-1	24	30	6909	satou	dummy	0	2008/1/30/23:56:15(172.16.44.141)	Al	2008/1/30/23:56:29(172.16.44.141)
1	24	36	6909	satou	dummy	0	2008/1/30/23:56:44(172.16.44.141)	Al
1	0	6	4771	sano	dummy	0	2008/1/31/12:56:26(130.34.89.180)	Al
-2	24	36	6909	fujiwara	dummy	2	2008/1/31/17:46:37(130.34.95.37)	Ta/Cu	2008/1/31/17:54:7(130.34.95.37)
-2	30	42	6909	fujiwara	dummy	2	2008/1/31/17:54:43(130.34.95.37)	Ta/Cu	2008/2/2/10:23:53(172.16.44.137)
-2	42	48	6909	fujiwara	dummy	0	2008/1/31/18:51:48(130.34.95.37)	Ta/Au	2008/2/2/9:52:58(130.34.95.37)
1	36	48	7359	Wakuta	dummy	0	2008/1/31/19:15:51(130.34.64.185)	Al
-2	18	30	7359	Tsuji	dummy	0	2008/1/31/19:19:20(130.34.64.185)	Al	2008/2/1/22:51:2(130.34.64.185)
1	6	24	6909	komiya	dummy	0	2008/2/1/2:15:17(172.16.44.141)	Al
3	0	12	6909	yamada	dummy	0	2008/2/1/4:56:11(172.16.44.141)	Ta
-3	30	42	6909	yamada	dummy	0	2008/2/1/4:57:23(172.16.44.141)	Al/W	2008/2/1/4:58:58(172.16.44.141)
-3	30	48	6909	yamada	dummy	2	2008/2/1/4:59:22(172.16.44.141)	Al/W	2008/2/3/14:54:2(130.34.95.37)
-3	18	30	6421	T.BABA	dummy	2	2008/2/1/6:20:22(130.34.248.180)	Au	2008/2/2/10:38:15(130.34.248.180)
2	0	6	6909	Al	dummy	0	2008/2/1/7:48:47(172.16.44.141)	0
2	6	18	4771	tachihara	dummy	0	2008/2/1/14:7:56(130.34.89.180)	Al
-4	24	30	7281	環境科学末永研takano	dummy	0	2008/2/2/0:37:25(130.34.77.72)	Ti/Pt	2008/2/2/0:38:5(130.34.77.72)
-4	24	30	7281	takano	dummy	0	2008/2/2/0:38:36(130.34.77.72)	Ti/Pt	2008/2/2/17:21:2(130.34.77.72)
-2	24	30	6909	fujiwara	dummy	0	2008/2/2/9:52:44(130.34.95.37)	Ta/Au	2008/2/2/10:17:7(172.16.44.137)
-2	42	48	6909	noriki	dummy	0	2008/2/2/10:10:2(172.16.44.136)	Ta/Cu	2008/2/2/10:23:57(172.16.44.137)
2	30	42	6909	fujiwara	dummy	2	2008/2/2/11:3:18(172.16.44.137)	Ta/Cu
2	42	48	6909	fujiwara	dummy	0	2008/2/2/11:3:48(172.16.44.137)	Ta/Au
3	12	30	6909	liang	dummy	0	2008/2/2/14:18:50(172.16.44.137)	Ta/Al/W
-6	30	42	6909	fujiwara	dummy	2	2008/2/2/15:13:40(172.16.44.137)	Ta/Au	2008/2/2/15:13:54(172.16.44.137)
-6	36	48	6909	fujiwara	dummy	2	2008/2/2/15:14:14(172.16.44.137)	Ta/Au	2008/2/4/22:27:43(130.34.95.37)
4	18	24	6968	narumi	dummy	0	2008/2/2/15:29:56(130.34.95.15)	Cr/Au
4	24	36	7281	takano	dummy	2	2008/2/2/17:21:28(130.34.77.72)	Ti/Pt
4	6	18	6936	kawaguchi	dummy	2	2008/2/2/17:52:18(130.34.95.43)	Cr/Au
4	36	48	6937	Tsukamoto	dummy	2	2008/2/2/19:5:27(130.34.95.43)	Au/Cr
5	18	24	6421	T.BABA	dummy	0	2008/2/3/10:39:22(130.34.248.180)	Au
-5	36	48	6909	noriki	dummy	2	2008/2/3/13:49:15(130.34.95.37)	SiO2	2008/2/4/12:45:57(130.34.95.37)
-4	0	6	6968	azuma	dummy	2	2008/2/3/13:59:32(130.34.95.15)	Cr/Au	2008/2/3/14:0:44(130.34.95.15)
-5	0	6	6968	azuma	dummy	0	2008/2/3/14:0:37(130.34.95.15)	Cr/Au	2008/2/3/14:1:49(130.34.95.15)
4	0	6	6968	azuma	dummy	0	2008/2/3/14:1:14(130.34.95.15)	Cr/Au
3	30	32	6909	yamada	dummy	2	2008/2/1/4:59:22(172.16.44.141)	Al/W
5	0	18	6909	yamada	dummy	2	2008/2/3/14:55:1(130.34.95.37)	Ta
-5	24	30	6421	T.BABA	dummy	0	2008/2/3/17:31:22(130.34.248.180)	Au	2008/2/5/10:52:11(130.34.248.180)
3	42	48	6968	azuma	dummy	0	2008/2/3/20:28:44(130.34.95.15)	cr/au
5	30	36	6909	yamada	dummy	2	2008/2/4/9:21:11(130.34.95.37)	Al/W
6	0	18	6909	yamada	dummy	0	2008/2/4/9:21:39(130.34.95.37)	Al/W
-6	18	30	6968	narumi	dummy	0	2008/2/4/10:5:1(130.34.95.15)	Cr/Pt	2008/2/5/14:37:54(130.34.95.15)
-7	18	30	6936	kasuga	dummy	0	2008/2/4/10:58:31(130.34.95.43)	Ta/Pt/Al	2008/2/4/10:58:48(130.34.95.43)
8	18	30	6936	kasuga	dummy	2	2008/2/4/10:59:27(130.34.95.43)	Ta/Pt/Al
5	36	48	6909	noriki	dummy	2	2008/2/4/12:49:55(130.34.95.37)	SiO2
8	30	36	6937	Tomokazu Takahashi	dummy	0	2008/2/4/14:16:15(130.34.95.43)	Ta/Pt
-7	30	42	6909	fujiwara	dummy	2	2008/2/4/22:27:15(130.34.95.37)	Ta/Au	2008/2/4/22:28:26(130.34.95.37)
-6	36	48	6909	fujiwara	dummy	2	2008/2/4/22:27:59(130.34.95.37)	SiO2	2008/2/6/15:21:34(130.34.95.37)
-7	36	48	6909	fujiwara	dummy	2	2008/2/4/22:28:41(130.34.95.37)	Ta/Au	2008/2/6/0:50:21(130.34.95.37)
-7	12	24	7281	date	dummy	2	2008/2/5/0:52:1(130.34.77.72)	Ti/Pt	2008/2/6/18:22:39(130.34.77.72)
-7	24	36	6909	Y.KANNO	dummy	0	2008/2/5/13:44:19(130.34.95.37)	Al/W	2008/2/7/11:17:5(172.16.44.137)
-6	24	36	6968	narumi	dummy	0	2008/2/5/14:38:12(130.34.95.15)	Cr/Pt	2008/2/5/23:3:4(130.34.95.15)
6	18	24	6909	Y.KANNO	dummy	2	2008/2/5/14:39:28(172.16.44.137)	Ta
-7	0	12	6909	Jeong	dummy	2	2008/2/5/15:7:45(130.34.95.37)	0	2008/2/6/13:16:44(130.34.95.37)
-8	0	18	6909	Jeong	dummy	0	2008/2/5/15:9:25(130.34.95.37)	Ta/Cu	2008/2/6/13:16:58(130.34.95.37)
-8	36	48	6909	noriki	dummy	2	2008/2/5/21:1:43(130.34.95.37)	Ta/Au	2008/2/8/13:49:9(172.16.44.137)
7	36	42	6956	chiba	dummy	0	2008/2/6/10:30:41(130.34.95.38)	Al
-7	42	48	6909	Jeong	dummy	0	2008/2/6/12:1:38(130.34.95.37)	Ta/Cu	2008/2/6/13:24:37(130.34.95.37)
-6	42	48	6909	fujiwara	dummy	0	2008/2/6/15:21:47(130.34.95.37)	SoO2	2008/2/6/21:10:6(130.34.95.37)
6	42	45	6909	fujiwara	dummy	0	2008/2/6/15:21:47(130.34.95.37)	SoO2
7	18	24	6909	fujiwara	dummy	0	2008/2/6/21:11:38(130.34.95.37)	SiO2
-7	42	48	6421	T.BABA	dummy	0	2008/2/7/10:30:18(130.34.248.180)	0	2008/2/7/17:24:31(130.34.248.180)
-8	0	6	6909	ki	dummy	0	2008/2/7/10:50:57(130.34.95.37)	0	2008/2/7/15:15:29(172.16.44.137)
7	24	25	6909	Y.KANNO	dummy	0	2008/2/5/13:44:19(130.34.95.37)	Al/W
-7	30	36	6909	ki	dummy	0	2008/2/7/13:49:47(130.34.95.37)	0	2008/2/7/13:49:50(130.34.95.37)
7	30	36	6909	ki	dummy	0	2008/2/7/13:50:42(130.34.95.37)	Al
8	0	6	6421	T.BABA	dummy	0	2008/2/7/17:19:51(130.34.248.180)	0
8	6	12	6421	T.BABA	dummy	0	2008/2/7/17:24:17(130.34.248.180)	0
9	0	12	6909	komiya	dummy	2	2008/2/7/23:16:20(172.16.44.141)	Ta/Cu
8	12	18	6909	satou	dummy	0	2008/2/8/3:7:12(172.16.44.137)	Al
9	24	36	6909	satou	dummy	0	2008/2/8/6:27:18(172.16.44.137)	Al
-9	18	24	6936	kasuga	dummy	0	2008/2/8/11:41:4(130.34.95.43)	Ta rate check	2008/2/8/22:56:19(130.34.95.43)
-9	36	48	6909	komiya	dummy	0	2008/2/8/14:38:59(172.16.44.137)	0	2008/2/9/21:57:38(172.16.44.137)
-8	36	42	4771	Miyashita	dummy	0	2008/2/8/15:3:2(130.34.89.180)	Al	2008/2/8/15:20:47(130.34.89.180)
-8	42	48	4771	Miyashita	dummy	0	2008/2/8/15:21:7(130.34.89.180)	Al	2008/2/8/18:5:19(172.16.44.137)
-8	36	42	4771	Miyashita	dummy	0	2008/2/8/17:6:47(130.34.89.180)	Al	2008/2/8/18:5:16(172.16.44.137)
8	36	39	4771	Miyashita	dummy	0	2008/2/8/17:6:47(130.34.89.180)	Al
-10	24	36	4771	Miyashita	dummy	0	2008/2/8/22:49:44(130.34.89.180)	Al	2008/2/10/13:40:7(172.16.44.137)
9	12	18	6909	ki	dummy	0	2008/2/9/1:1:52(172.16.44.141)	0
9	18	24	6909	ki	dummy	0	2008/2/9/6:47:36(130.34.95.37)	Ta/cu
10	36	48	6909	komiya	dummy	0	2008/2/9/21:57:25(172.16.44.137)	Cu/Ta
9	36	46	6909	komiya	dummy	0	2008/2/8/14:38:59(172.16.44.137)	0
10	24	30	4771	Miyashita	dummy	0	2008/2/8/22:49:44(130.34.89.180)	Al
11	36	48	6968	narumi	dummy	0	2008/2/10/14:39:4(130.34.95.15)	SiO2
-12	30	36	6937	Tomokazu Takahashi	dummy	0	2008/2/11/13:49:40(130.34.95.43)	Pt/Ta	2008/2/12/10:59:38(130.34.95.43)
-12	18	30	6909	ki	dummy	2	2008/2/11/17:42:42(130.34.95.37)	Al	2008/2/12/12:34:27(130.34.95.43)
12	30	42	6937	Tomokazu Takahashi	dummy	2	2008/2/12/11:0:40(130.34.95.43)	1 Ta, 2 Pt, 3 Cu, Pt/Ta
12	18	28	6909	ki	dummy	2	2008/2/11/17:42:42(130.34.95.37)	Al
-12	42	48	6898	settsu	dummy	0	2008/2/12/17:24:33(130.34.95.28)	Ta/Cu@R.T.	2008/2/12/19:50:13(130.34.95.28)
-13	0	6	6898	settsu	dummy	0	2008/2/12/17:25:14(130.34.95.28)	Ta/Cu@R.T.	2008/2/12/19:13:29(130.34.95.28)
-13	24	30	6898	settsu	dummy	0	2008/2/12/19:50:56(130.34.95.28)	Ta/Cu@R.T.	2008/2/12/19:51:46(130.34.95.28)
13	24	36	6898	settsu	dummy	0	2008/2/12/19:52:9(130.34.95.28)	Ta/Cu@R.T.
13	36	48	6909	komiya	dummy	0	2008/2/12/21:52:46(172.16.44.141)	ta/cu
14	36	48	6909	komiya	dummy	0	2008/2/13/22:6:55(172.16.44.141)	0
-15	18	30	6937	Katrin	dummy	2	2008/2/14/11:30:0(130.34.95.43)	Ti/Pt	2008/2/15/10:35:34(172.16.44.136)
16	18	24	6421	T.BABA	dummy	0	2008/2/14/19:9:2(130.34.248.180)	0
15	42	48	6909	komiya	dummy	0	2008/2/15/3:23:3(172.16.44.141)	Cu/Ta
15	18	24	6937	Katrin	dummy	2	2008/2/14/11:30:0(130.34.95.43)	Ti/Pt
16	36	48	6909	ki	dummy	2	2008/2/15/14:36:1(172.16.44.141)	Ta,Cu
-17	0	12	6909	ki	dummy	0	2008/2/15/14:38:25(172.16.44.141)	0	2008/2/15/14:38:41(172.16.44.141)
17	18	30	6909	ki	dummy	0	2008/2/15/14:39:0(172.16.44.141)	Ta,Cu
16	0	6	6909	satou	dummy	0	2008/2/15/19:48:16(130.34.95.37)	Cu/Ta
16	30	36	6968	narumi	dummy	0	2008/2/16/15:3:20(130.34.95.15)	Pt
-19	30	42	6936	kasuga	dummy	2	2008/2/18/10:29:33(130.34.95.43)	Ta/Pt	2008/2/18/21:4:3(130.34.95.43)
19	24	36	6936	kasuga	dummy	2	2008/2/18/21:4:29(130.34.95.43)	Ta/Pt
19	0	18	6909	Kikuchi	dummy	2	2008/2/19/0:8:39(130.34.95.37)	SiO2
19	18	24	6909	Kikuchi	dummy	0	2008/2/19/7:6:29(130.34.95.37)	0
-19	36	42	6936	kasuga	dummy	0	2008/2/19/13:48:53(130.34.95.43)	Ta/Pt	2008/2/19/16:43:41(130.34.95.43)
19	36	48	6909	ki	dummy	0	2008/2/19/19:14:35(130.34.95.37)	0
-20	12	24	6909	ki	dummy	0	2008/2/19/22:17:41(172.16.44.137)	0	2008/2/20/9:30:1(172.16.44.137)
20	12	21	6909	ki	dummy	0	2008/2/19/22:17:41(172.16.44.137)	0
20	24	30	6909	ki	dummy	0	2008/2/20/9:30:38(172.16.44.137)	0
21	0	6	6909	ki	dummy	0	2008/2/20/17:6:49(130.34.95.37)	Ta/Cu
-21	24	30	6909	ki	dummy	0	2008/2/20/20:44:12(130.34.95.37)	0	2008/2/20/20:44:23(130.34.95.37)
-21	24	30	6909	ki	dummy	0	2008/2/20/20:44:42(130.34.95.37)	Ta/Cu	2008/2/21/1:18:35(172.16.44.136)
-21	6	24	6909	yamada	dummy	0	2008/2/21/0:54:12(172.16.44.136)	Ta	2008/2/21/6:45:14(130.34.95.37)
21	30	36	6909	ckyin	dummy	0	2008/2/21/1:19:14(172.16.44.136)	Cu Ta
21	6	16	6909	yamada	dummy	0	2008/2/21/0:54:12(172.16.44.136)	Ta
21	36	48	6909	yamada	dummy	0	2008/2/21/6:46:11(130.34.95.37)	Ta
21	24	30	6909	yamada	dummy	0	2008/2/21/6:46:38(130.34.95.37)	Ta
-22	18	24	6936	kasuga	dummy	0	2008/2/21/9:13:47(130.34.95.43)	Ta/Pt	2008/2/21/9:23:57(130.34.95.43)
-22	0	6	6909	jeong	dummy	0	2008/2/21/16:51:27(172.16.44.141)	Cu/Ta	2008/2/21/20:36:55(172.16.44.136)
-22	24	30	6937	Tsukamoto	dummy	0	2008/2/21/17:40:32(130.34.95.43)	Pt/Ta	2008/2/21/20:19:33(130.34.95.43)
-23	36	48	6937	kawasaki	dummy	2	2008/2/21/18:18:59(130.34.95.43)	Gd	2008/2/22/10:46:5(130.34.95.43)
-22	30	36	6937	Tsukamoto	dummy	0	2008/2/21/18:53:52(130.34.95.43)	Pt/Ta	2008/2/21/20:19:37(130.34.95.43)
-22	30	36	6909	jeong	dummy	0	2008/2/21/20:40:1(172.16.44.137)	0	2008/2/21/20:40:10(172.16.44.137)
-22	30	36	6909	jeong	dummy	0	2008/2/21/20:40:32(172.16.44.137)	Cu/Ta	2008/2/22/15:8:55(172.16.44.137)
-22	36	42	6968	Asakura	dummy	1	2008/2/21/21:29:23(130.34.88.130)	オイル交換他	2008/2/22/17:51:14(130.34.88.130)
-22	24	30	6909	yamada	dummy	0	2008/2/22/5:36:7(172.16.44.137)	Ta	2008/2/22/12:11:27(172.16.44.141)
22	18	24	6909	yamada	dummy	0	2008/2/22/5:36:23(172.16.44.137)	0
22	24	27	6909	yamada	dummy	0	2008/2/22/5:36:7(172.16.44.137)	Ta
22	30	33	6909	jeong	dummy	0	2008/2/21/20:40:32(172.16.44.137)	Cu/Ta
22	42	48	6909	jeong	dummy	0	2008/2/22/15:9:34(172.16.44.137)	Cu/Ta
22	36	38	6968	Asakura	dummy	1	2008/2/21/21:29:23(130.34.88.130)	オイル交換他
23	18	24	6909	ki	dummy	0	2008/2/22/18:17:27(172.16.44.137)	Ta/Cu
23	30	36	6937	Tomokazu Takahashi	dummy	0	2008/2/23/15:8:45(130.34.95.43)	Pt
23	36	42	6909	ki	dummy	0	2008/2/23/15:34:26(172.16.44.137)	Ta/Cu(長時間スパッタ）
25	18	24	6909	fujiwara	dummy	2	2008/2/23/16:21:53(172.16.44.141)	Taターゲット取り出し＆真空引き　Ta以外を使用したい方、使用できますので連絡ください
-24	36	48	6937	kawasaki	dummy	0	2008/2/24/1:0:29(130.34.95.43)	Gd(	2008/2/24/18:43:22(172.16.44.137)
24	30	36	6909	ki	dummy	0	2008/2/24/15:18:38(172.16.44.141)	0
24	36	40	6937	kawasaki	dummy	0	2008/2/24/1:0:29(130.34.95.43)	Gd(
29	36	48	6909	jeong	dummy	0	2008/2/27/16:58:43(172.16.44.136)	Cu/Ta