1	22	34	5810	Y.M.LEE	dummy	0	2010/1/29/16:10:7(130.34.95.49)	0
1	34	44	6937	JW Lee	dummy	0	2010/1/29/18:32:21(130.34.95.44)	SiO2
-2	22	34	6937	JW Lee	dummy	0	2010/1/29/18:36:26(130.34.95.44)	Pt	2010/1/29/18:38:32(130.34.95.44)
2	26	37	6937	JW Lee	dummy	0	2010/1/29/18:39:21(130.34.95.44)	Ge
-2	17	26	6909	takeshita	dummy	2	2010/1/29/22:10:48(130.34.95.37)	Pt	2010/2/1/10:9:17(130.34.95.37)
3	21	32	6909	takeshita	dummy	0	2010/2/1/8:55:52(130.34.95.37)	Pt
4	18	32	6908	S.Watanabe	dummy	0	2010/2/1/9:17:26(130.34.95.44)	Ta/Cu
-3	32	42	6909	takeshita	dummy	0	2010/2/1/10:9:51(130.34.95.37)	Ta/Cu	2010/2/3/14:2:2(130.34.95.44)
2	37	46	6937	jW Lee	dummy	0	2010/2/1/10:57:53(130.34.95.44)	0
-5	16	28	6908	konno	dummy	0	2010/2/1/16:16:27(130.34.95.37)	0	2010/2/4/7:31:14(130.34.95.44)
1	44	46	5810	y.m.lee	dummy	0	2010/2/1/17:6:7(130.34.95.44)	真空引き出し　
2	18	22	5810	y.m.lee	dummy	0	2010/2/1/17:7:6(130.34.95.44)	Ge
-4	32	40	6909	takeshita	dummy	0	2010/2/1/17:20:51(130.34.95.44)	Pt	2010/2/3/15:57:22(130.34.95.37)
3	42	46	6937	luo	dummy	0	2010/2/2/17:44:24(130.34.95.43)	0
4	40	46	6937	luo	dummy	0	2010/2/2/17:44:57(130.34.95.43)	0
-3	4	8	6909	takeshita,watanabe	dummy	2	2010/2/3/0:6:33(130.34.95.37)	Ta/Cu,田中先生	2010/2/3/0:32:48(130.34.95.44)
3	17	21	6909	takeshita	dummy	0	2010/2/3/0:10:44(130.34.95.37)	Pt
3	4	7	6909	takeshita,watanabe	dummy	2	2010/2/3/0:34:21(130.34.95.44)	ターゲット交換Ta,Cu田中先生
3	32	42	6909	takeshita	dummy	2	2010/2/3/14:2:29(130.34.95.44)	Pt→Al
-5	29	42	4830	kishi	dummy	2	2010/2/3/17:11:6(130.34.95.30)	SiO2	2010/2/5/18:29:18(130.34.95.44)
-4	32	40	6909	beatrix	dummy	0	2010/2/3/19:30:7(130.34.95.37)	Ta/Cu	2010/2/4/18:6:41(130.34.95.44)
-12	27	38	6909	kaiho	dummy	2	2010/2/3/19:30:14(130.34.95.37)	0	2010/2/3/19:30:18(130.34.95.37)
4	2	14	6937	makihata	dummy	0	2010/2/3/23:34:52(130.34.95.43)	muroyama_sensei
4	14	18	6937	makihata&matsuo	dummy	0	2010/2/4/4:26:59(130.34.95.43)	0
5	16	27	6908	konno	dummy	0	2010/2/4/7:31:37(130.34.95.44)	Al
8	20	36	5810	Y.M.LEE	dummy	0	2010/2/4/9:44:48(130.34.95.49)	Ge
5	42	48	6909	beatrix	dummy	0	2010/2/4/14:15:24(130.34.95.44)	Ta/Cu
6	0	6	6909	beatrix	dummy	0	2010/2/4/14:15:56(130.34.95.44)	Ta/Cu
-8	37	46	6909	beatrix	dummy	0	2010/2/4/14:16:27(130.34.95.44)	Ta/Cu	2010/2/8/20:9:13(130.34.95.44)
4	32	39	6909	beatrix	dummy	0	2010/2/3/19:30:7(130.34.95.37)	Ta/Cu
5	2	16	6937	makihata&nakano	dummy	0	2010/2/4/22:25:24(130.34.95.43)	muroyama sensei
-9	22	34	6909	takeshita	dummy	2	2010/2/4/22:44:17(130.34.95.37)	Ir	2010/2/4/22:55:11(130.34.95.37)
-10	22	34	6909	takeshita	dummy	2	2010/2/4/22:55:33(130.34.95.37)	Ir	2010/2/9/20:22:1(130.34.95.37)
9	18	30	6937	luo	dummy	0	2010/2/5/12:15:0(130.34.95.43)	0
-7	20	36	5810	Y.M.LEE,KIM	dummy	0	2010/2/5/13:59:57(130.34.95.49)	Ge	2010/2/5/14:0:1(130.34.95.49)
-7	20	36	5810	Y.M.LEE,KIM	dummy	0	2010/2/5/14:2:2(130.34.95.49)	戸田先生	2010/2/5/14:2:7(130.34.95.49)
7	20	36	5810	Y.M.LEE,B.Y.KIM	dummy	0	2010/2/5/14:2:56(130.34.95.49)	戸田先生、Ge
5	29	39	4830	kishi	dummy	2	2010/2/3/17:11:6(130.34.95.30)	SiO2
6	20	28	6909	beatrix	dummy	0	2010/2/5/19:27:26(130.34.95.37)	Ta
9	32	44	6909	beatrix	dummy	0	2010/2/5/20:8:10(130.34.95.44)	Ta/Cu
-6	34	42	6909	beatrix	dummy	0	2010/2/5/21:2:22(130.34.95.37)	Ta	2010/2/6/16:1:6(130.34.95.44)
6	34	35	6909	beatrix	dummy	0	2010/2/5/21:2:22(130.34.95.37)	Ta
7	40	44	5810	Y.M.LEE,B.Y.KIM	dummy	0	2010/2/7/13:40:35(130.34.95.49)	真空引き出し、明日Geスパッタ
-8	18	20	5810	Y.M.LEE	dummy	0	2010/2/7/13:40:59(130.34.95.49)	Ge	2010/2/7/18:9:45(130.34.95.49)
8	17	20	5810	Y.M.LEE	dummy	0	2010/2/7/18:10:28(130.34.95.49)	Ge,温度：200
-9	44	48	5810	H.Miyashita	dummy	0	2010/2/8/9:28:25(130.34.95.49)	Ta	2010/2/8/14:47:50(130.34.95.44)
-10	34	44	6937	JW Lee	dummy	0	2010/2/8/10:20:12(130.34.95.44)	0	2010/2/8/10:20:21(130.34.95.44)
10	34	46	6937	JW Lee	dummy	0	2010/2/8/10:20:43(130.34.95.44)	Pt
9	0	12	6937	makihata&nakano	dummy	0	2010/2/8/15:23:57(130.34.95.43)	Al target 交換
10	0	12	6937	makihata&nakano	dummy	0	2010/2/8/15:24:46(130.34.95.43)	0
9	30	32	6937	luo	dummy	0	2010/2/8/15:52:47(130.34.95.43)	0
8	37	43	6909	beatrix	dummy	0	2010/2/4/14:16:27(130.34.95.44)	Ta/Cu
-12	22	36	4771	zhang	dummy	0	2010/2/9/10:3:40(130.34.95.21)	Cu	2010/2/10/13:17:21(130.34.95.21)
-11	25	40	6909	beatrix	dummy	0	2010/2/9/12:8:27(130.34.95.44)	Cu	2010/2/10/11:26:12(130.34.95.37)
-11	40	46	6909	hiraki	dummy	0	2010/2/9/12:8:55(130.34.95.44)	Cu	2010/2/10/11:25:51(130.34.95.37)
12	36	46	6909	beatrix	dummy	0	2010/2/9/19:59:16(130.34.95.44)	Ta/Cu
10	22	34	6909	takeshita	dummy	2	2010/2/9/20:26:35(130.34.95.37)	Ir
18	18	40	6937	林(NIKKO)	dummy	2	2010/2/10/8:17:44(130.34.95.43)	Cr/Cu
11	38	44	6909	beatrix	dummy	0	2010/2/10/11:26:33(130.34.95.37)	0
15	31	41	6937	JW Lee	dummy	0	2010/2/10/17:40:44(130.34.95.44)	Pt
-12	20	32	6937	makihata	dummy	0	2010/2/11/21:21:8(130.34.95.43)	Al	2010/2/12/1:58:20(130.34.95.43)
12	4	20	6937	makihata&matsuo	dummy	0	2010/2/12/1:58:14(130.34.95.43)	yoshida sensei
15	20	31	6908	S.Watanabe	dummy	0	2010/2/12/13:5:6(130.34.95.37)	Ta/Cu
13	24	38	6909	beatrix	dummy	0	2010/2/12/18:9:29(130.34.95.44)	Ta
-14	24	38	6909	beatrix	dummy	0	2010/2/12/18:10:52(130.34.95.44)	0	2010/2/13/20:9:40(130.34.95.37)
17	30	40	6909	beatrix	dummy	0	2010/2/12/18:12:37(130.34.95.44)	Ta
-18	40	47	6909	beatrix	dummy	0	2010/2/12/18:13:24(130.34.95.44)	Ta	2010/2/12/19:23:29(130.34.95.37)
-16	22	36	6909	beatrix	dummy	0	2010/2/12/19:24:30(130.34.95.37)	Ta	2010/2/16/15:57:48(130.34.95.37)
-17	18	30	4830	kishi	dummy	2	2010/2/15/15:0:44(130.34.95.30)	SiO2	2010/2/17/9:46:28(130.34.95.44)
-19	18	30	6937	JW 	dummy	0	2010/2/15/16:48:51(130.34.95.44)	0	2010/2/15/16:48:57(130.34.95.44)
-19	28	42	6937	jw lee	dummy	0	2010/2/15/16:49:30(130.34.95.44)	Pt	2010/2/18/22:3:53(130.34.95.44)
16	36	46	6937	Thien Thuy	dummy	0	2010/2/15/20:7:53(130.34.95.43)	0
-20	24	36	6908	noriki	dummy	0	2010/2/15/23:19:2(130.34.95.37)	Ta	2010/2/15/23:27:1(130.34.95.37)
-22	24	36	6908	noriki	dummy	0	2010/2/15/23:26:59(130.34.95.37)	Ta	2010/2/22/12:22:59(130.34.95.44)
16	22	34	6909	beatrix	dummy	0	2010/2/12/19:24:30(130.34.95.37)	Ta
17	18	22	4830	kishi	dummy	2	2010/2/15/15:0:44(130.34.95.30)	SiO2
17	22	30	4830	kishi	dummy	2	2010/2/17/9:46:50(130.34.95.44)	W
-19	18	28	6937	Thien Thuy	dummy	0	2010/2/17/11:59:19(130.34.95.43)	0	2010/2/18/21:57:45(130.34.95.43)
-18	40	48	6909	Ta	dummy	0	2010/2/17/18:43:47(130.34.95.44)	0	2010/2/17/18:44:5(130.34.95.44)
-18	40	48	6909	beatrix	dummy	0	2010/2/17/18:46:14(130.34.95.44)	Ta	2010/2/18/13:46:13(130.34.95.37)
22	36	48	5810	Y.M.LEE	dummy	0	2010/2/17/21:2:48(130.34.95.49)	0
-18	40	42	6937	林（NIKKO)	dummy	2	2010/2/18/16:11:38(130.34.95.43)	Cr＞#2へ	2010/2/18/16:39:16(130.34.95.43)
-18	40	48	6937	林（NIKKO)	dummy	0	2010/2/18/16:39:44(130.34.95.43)	Cr/Cu	2010/2/18/17:1:19(130.34.95.43)
-18	40	48	6937	hayashi,yoshida	dummy	0	2010/2/18/17:1:50(130.34.95.43)	秋山	2010/2/18/17:2:0(130.34.95.43)
18	40	48	6937	hayashi,yoshida	dummy	0	2010/2/18/17:2:28(130.34.95.43)	秋山承認
23	26	36	6937	Thien Thuy	dummy	0	2010/2/18/21:58:19(130.34.95.43)	0
-23	36	48	6937	JW Lee	dummy	0	2010/2/18/22:4:23(130.34.95.44)	Ge	2010/2/23/17:11:41(130.34.95.44)
-19	0	10	6937	林、巻幡	dummy	0	2010/2/18/22:39:58(130.34.95.43)	田中先生承認	2010/2/18/22:40:9(130.34.95.43)
19	0	10	6937	林（NIKKO)、巻幡	dummy	0	2010/2/18/22:40:54(130.34.95.43)	田中先生承認、Cr/Cu
-19	28	42	6937	JW Lee	dummy	0	2010/2/19/10:8:34(130.34.95.44)	0	2010/2/19/10:50:9(130.34.95.44)
23	18	26	6937	JW Lee	dummy	0	2010/2/19/10:12:38(130.34.95.44)	Pt
-19	32	46	6937	JWLee	dummy	0	2010/2/19/11:0:11(130.34.95.43)	Pt	2010/2/19/15:10:9(130.34.95.44)
19	32	33	6937	JWLee	dummy	0	2010/2/19/11:0:11(130.34.95.43)	Pt
19	40	46	6937	JW Lee	dummy	0	2010/2/19/15:10:37(130.34.95.44)	Pt
22	24	27	6908	noriki	dummy	0	2010/2/15/23:26:59(130.34.95.37)	Ta
-24	28	40	6908	noriki	dummy	0	2010/2/22/12:23:22(130.34.95.44)	0	2010/2/22/12:23:27(130.34.95.44)
24	28	40	6908	noriki	dummy	0	2010/2/22/12:23:45(130.34.95.44)	Ta
-24	14	28	6908	konno	dummy	2	2010/2/23/8:1:20(130.34.95.44)	Ti/Cu	2010/2/24/6:30:11(130.34.95.44)
-25	30	44	5810	Y.M.LEE	dummy	0	2010/2/23/10:5:41(130.34.95.49)	0	2010/2/24/10:12:41(130.34.95.49)
23	36	37	6937	JW Lee	dummy	0	2010/2/18/22:4:23(130.34.95.44)	Ge
23	37	42	6937	Thien Thuy	dummy	0	2010/2/23/18:17:41(130.34.95.43)	0
-26	28	40	6937	Thien Thuy	dummy	0	2010/2/23/20:31:11(130.34.95.43)	0	2010/2/24/13:33:49(130.34.95.43)
24	14	15	6908	konno	dummy	2	2010/2/23/8:1:20(130.34.95.44)	Ti/Cu
25	28	40	6937	Thien Thuy	dummy	0	2010/2/24/13:34:7(130.34.95.43)	0
-26	38	46	6909	beatrix	dummy	2	2010/2/26/15:13:34(130.34.95.44)	Cu/Ta	2010/2/26/17:29:42(130.34.95.44)
-27	30	42	6909	kaiho,kanno	dummy	2	2010/2/26/21:16:34(130.34.95.37)	Al　ベー先生承認	2010/2/27/15:29:18(130.34.95.44)
27	30	33	6909	kaiho,kanno	dummy	2	2010/2/26/21:16:34(130.34.95.37)	Al　ベー先生承認