1	30	36	6421	iwanaga	dummy	0	2008/3/31/14:25:36(130.34.123.164)	0
4	18	30	6421	iwanaga	dummy	0	2008/4/1/11:10:11(130.34.123.164)	Al
-10	36	48	4404	河俊碩	dummy	2	2008/4/2/21:11:13(130.34.248.210)	SiO2	2008/4/2/21:16:58(130.34.248.210)
-11	36	48	4404	河俊碩	dummy	2	2008/4/2/21:18:12(130.34.248.210)	SiO2	2008/4/10/9:38:24(130.34.248.210)
-3	42	48	7281	date	dummy	2	2008/4/3/21:55:29(130.34.77.72)	Ti/Pt	2008/4/3/22:22:23(172.16.44.137)
3	42	47	7281	date	dummy	2	2008/4/3/21:55:29(130.34.77.72)	Ti/Pt
5	18	24	4771	ueda	dummy	0	2008/4/4/15:39:41(130.34.89.180)	W
-5	24	30	4771	ueda	dummy	0	2008/4/4/15:40:58(130.34.89.180)	W	2008/4/4/16:0:12(172.16.44.137)
5	24	30	4771	ueda	dummy	0	2008/4/4/16:1:6(172.16.44.137)	W
4	42	48	7281	date	dummy	2	2008/4/4/17:6:59(130.34.77.72)	SiO2
-5	36	48	6909	noriki	dummy	0	2008/4/4/20:54:32(172.16.44.141)	Ta/Cu	2008/4/4/20:55:12(172.16.44.141)
5	36	48	6909	noriki	dummy	2	2008/4/4/20:55:30(172.16.44.141)	Ta/Cu
5	0	6	7281	date	dummy	0	2008/4/4/22:33:44(130.34.77.72)	SiO2
11	30	35	6421	iwanaga	dummy	0	2008/4/9/10:26:48(130.34.123.164)	0
9	30	36	4404	Ha,Jun-Seok	dummy	0	2008/4/10/9:38:11(130.34.248.210)	SiO2
10	30	36	4404	Ha,Jun-Seok	dummy	0	2008/4/10/9:42:40(130.34.248.210)	SiO2
10	36	42	4404	Ha, Jun-SeoK	dummy	0	2008/4/10/14:32:0(130.34.248.196)	SiO2
-11	36	44	6909	satou	dummy	0	2008/4/11/14:42:14(130.34.95.37)	SiN	2008/4/11/14:42:23(130.34.95.37)
11	36	44	6909	satou	dummy	2	2008/4/11/14:42:52(130.34.95.37)	SiN
14	24	32	6909	satou	dummy	2	2008/4/14/10:40:7(130.34.95.37)	SiN
14	32	40	6909	fukushima	dummy	0	2008/4/14/11:21:33(130.34.95.37)	SiO2
14	40	48	6909	satou	dummy	0	2008/4/14/16:46:45(130.34.95.37)	SiN
15	26	34	6936	Matsuzaki	dummy	0	2008/4/14/19:22:18(130.34.95.43)	Cu
-15	34	42	6909	satou	dummy	2	2008/4/15/15:36:27(130.34.95.37)	Pt	2008/4/15/16:46:18(130.34.95.37)
15	34	36	6909	satou	dummy	2	2008/4/15/15:36:27(130.34.95.37)	Pt
19	28	40	6909	kaiho	dummy	2	2008/4/19/13:57:10(130.34.95.37)	Al
-20	27	34	6956	Chiba	dummy	0	2008/4/20/13:22:4(130.34.95.38)	Al	2008/4/20/13:35:49(130.34.95.38)
20	27	30	6956	Chiba	dummy	0	2008/4/20/13:22:4(130.34.95.38)	Al
21	30	36	6956	Chiba	dummy	0	2008/4/21/14:26:6(130.34.95.38)	Al
22	26	32	4771	tachihara	dummy	0	2008/4/21/15:12:5(130.34.89.180)	Al
-21	36	48	4830	sasaki	dummy	2	2008/4/21/17:30:16(172.16.44.137)	0	2008/4/21/17:30:41(172.16.44.137)
21	36	37	4830	sasaki	dummy	2	2008/4/21/17:30:16(172.16.44.137)	0
21	37	48	4830	sasaki	dummy	2	2008/4/21/17:31:4(172.16.44.137)	W
25	34	42	6909	noriki	dummy	0	2008/4/25/15:34:0(130.34.95.37)	SiO2
-28	12	24	7281	date	dummy	0	2008/4/27/21:48:31(130.34.77.72)	SiO2-50min	2008/4/27/23:22:32(130.34.77.72)
28	24	32	6909	jeong	dummy	0	2008/4/28/9:56:13(130.34.95.37)	Ta/Cu
-28	32	40	6909	ckyin	dummy	0	2008/4/28/11:26:3(130.34.95.37)	0	2008/4/28/15:25:39(130.34.95.37)
28	32	33	6909	ckyin	dummy	0	2008/4/28/11:26:3(130.34.95.37)	0
28	33	40	6909	jeong	dummy	0	2008/4/28/16:28:32(172.16.44.137)	Cu/Ta
28	40	42	6909	jeong	dummy	0	2008/4/28/20:8:44(172.16.44.137)	0
-29	0	24	6909	noriki	dummy	0	2008/4/28/22:23:42(172.16.44.141)	逆スパッタ/SiO2	2008/4/28/22:51:37(172.16.44.137)
29	12	30	6909	noriki	dummy	0	2008/4/29/2:48:41(130.34.95.37)	SiO2