1 18 28 6909 takeshita dummy 0 2009/9/30/15:38:56(130.34.95.44) Al -2 18 28 6909 takeshita dummy 0 2009/9/30/15:39:23(130.34.95.44) Pt 2009/10/2/8:41:3(130.34.95.37) 5 18 30 4830 kishi dummy 0 2009/9/30/17:44:43(130.34.95.30) W@200℃ 1 28 30 6909 takeshita dummy 0 2009/10/1/13:25:45(130.34.95.37) 0 2 18 20 6909 takeshita dummy 0 2009/9/30/15:39:23(130.34.95.44) Pt 2 20 32 6909 takeshita dummy 2 2009/10/2/10:2:5(130.34.95.44) Pt 5 30 40 5810 moriwaki dummy 0 2009/10/5/13:27:1(130.34.95.49) Pt 5 40 44 5810 moriwaki dummy 0 2009/10/5/16:40:59(130.34.95.49) Pt -6 18 28 6909 takeshita dummy 0 2009/10/5/20:53:22(130.34.95.37) Al 2009/10/5/21:29:44(130.34.95.37) 7 22 34 6936 Haubold dummy 0 2009/10/6/12:27:36(130.34.95.43) Al 8 22 38 6937 JW Lee dummy 0 2009/10/6/14:54:52(130.34.95.44) Ge -9 22 38 6937 JW Lee dummy 0 2009/10/6/14:56:21(130.34.95.44) Pt/Ti 2009/10/7/9:44:33(130.34.95.43) 6 41 43 4830 kishi dummy 0 2009/10/6/19:49:36(130.34.95.30) sample導入 6 43 48 4830 kishi dummy 0 2009/10/6/19:50:12(130.34.95.30) 真空引き 7 0 18 4830 kishi dummy 0 2009/10/6/19:50:41(130.34.95.30) 真空引き 7 18 22 4830 kishi dummy 0 2009/10/6/19:51:7(130.34.95.30) W@300℃ 7 34 38 6936 Haubold dummy 0 2009/10/6/19:52:17(130.34.95.43) Al -7 38 45 6965 chu dummy 0 2009/10/7/2:40:3(130.34.95.44) al 2009/10/7/19:23:0(130.34.95.43) 9 18 32 4830 kishi dummy 0 2009/10/7/14:4:15(130.34.95.30) W@100℃ -7 45 48 6965 chu dummy 0 2009/10/7/19:8:31(130.34.95.43) 0 2009/10/7/19:22:52(130.34.95.43) 7 38 41 6965 chu dummy 0 2009/10/7/2:40:3(130.34.95.44) al -9 32 44 6937 JW Lee dummy 0 2009/10/8/10:9:4(130.34.95.44) Pt 2009/10/8/17:37:27(130.34.95.44) -14 22 36 6937 JW Lee dummy 0 2009/10/8/10:19:51(130.34.95.44) Pt 2009/10/13/11:0:17(130.34.95.44) 8 38 45 6937 JW Lee dummy 0 2009/10/8/12:36:18(130.34.95.43) Pt 9 16 18 6937 JW Lee dummy 0 2009/10/8/17:35:26(130.34.95.44) Pt 8 45 48 6937 JW Lee dummy 0 2009/10/8/17:39:24(130.34.95.44) Evacuation of the chamber for using tomorrow 9 32 44 4771 ueda dummy 0 2009/10/8/19:26:37(130.34.95.21) W -15 20 34 5810 tomono dummy 2 2009/10/13/9:32:27(130.34.95.43) Al 2009/10/14/13:10:53(130.34.95.43) 13 43 45 6908 beatrix dummy 2 2009/10/13/21:8:49(130.34.95.44) Cu,Ta -14 28 40 6908 beatrix dummy 0 2009/10/13/21:10:16(130.34.95.44) Cu,Ta使用 2009/10/13/22:25:21(130.34.95.44) 19 22 38 6937 JWLee dummy 0 2009/10/17/15:19:20(130.34.95.43) ZnO -21 22 38 6937 JWLee dummy 0 2009/10/17/15:19:52(130.34.95.43) Pt 2009/10/20/15:4:18(130.34.95.44) -26 24 31 6937 tsukamoto dummy 0 2009/10/21/21:22:54(130.34.95.43) SiO2 2009/10/22/16:51:12(130.34.94.145)