-3	17	30	6937	kim	dummy	2	2009/7/30/21:17:23(130.34.95.43)	Pt	2009/7/30/21:21:17(130.34.95.43)
3	28	40	6937	kim	dummy	2	2009/7/30/21:22:52(130.34.95.43)	Pt
-4	28	40	6937	JW Lee	dummy	2	2009/7/31/20:55:39(130.34.95.44)	Ge	2009/8/3/13:17:2(130.34.95.44)
-5	26	38	5810	moriwaki	dummy	0	2009/8/1/2:55:46(130.34.95.49)	Pt	2009/8/1/2:57:17(130.34.95.49)
-5	39	41	5810	m	dummy	2	2009/8/1/2:56:38(130.34.95.49)	0	2009/8/1/2:56:43(130.34.95.49)
-4	18	28	5810	moriwaki	dummy	0	2009/8/1/2:57:36(130.34.95.49)	0	2009/8/1/2:57:53(130.34.95.49)
4	18	28	5810	moriwaki	dummy	0	2009/8/1/2:58:8(130.34.95.49)	Pt
-3	40	48	6909	takeshita	dummy	0	2009/8/3/8:38:2(130.34.95.37)	Pt	2009/8/3/15:33:18(130.34.95.44)
-5	18	28	6909	takeshita	dummy	0	2009/8/3/9:56:46(130.34.95.44)	Pt	2009/8/3/11:54:44(130.34.95.44)
-5	28	40	6937	jw lee	dummy	0	2009/8/3/10:10:58(130.34.95.44)	Pt	2009/8/3/11:53:49(130.34.95.44)
6	18	30	4830	kishi	dummy	2	2009/8/3/10:23:31(130.34.95.30)	W
-5	28	40	6937	JW Lee	dummy	0	2009/8/3/11:54:28(130.34.95.44)	0	2009/8/3/11:54:49(130.34.95.44)
5	28	40	6937	JW Lee	dummy	0	2009/8/3/11:55:57(130.34.95.44)	Ge
-4	28	40	6937	jw lee	dummy	0	2009/8/3/13:17:18(130.34.95.44)	pt	2009/8/4/14:19:11(130.34.95.44)
3	40	48	6909	takeshita,kaiho	dummy	0	2009/8/3/15:33:39(130.34.95.44)	Pt
-6	30	40	6937	JW Lee	dummy	0	2009/8/3/17:9:50(130.34.95.44)	0	2009/8/4/14:37:46(130.34.95.44)
-4	40	48	6909	takeshita	dummy	0	2009/8/3/18:28:28(130.34.95.37)	Pt	2009/8/4/16:11:9(130.34.95.37)
5	18	20	6937	林(NIKKO)	dummy	2	2009/8/4/8:18:47(130.34.95.43)	Pt ->２号機へ
4	28	31	6937	jw lee	dummy	0	2009/8/3/13:17:18(130.34.95.44)	pt
-6	30	48	6909	kaiho	dummy	2	2009/8/4/15:22:47(130.34.95.37)	Ta/Cu	2009/8/5/18:29:34(130.34.95.44)
-4	36	44	6937	kim	dummy	0	2009/8/4/16:46:11(130.34.95.44)	Pt	2009/8/4/17:1:22(130.34.95.44)
4	36	37	6937	kim	dummy	0	2009/8/4/16:46:11(130.34.95.44)	Pt
-5	16	18	6937	kim	dummy	0	2009/8/4/17:42:58(130.34.95.44)	Pt	2009/8/4/20:36:31(130.34.95.43)
4	40	44	6937	kim	dummy	0	2009/8/4/17:43:58(130.34.95.44)	Pt
-4	44	48	6937	kim	dummy	2	2009/8/4/17:44:56(130.34.95.44)	0	2009/8/4/20:36:18(130.34.95.43)
-5	0	16	6937	kim	dummy	2	2009/8/4/17:45:20(130.34.95.44)	0	2009/8/4/20:36:25(130.34.95.43)
5	40	48	6937	makihata,endo	dummy	0	2009/8/5/10:33:53(130.34.95.43)	0
5	22	24	6937	makihata	dummy	2	2009/8/5/10:48:37(130.34.95.43)	pt -> SiO2
-7	26	36	7281	takano	dummy	0	2009/8/5/14:18:42(130.34.77.72)	SiO2	2009/8/7/14:15:29(130.34.77.72)
-6	30	43	5810	moriwaki	dummy	2	2009/8/5/19:3:3(130.34.95.49)	Pt	2009/8/6/17:18:13(130.34.95.49)
6	0	6	6937	makihata,endo	dummy	0	2009/8/5/21:9:54(130.34.95.43)	0
10	18	30	4830	kishi	dummy	0	2009/8/6/15:35:7(130.34.95.30)	W
6	30	37	5810	moriwaki	dummy	2	2009/8/5/19:3:3(130.34.95.49)	Pt
-7	36	39	7281	takano	dummy	0	2009/8/7/11:30:35(130.34.77.72)	SiO2	2009/8/7/14:15:24(130.34.77.72)
7	26	31	7281	takano	dummy	0	2009/8/5/14:18:42(130.34.77.72)	SiO2
-11	18	32	6908	konno	dummy	2	2009/8/9/7:34:2(130.34.95.37)	SiO2	2009/8/10/15:1:49(130.34.95.37)
11	17	31	6908	konno	dummy	2	2009/8/10/16:0:56(130.34.95.37)	SiO2
11	31	40	6937	Hoeppner	dummy	0	2009/8/11/1:17:15(130.34.94.149)	Cu
-12	20	30	6937	makihata	dummy	0	2009/8/11/12:34:19(130.34.95.43)	0	2009/8/12/10:3:6(130.34.94.147)
-11	40	48	6937	makihata	dummy	0	2009/8/11/18:1:36(130.34.95.43)	Cu	2009/8/11/18:12:44(130.34.95.43)
11	40	46	6937	makihata	dummy	0	2009/8/11/18:13:20(130.34.95.43)	#2にてCu使用
12	20	23	6937	makihata	dummy	0	2009/8/11/12:34:19(130.34.95.43)	0
-14	17	28	6909	takeshita	dummy	0	2009/8/13/16:56:16(130.34.95.37)	Pt	2009/8/13/17:3:0(130.34.95.37)
14	17	26	6909	takeshita,iwata	dummy	0	2009/8/13/17:3:28(130.34.95.37)	田中先生
14	26	27	6909	takeshita	dummy	0	2009/8/14/8:41:5(130.34.95.37)	Pt
15	34	44	6937	yoshida,makihata	dummy	0	2009/8/15/15:52:13(130.34.95.43)	牧志
20	18	30	4830	kishi	dummy	0	2009/8/17/10:49:36(130.34.95.30)	W
25	18	20	6937	林(NIKKO)	dummy	2	2009/8/17/12:36:50(130.34.95.43)	Pt -> ２号機へ
-19	24	36	5810	moriwaki	dummy	0	2009/8/17/18:45:8(130.34.95.49)	Pt @ 300℃	2009/8/17/18:49:53(130.34.95.49)
19	24	38	5810	moriwaki	dummy	0	2009/8/17/18:50:32(130.34.95.49)	Pt/Ti
19	38	40	6937	endo	dummy	2	2009/8/19/12:21:52(130.34.95.44)	Pt→2号機へ
-20	30	40	6937	jw lee	dummy	0	2009/8/19/18:12:36(130.34.95.44)	pt	2009/8/19/18:13:21(130.34.95.44)
-21	19	32	4830	kishi	dummy	0	2009/8/20/10:30:35(130.34.95.30)	W	2009/8/20/14:54:47(130.34.95.44)
20	30	44	6937	Hoeppner	dummy	2	2009/8/20/10:42:10(130.34.95.43)	Al-->Cu
21	29	41	4830	kishi	dummy	0	2009/8/20/14:57:6(130.34.95.44)	W
24	18	32	6909	meshida	dummy	0	2009/8/20/17:6:33(130.34.95.44)	Al
20	44	48	6937	Hoeppner	dummy	0	2009/8/20/19:55:23(130.34.95.43)	Cu *Vacuum only*
-21	0	18	6937	Hoeppner	dummy	0	2009/8/20/19:55:48(130.34.95.43)	Cu *Vacuum only*	2009/8/21/0:22:18(130.34.95.43)
-21	18	21	6937	Hoeppner	dummy	0	2009/8/20/19:56:25(130.34.95.43)	Cu sputter	2009/8/21/0:22:7(130.34.95.43)
21	0	3	6937	Hoeppner	dummy	0	2009/8/20/19:55:48(130.34.95.43)	Cu *Vacuum only*
25	28	38	6937	jw lee	dummy	0	2009/8/21/13:40:38(130.34.95.44)	ZnO
-26	28	38	6937	jw lee	dummy	0	2009/8/21/13:41:7(130.34.95.44)	Ge	2009/8/25/20:55:6(130.34.95.44)
-22	30	46	6909	kaiho,kanno	dummy	2	2009/8/22/14:52:28(130.34.95.44)	SiO2 田中先生　承認済み	2009/8/22/20:48:45(130.34.95.44)
22	30	44	6909	kaiho,kanno	dummy	2	2009/8/22/14:52:28(130.34.95.44)	SiO2 田中先生　承認済み
24	32	36	6909	meshida	dummy	0	2009/8/24/12:38:11(130.34.95.44)	Al
-24	36	48	6909	takeshita,kaiho	dummy	0	2009/8/24/15:3:14(130.34.95.37)	Al,田中先生	2009/8/24/17:14:39(130.34.95.44)
24	36	37	6909	takeshita,kaiho	dummy	0	2009/8/24/15:3:14(130.34.95.37)	Al,田中先生
25	20	28	5810	moriwaki	dummy	0	2009/8/24/17:21:36(130.34.95.49)	Al
25	38	42	6937	jw Lee	dummy	0	2009/8/25/9:53:6(130.34.95.44)	ZnO
-27	28	38	6937	jw lee	dummy	0	2009/8/25/20:55:0(130.34.95.44)	ge	2009/8/25/20:59:55(130.34.95.44)
27	26	38	6937	JW Lee	dummy	0	2009/8/25/21:0:23(130.34.95.44)	Ge, ZnO
-26	0	19	6909	takeshita,kaiho	dummy	2	2009/8/25/22:32:35(130.34.95.44)	Wyajirusi 田中先生	2009/8/25/22:33:4(130.34.95.44)
26	0	19	6909	takeshita,kaiho	dummy	2	2009/8/25/22:33:43(130.34.95.44)	W→Al、田中先生
26	38	44	5810	moriwaki	dummy	0	2009/8/25/23:10:50(130.34.95.49)	Al
28	26	38	6937	jw lee	dummy	0	2009/8/26/10:16:36(130.34.95.44)	Ge ZnO
27	38	48	6968	narumi	dummy	1	2009/8/27/14:54:14(130.34.88.130)	メンテナンス