4	28	40	6937	makihata	dummy	0	2008/10/28/23:37:30(130.34.95.43)	Etching/Cr/Au
-4	26	28	4771	murakawa	dummy	0	2008/10/30/14:4:24(130.34.95.43)	オペトレ	2008/10/30/14:6:14(130.34.95.43)
1	0	6	6936	kawaguchi	dummy	2	2008/10/31/12:57:18(130.34.95.43)	Cu/Ti
4	40	43	5318	sano	dummy	2	2008/11/4/12:34:24(130.34.231.209)	Al、Wを外します。
-6	18	30	6937	Y.M.LEE	dummy	0	2008/11/4/13:50:56(130.34.95.43)	Al	2008/11/5/16:48:39(130.34.95.43)
6	45	48	6937	Y.M.LEE	dummy	0	2008/11/6/22:37:55(130.34.95.43)	0
7	0	6	6937	Y.M.LEE	dummy	0	2008/11/6/22:38:30(130.34.95.43)	Al
7	20	32	6909	jeong	dummy	0	2008/11/6/23:32:43(172.16.44.146)	Al
-7	32	44	6909	jeong	dummy	2	2008/11/6/23:35:27(172.16.44.146)	Cu/Ta	2008/11/6/23:35:44(172.16.44.146)
7	32	44	6909	noriki	dummy	0	2008/11/6/23:36:8(172.16.44.146)	Cu/Ta
7	44	48	6909	noriki	dummy	0	2008/11/7/12:13:28(130.34.95.37)	0
9	16	24	6936	kawaguchi	dummy	0	2008/11/7/18:29:14(130.34.95.43)	Cu/Ti
-10	16	24	6936	kawaguchi	dummy	0	2008/11/7/18:29:45(130.34.95.43)	Cu/Ti	2008/11/10/5:17:5(130.34.95.43)
8	32	44	6909	kaiho	dummy	2	2008/11/7/20:24:18(172.16.44.145)	Pt
8	0	4	6909	noriki	dummy	0	2008/11/7/21:18:18(172.16.44.146)	0
8	4	6	6909	noriki	dummy	0	2008/11/8/0:35:30(130.34.95.37)	0
8	22	32	4404	Ha,Jun-Seok	dummy	2	2008/11/8/10:54:4(130.34.248.150)	Ti
-9	24	36	6909	noriki	dummy	0	2008/11/8/19:34:13(172.16.44.166)	Ti	2008/11/8/19:34:56(172.16.44.166)
9	0	8	6909	noriki	dummy	0	2008/11/8/19:41:14(172.16.44.166)	Ti
8	44	48	6909	noriki	dummy	2	2008/11/8/19:41:29(172.16.44.166)	Ti
10	30	42	6909	noriki	dummy	0	2008/11/9/5:5:40(172.16.44.149)	Ti
-11	16	24	6936	kawaguchi	dummy	0	2008/11/9/22:13:1(130.34.95.43)	Cu/Ti	2008/11/10/20:32:39(130.34.95.43)
-10	20	28	6936	kawaguchi	dummy	0	2008/11/10/5:17:35(130.34.95.43)	Cu/Ti	2008/11/10/10:8:58(130.34.95.43)
10	20	23	6936	kawaguchi	dummy	0	2008/11/10/5:17:35(130.34.95.43)	Cu/Ti
10	42	48	6936	kawaguchi	dummy	0	2008/11/10/10:9:14(130.34.95.43)	0
-11	38	41	6421	iwanaga	dummy	0	2008/11/10/10:52:16(130.34.123.164)	0	2008/11/10/10:52:52(130.34.123.164)
11	40	43	6421	iwanaga	dummy	0	2008/11/10/10:53:8(130.34.123.164)	0
-11	24	32	6936	kawaguchi	dummy	0	2008/11/10/20:32:56(130.34.95.43)	0	2008/11/10/20:33:3(130.34.95.43)
11	24	32	6936	kawaguchi	dummy	0	2008/11/10/20:33:14(130.34.95.43)	0
11	0	6	6936	kawaguchi	dummy	0	2008/11/10/21:34:15(130.34.95.43)	0
12	36	46	7281	takano	dummy	0	2008/11/11/11:20:24(130.34.77.72)	SiO2
11	32	36	6936	kawaguchi	dummy	0	2008/11/11/12:51:37(130.34.95.43)	0
12	18	34	6909	meshida	dummy	0	2008/11/11/14:15:23(130.34.95.37)	Ta/Cu
-13	36	48	6909	kaiho	dummy	0	2008/11/12/0:18:39(130.34.95.37)	SiO2	2008/11/12/12:38:26(130.34.95.37)
-12	34	36	6909	T.Konno	dummy	0	2008/11/12/7:32:24(172.16.44.145)	Cu	2008/11/12/7:32:52(172.16.44.145)
-12	34	36	6909	T.Konno	dummy	0	2008/11/12/7:33:8(172.16.44.145)	Ti/Cu	2008/11/12/7:37:27(172.16.44.145)
12	46	48	6909	T.Konno	dummy	0	2008/11/12/7:33:24(172.16.44.145)	Ti/Cu
13	0	6	6909	T.Konno	dummy	0	2008/11/12/7:33:42(172.16.44.145)	Ti/Cu
-13	36	48	6909	kaiho	dummy	0	2008/11/12/12:39:31(130.34.95.37)	SiO2/Ta/Cu	2008/11/12/22:19:19(172.16.44.146)
14	16	26	6936	kawaguchi	dummy	0	2008/11/12/16:40:31(130.34.95.43)	Cu/Ti
14	26	36	6936	kawaguchi	dummy	0	2008/11/12/16:40:50(130.34.95.43)	0
-13	30	42	6909	kaiho	dummy	0	2008/11/12/22:19:44(172.16.44.146)	SiO2/Ti/Cu	2008/11/13/15:31:47(172.16.44.146)
13	30	34	6909	kaiho	dummy	0	2008/11/12/22:19:44(172.16.44.146)	SiO2/Ti/Cu
13	34	40	6909	kaiho	dummy	0	2008/11/13/15:32:15(172.16.44.146)	SiO2/ta/Cu
-14	36	48	6936	kano	dummy	0	2008/11/13/15:46:57(130.34.95.43)	Ti	2008/11/14/20:2:52(130.34.95.43)
-15	0	6	6936	kano	dummy	0	2008/11/13/15:47:28(130.34.95.43)	Ti	2008/11/14/20:3:6(130.34.95.43)
13	40	44	6909	kaiho	dummy	0	2008/11/13/17:26:8(172.16.44.146)	0
13	44	46	6909	kaiho	dummy	0	2008/11/13/21:18:20(172.16.44.145)	0
-15	6	18	6909	noriki	dummy	0	2008/11/14/13:35:40(130.34.95.37)	0	2008/11/14/13:38:31(130.34.95.37)
-15	6	18	6909	noriki	dummy	0	2008/11/14/13:38:52(130.34.95.37)	Ti/Cu	2008/11/14/19:38:19(130.34.95.37)
-15	30	48	6909	kaiho	dummy	0	2008/11/14/17:28:54(130.34.95.37)	SiO2/Ti/Cu , Ti/Cu	2008/11/15/6:25:37(172.16.44.146)
-15	6	10	6936	kawaguchi	dummy	0	2008/11/14/19:41:59(130.34.95.43)	Ti	2008/11/14/20:3:20(130.34.95.43)
-15	16	30	6909	noriki	dummy	0	2008/11/14/19:48:2(130.34.95.37)	Ti/Cu	2008/11/15/13:13:58(130.34.95.37)
14	36	43	6936	kano	dummy	0	2008/11/13/15:46:57(130.34.95.43)	Ti
15	34	48	6909	kaiho	dummy	0	2008/11/15/6:26:5(172.16.44.146)	SiO2 , Ti/Cu
15	16	29	6909	noriki	dummy	0	2008/11/14/19:48:2(130.34.95.37)	Ti/Cu
-17	8	18	6936	kawaguchi	dummy	2	2008/11/15/16:18:10(130.34.95.43)	Ti/Cu	2008/11/17/6:32:53(130.34.95.43)
-17	18	20	6936	kawaguchi	dummy	0	2008/11/17/4:22:3(130.34.95.43)	0	2008/11/17/6:32:59(130.34.95.43)
-17	20	24	6936	kawaguchi	dummy	0	2008/11/17/4:37:44(130.34.95.43)	Ti/Cu	2008/11/17/6:33:3(130.34.95.43)
17	8	16	6936	kawaguchi	dummy	2	2008/11/15/16:18:10(130.34.95.43)	Ti/Cu
-17	18	28	6937	kawaguchi	dummy	0	2008/11/17/6:34:12(130.34.95.43)	Cu/Ti	2008/11/17/7:35:31(130.34.95.43)
17	20	30	6936	kawaguchi	dummy	0	2008/11/17/7:36:1(130.34.95.43)	Ti/Cu
-17	32	44	6909	noriki	dummy	0	2008/11/17/9:52:22(130.34.95.37)	Ti/Cu	2008/11/17/13:59:6(172.16.44.146)
-18	16	18	6421	iwanaga	dummy	0	2008/11/17/11:12:58(130.34.123.164)	0	2008/11/17/17:0:55(130.34.123.164)
17	30	32	6936	kawaguchi	dummy	0	2008/11/17/11:32:2(130.34.95.43)	0
-17	42	48	6909	noriki	dummy	0	2008/11/17/13:59:17(172.16.44.146)	0	2008/11/17/13:59:20(172.16.44.146)
-17	42	48	6909	noriki	dummy	0	2008/11/17/13:59:48(172.16.44.146)	Ti/Cu	2008/11/17/19:43:24(172.16.44.146)
-18	0	6	6909	noriki	dummy	0	2008/11/17/14:0:5(172.16.44.146)	0	2008/11/17/19:43:31(172.16.44.146)
17	38	41	6421	iwanaga	dummy	0	2008/11/17/17:1:12(130.34.123.164)	0
-18	28	36	6937	kumagae	dummy	0	2008/11/18/9:21:21(130.34.95.43)	Ti	2008/11/18/11:2:15(172.16.44.146)
18	23	31	6937	kumagae	dummy	0	2008/11/18/11:2:28(172.16.44.146)	0
-18	36	48	6909	satou	dummy	2	2008/11/18/11:3:22(172.16.44.146)	Al	2008/11/18/19:20:52(130.34.95.37)
18	31	32	6937	kumagae	dummy	0	2008/11/18/11:27:32(172.16.44.146)	0
18	36	41	6909	satou	dummy	2	2008/11/18/11:3:22(172.16.44.146)	Al
-19	16	24	6909	noriki	dummy	0	2008/11/19/0:10:16(172.16.44.145)	0	2008/11/19/0:10:25(172.16.44.145)
19	16	24	6909	noriki	dummy	0	2008/11/19/0:10:40(172.16.44.145)	Cu
19	0	12	6909	kaiho	dummy	0	2008/11/19/0:11:1(172.16.44.145)	Ti
-22	4	17	6936	honjoya	dummy	0	2008/11/19/6:46:29(130.34.95.43)	Ti/SiO2	2008/11/20/20:10:46(130.34.95.43)
-19	36	48	6898	Kirita	dummy	2	2008/11/19/10:27:53(130.34.95.28)	Ta	2008/11/19/12:57:20(130.34.95.28)
19	26	36	4830	sasaki	dummy	2	2008/11/19/11:32:22(130.34.95.30)	W
-19	38	48	6909	T.Konno	dummy	0	2008/11/19/13:38:23(130.34.95.37)	0	2008/11/19/14:30:33(130.34.95.37)
19	38	48	6909	T.Konno, Noriki	dummy	0	2008/11/19/14:30:52(130.34.95.37)	Ti/Cu
-21	20	32	6937	Y.M.LEE	dummy	2	2008/11/19/16:7:14(130.34.95.43)	Al	2008/11/20/23:5:9(130.34.95.43)
-20	0	12	6909	satou	dummy	2	2008/11/19/16:42:4(172.16.44.145)	Al	2008/11/19/16:53:9(172.16.44.145)
19	36	38	6909	kon	dummy	0	2008/11/19/16:52:58(172.16.44.145)	0
20	28	40	6909	kaiho	dummy	2	2008/11/19/17:15:55(130.34.95.37)	SiO2,Ti,Cu
20	40	48	6909	kaiho	dummy	0	2008/11/20/18:36:46(130.34.95.37)	Ti/Cu
21	0	2	6909	kaiho	dummy	0	2008/11/20/21:0:10(172.16.44.146)	0
-21	38	48	6937	Y.M.LEE	dummy	2	2008/11/20/23:5:43(130.34.95.43)	Al	2008/11/21/15:44:2(130.34.95.43)
-22	0	3	6937	Y.M.LEE	dummy	0	2008/11/20/23:6:6(130.34.95.43)	0	2008/11/21/22:7:30(130.34.95.43)
-21	43	48	6937	Y.M.LEE	dummy	2	2008/11/21/22:6:43(130.34.95.43)	Al	2008/11/21/22:6:50(130.34.95.43)
21	43	47	6937	Y.M.LEE	dummy	2	2008/11/21/22:6:43(130.34.95.43)	Al
22	43	48	6937	Y.M.LEE	dummy	2	2008/11/21/22:7:17(130.34.95.43)	Al
23	0	6	6937	Y.M.LEE	dummy	2	2008/11/21/22:8:19(130.34.95.43)	Al
22	41	43	6937	Y.M.LEE	dummy	0	2008/11/22/11:38:44(130.34.95.43)	0
23	20	33	6936	Matsuzaki	dummy	0	2008/11/22/13:3:52(130.34.95.43)	Ge
23	6	19	6898	Kirita	dummy	2	2008/11/22/13:22:58(130.34.95.28)	Ta
-24	28	36	6968	inomata	dummy	0	2008/11/22/20:41:46(130.34.88.130)	SiO2	2008/11/24/8:50:32(130.34.88.130)
-23	34	44	6945	mori	dummy	0	2008/11/23/0:42:7(130.34.95.43)	0	2008/11/23/17:50:22(130.34.95.48)
-24	42	48	6936	honjoya	dummy	2	2008/11/23/0:57:15(130.34.95.43)	Ti/SiO2	2008/11/24/19:17:9(130.34.95.43)
25	0	10	6936	honjoya	dummy	0	2008/11/23/0:58:6(130.34.95.43)	Ti/SiO2
23	34	38	6945	mori	dummy	0	2008/11/23/0:42:7(130.34.95.43)	0
23	38	44	6945	mori	dummy	2	2008/11/23/17:50:50(130.34.95.48)	Al
23	44	46	6945	mori	dummy	0	2008/11/23/20:12:41(130.34.95.48)	Al
23	46	48	6945	mori	dummy	0	2008/11/23/22:30:19(130.34.95.43)	Al
-25	28	41	6898	Kirita	dummy	2	2008/11/24/2:17:43(130.34.95.43)	Cu	2008/11/24/2:32:10(130.34.95.43)
25	32	45	6898	Kirita	dummy	2	2008/11/24/2:32:35(130.34.95.43)	Cu
24	45	48	6936	honjoya	dummy	0	2008/11/24/19:17:33(130.34.95.43)	Ti/SiO2
25	10	12	6936	honjoya	dummy	0	2008/11/24/19:18:12(130.34.95.43)	Ti/SiO2
25	19	31	6936	Matsuzaki	dummy	0	2008/11/25/9:14:7(130.34.95.43)	Ge
-26	24	40	6909	takeshita	dummy	2	2008/11/25/10:45:31(130.34.95.37)	Ir、使用後元のターゲットに戻します	2008/11/25/10:46:6(130.34.95.37)
26	24	38	6909	takeshita	dummy	2	2008/11/25/10:46:33(130.34.95.37)	Ir、使用後元のターゲットに戻します
-26	38	48	6898	Kirita	dummy	2	2008/11/25/12:44:15(130.34.95.28)	SiN	2008/11/26/14:5:2(130.34.95.28)
-27	0	4	6898	Kirita	dummy	2	2008/11/25/12:44:38(130.34.95.28)	SiN	2008/11/26/14:5:16(130.34.95.28)
-25	45	48	6898	Kirita	dummy	0	2008/11/25/14:10:41(130.34.95.43)	0	2008/11/25/22:27:41(130.34.95.28)
-27	19	28	7122	akiyama	dummy	2	2008/11/25/17:24:18(130.34.75.252)	3Ti-->Cu	2008/11/25/17:24:51(130.34.75.252)
27	20	34	6936	Matsuzaki	dummy	0	2008/11/25/18:48:1(130.34.95.43)	0
25	45	47	6898	Kirita	dummy	0	2008/11/25/14:10:41(130.34.95.43)	0
26	21	24	6909	takeshita	dummy	0	2008/11/26/10:27:56(172.16.44.146)	Ir
28	26	30	3586	itasaka	dummy	2	2008/11/26/12:50:13(130.34.95.17)	Ti を#2に移動
-27	34	46	7122	akiyama	dummy	0	2008/11/26/14:48:28(130.34.198.5)	Cuがついていれば使用します。キャンセルの可能性あります。	2008/11/27/16:6:15(130.34.75.252)
26	38	46	7122	akiyama	dummy	0	2008/11/26/16:11:53(130.34.75.252)	Cu
28	31	45	4771	PHAN	dummy	0	2008/11/26/17:3:44(130.34.95.21)	0
-28	18	26	6937	kumagae	dummy	0	2008/11/26/17:24:1(130.34.95.43)	Ti	2008/11/26/17:26:43(130.34.95.43)
-27	0	14	6898	Kirita	dummy	2	2008/11/26/17:42:30(130.34.95.28)	SiN 使用後戻します	2008/11/26/19:24:22(130.34.95.28)
26	46	48	7122	akiyama	dummy	0	2008/11/26/20:27:16(130.34.198.5)	Cu
28	16	25	7281	date	dummy	0	2008/11/27/8:28:6(130.34.77.72)	sio2
27	34	35	7122	akiyama	dummy	0	2008/11/26/14:48:28(130.34.198.5)	Cuがついていれば使用します。キャンセルの可能性あります。
-29	28	38	7122	akiyama	dummy	0	2008/11/27/16:36:48(130.34.75.252)	Cu	2008/11/28/19:19:28(130.34.75.252)
29	36	48	6909	noriki	dummy	2	2008/11/28/21:45:10(130.34.95.37)	ta/cu
29	24	35	6908	konno	dummy	0	2008/11/29/9:20:41(172.16.44.146)	SiO2
30	34	42	6968	inomata	dummy	0	2008/11/29/19:45:4(130.34.88.130)	SiO2
-30	6	24	6909	noriki	dummy	2	2008/11/29/21:35:3(172.16.44.146)	ti/cu	2008/11/29/21:37:26(172.16.44.146)
30	6	18	6909	noriki	dummy	2	2008/11/29/21:37:47(172.16.44.146)	ti
-30	18	34	6909	kanno	dummy	0	2008/11/29/21:38:20(172.16.44.146)	Cu	2008/11/30/11:26:9(172.16.44.146)
30	45	48	6936	honjoya	dummy	0	2008/11/30/3:1:3(130.34.95.43)	Ti/SiO2
30	18	25	6909	kanno	dummy	0	2008/11/29/21:38:20(172.16.44.146)	Cu
30	42	45	6936	honjoya	dummy	0	2008/11/30/19:47:57(130.34.95.43)	Ti/SiO2