-3	24	36	6937	M. Toda & Cho	dummy	0	2008/2/29/19:31:50(130.34.95.43)	Al	2008/3/3/12:31:7(130.34.95.43)
1	36	48	6909	komiya	dummy	0	2008/3/1/17:25:50(130.34.95.37)	Cu/Ta
3	24	28	6937	M. Toda & Cho	dummy	0	2008/2/29/19:31:50(130.34.95.43)	Al
4	24	30	6936	H. Miyashita	dummy	0	2008/3/3/17:35:20(130.34.95.43)	0
3	42	48	6909	fujiwara	dummy	0	2008/3/3/19:23:34(172.16.44.137)	Ta/Cu
5	30	42	6937	M. Toda & Cho	dummy	2	2008/3/4/19:26:17(130.34.95.43)	NiTi->Al
6	30	42	6909	komiya	dummy	2	2008/3/6/1:17:53(130.34.95.37)	SiO2
6	24	30	6909	sato	dummy	0	2008/3/6/1:19:5(130.34.95.37)	Cu/Ta
-7	18	30	6936	kasuga	dummy	2	2008/3/6/11:37:47(130.34.95.43)	Ta/Pt	2008/3/6/13:24:16(130.34.95.43)
-10	24	36	6965	Lee	dummy	2	2008/3/6/13:24:0(130.34.95.31)	Al	2008/3/9/13:15:27(172.16.44.137)
7	24	30	6908	komiya	dummy	0	2008/3/7/0:2:9(172.16.44.137)	0
7	30	42	6909	jeong	dummy	2	2008/3/7/0:3:2(172.16.44.137)	SiO2
9	36	48	6909	fujiwara	dummy	0	2008/3/7/11:20:1(130.34.95.43)	Ta/Cu
-13	36	42	6909	fujiwara	dummy	2	2008/3/7/11:27:16(130.34.95.43)	Ta取り外し（2号機で使用）　Ta以外使用の方は連絡ください。使用できます。	2008/3/13/17:35:52(130.34.95.37)
10	24	36	6965	Lee	dummy	2	2008/3/9/13:17:8(172.16.44.137)	Al
-10	36	42	6936	honjoya	dummy	0	2008/3/9/19:46:29(130.34.95.43)	Al	2008/3/10/10:56:55(130.34.95.43)
-10	36	48	6936	honjoya	dummy	0	2008/3/10/10:57:16(130.34.95.43)	Al	2008/3/10/13:24:17(130.34.95.43)
11	0	12	6936	honjoya	dummy	0	2008/3/10/13:26:12(130.34.95.43)	Al
10	36	48	6909	fujiwara	dummy	2	2008/3/10/15:33:42(130.34.95.37)	SiO2
11	24	30	6965	Lee	dummy	2	2008/3/10/16:22:48(130.34.95.31)	Al
11	12	24	6937	honjoya	dummy	0	2008/3/11/6:1:19(172.16.44.137)	Al
11	30	36	6965	Lee	dummy	0	2008/3/11/11:18:42(172.16.44.137)	0
14	30	36	6421	iwanaga	dummy	0	2008/3/11/12:30:43(130.34.123.164)	Al
12	24	30	6965	Lee	dummy	0	2008/3/12/9:43:48(130.34.95.31)	0
-12	36	48	6937	Kurahashi	dummy	2	2008/3/12/10:49:1(130.34.95.43)	Ti/Pt	2008/3/12/15:59:56(130.34.95.43)
13	24	30	6936	kasuga	dummy	2	2008/3/12/13:20:30(130.34.95.43)	Ta/Pt
-13	30	36	6937	kumagae	dummy	0	2008/3/12/15:24:59(130.34.95.43)	Ta/Pt	2008/3/12/15:25:48(130.34.95.43)
-13	30	36	6937	kumagae	dummy	0	2008/3/12/15:26:32(130.34.95.43)	Ta/Pt	2008/3/13/16:27:25(130.34.95.43)
13	42	48	6937	Kurahashi	dummy	0	2008/3/12/15:59:51(130.34.95.43)	Ti/Pt
13	30	35	6937	kumagae	dummy	0	2008/3/12/15:26:32(130.34.95.43)	Ta/Pt
13	36	38	6909	fujiwara	dummy	2	2008/3/7/11:27:16(130.34.95.43)	Ta取り外し（2号機で使用）　Ta以外使用の方は連絡ください。使用できます。
15	24	30	6909	komiya	dummy	0	2008/3/15/10:47:37(130.34.95.37)	0
18	18	30	6937	kumagae	dummy	2	2008/3/15/12:28:2(130.34.95.43)	Ta/Pt
16	36	48	6909	jeong	dummy	2	2008/3/16/15:52:9(172.16.44.137)	Ta/Cu
17	18	30	6908	komiya	dummy	2	2008/3/16/21:38:38(172.16.44.137)	SiN
17	36	48	6909	satou	dummy	0	2008/3/17/15:11:33(172.16.44.137)	SiN
18	36	48	6937	Kurahashi	dummy	2	2008/3/17/15:57:39(130.34.95.43)	SiN
19	36	48	6909	fujiwara	dummy	2	2008/3/18/13:1:35(172.16.44.137)	SiO2
19	18	30	6937	Kurahashi	dummy	2	2008/3/18/15:12:16(130.34.95.43)	SiN
-19	30	36	6937	nakamura	dummy	0	2008/3/19/1:21:0(130.34.95.43)	Cu	2008/3/19/5:14:31(130.34.95.43)
19	30	36	6937	Kurahashi	dummy	0	2008/3/19/10:32:47(130.34.95.43)	SiN
20	30	36	6965	wakui	dummy	2	2008/3/19/22:32:2(130.34.95.31)	SiN
21	36	48	6909	komiya	dummy	2	2008/3/21/17:4:31(172.16.44.141)	Al
23	36	48	6909	fujiwara	dummy	2	2008/3/23/15:58:7(172.16.44.141)	SiO2
-26	24	36	6909	Ta/Cu	dummy	2	2008/3/24/11:59:43(130.34.95.37)	0	2008/3/24/11:59:50(130.34.95.37)
-26	24	36	6909	ki	dummy	2	2008/3/24/12:0:8(130.34.95.37)	Ta/Cu	2008/3/24/12:0:23(130.34.95.37)
-25	24	36	6909	ki	dummy	2	2008/3/24/12:0:44(130.34.95.37)	0	2008/3/24/16:32:9(130.34.95.37)
25	24	36	6909	ki	dummy	2	2008/3/24/16:32:36(130.34.95.37)	Ta/Cu
-25	0	6	6909	kino	dummy	2	2008/3/24/17:58:35(130.34.95.37)	Ta/Cu	2008/3/24/21:56:18(130.34.95.37)
28	0	6	6909	jeong	dummy	2	2008/3/27/23:9:40(172.16.44.137)	Al
-28	18	24	6909	jeong	dummy	0	2008/3/28/0:9:59(172.16.44.137)	Al	2008/3/28/2:40:41(172.16.44.137)
31	18	24	6421	iwanaga	dummy	0	2008/3/28/10:27:51(130.34.123.164)	Al
31	42	48	6909	jeong	dummy	0	2008/3/31/20:11:40(172.16.44.137)	Al