cu -23 18 30 6908 S.Watanabe dummy 0 2010/3/17/15:55:40(130.34.95.37) Ta/Cu 2010/3/19/10:33:54(130.34.95.37) 19 20 26 6909 hiraki dummy 0 2010/3/17/16:9:27(130.34.95.37) 0 17 42 48 6937 JW Lee dummy 0 2010/3/17/21:15:15(130.34.95.44) Pt -18 30 38 6937 JW Lee dummy 0 2010/3/18/10:29:19(130.34.95.44) Pt 2010/3/18/12:10:26(130.34.95.43) 18 24 34 6937 JW Lee dummy 0 2010/3/18/12:11:0(130.34.95.43) Pt 18 34 36 6937 JW Lee dummy 0 2010/3/18/13:19:36(130.34.95.44) Pt 18 36 42 6968 narumi dummy 1 2010/3/18/14:41:50(130.34.88.130) 0 -20 0 8 6937 T. Matsumura dummy 2 2010/3/18/20:14:13(130.34.95.43) Al, Hino, 田中先生承認 2010/3/18/20:43:7(130.34.95.44) -23 36 46 6937 T. Matsumura dummy 2 2010/3/19/11:8:41(130.34.95.43) Al 2010/3/22/20:12:13(130.34.95.43) -23 18 30 6908 S.Watanabe dummy 0 2010/3/19/11:25:22(130.34.95.37) Ta/Cu 2010/3/19/11:25:34(130.34.95.37) 23 20 36 6908 S.Watanabe dummy 0 2010/3/19/11:26:10(130.34.95.37) Ta/Cu -22 16 32 6908 konno dummy 2 2010/3/20/2:53:42(130.34.95.44) Ti/Cu 2010/3/22/7:12:6(130.34.95.37) 20 40 48 6937 T. Matsumura dummy 2 2010/3/20/12:34:12(130.34.95.43) Al, Hino, 田中先生承認 21 0 4 6937 T. Matsumura dummy 0 2010/3/20/18:52:15(130.34.95.43) Al, Hino, 田中先生承認 25 36 40 6968 narumi dummy 1 2010/3/20/19:39:43(130.34.88.130) 0 22 16 17 6908 konno dummy 2 2010/3/20/2:53:42(130.34.95.44) Ti/Cu 22 40 48 6937 T. Matsumura dummy 2 2010/3/22/10:36:8(130.34.95.43) Al, Hatakeyama, 田中先生承認 24 36 48 6937 makihata dummy 2 2010/3/24/14:25:54(130.34.95.43) nakano,室山先生承認 27 36 48 6937 makihata dummy 0 2010/3/27/10:24:32(130.34.95.43) 0 28 0 8 6937 makihata dummy 0 2010/3/27/10:25:8(130.34.95.43) 0 30 30 36 6968 narumi dummy 1 2010/3/29/12:23:31(130.34.95.49) 0 31 20 30 6908 S.Watanabe dummy 0 2010/3/30/17:36:19(130.34.95.44) Ta/Cu