-3 30 42 6936 江 Honjoya dummy 2 2007/8/17/15:41:50(130.34.95.43) Al 2007/8/17/15:46:35(130.34.95.43) -2 30 42 6936 江 Honjoya dummy 2 2007/8/17/15:47:29(130.34.95.43) Cr/Au 2007/8/17/15:47:46(130.34.95.43) 3 24 42 6936 江 Honjoya dummy 2 2007/8/17/15:49:2(130.34.95.43) Cr/Au Al 両面 -1 30 42 6909 Kobayasi Risato dummy 0 2007/8/30/20:35:13(130.34.95.37) Cr/Au 2007/8/31/21:54:54(130.34.95.37) -3 12 24 6909 fujiwara dummy 2 2007/8/30/21:43:9(172.16.44.141) 0 2007/9/1/16:28:25(172.16.44.141) 1 18 30 6421 T.BABA dummy 2 2007/8/31/7:15:44(130.34.248.180) Au/Al 1 0 6 6909 satou dummy 0 2007/8/31/20:39:45(172.16.44.141) Cu/Ta 1 6 18 6909 komiya dummy 0 2007/9/1/1:31:38(172.16.44.141) Cu/Ta -1 36 48 6909 fujiwara dummy 0 2007/9/1/16:26:42(172.16.44.141) 0 2007/9/1/16:26:50(172.16.44.141) -1 36 48 6909` fujiwara dummy 2 2007/9/1/16:27:1(172.16.44.141) 0 2007/9/1/16:27:27(172.16.44.141) -1 36 48 6909 fujiwara dummy 2 2007/9/1/16:27:40(172.16.44.141) 0 2007/9/1/16:28:58(172.16.44.141) -3 18 24 6909 fujiwara dummy 0 2007/9/1/16:28:52(172.16.44.141) Cr/Au 2007/9/1/16:29:22(172.16.44.141) 1 36 48 6909 fujiwara dummy 0 2007/9/1/16:29:13(172.16.44.141) Cr/Au -3 12 24 6909 fujiwara dummy 0 2007/9/1/16:29:48(172.16.44.141) Cu?Ta 2007/9/1/16:29:57(172.16.44.141) -3 12 24 6909 fu dummy 0 2007/9/1/16:30:5(172.16.44.141) 0 2007/9/1/16:30:8(172.16.44.141) 3 12 24 6909 fujiwara dummy 2 2007/9/1/16:30:28(172.16.44.141) Ta/Cu 2 36 48 6421 T.BABA dummy 2 2007/9/2/18:50:42(130.34.248.180) 2:Ta-->Al -3 0 6 6421 T.BABA dummy 0 2007/9/2/21:32:52(130.34.248.180) Cr,Au,Al 2007/9/2/21:39:40(130.34.248.180) -3 42 48 6936 Honjoya dummy 0 2007/9/3/14:6:18(130.34.95.43) 21時半頃終了予定 2007/9/3/16:0:52(130.34.95.43) -3 42 48 6936 Honjoya dummy 0 2007/9/3/16:1:18(130.34.95.43) 0 2007/9/3/16:1:44(130.34.95.43) 3 42 48 6936 Honjoya dummy 0 2007/9/3/16:2:13(130.34.95.43) Cr/Au Al 4 30 36 6968 Hirota dummy 0 2007/9/3/17:43:32(130.34.95.15) Cr/Au -4 24 30 6968 Azuma dummy 0 2007/9/3/18:10:31(130.34.95.15) Cr/Au 2007/9/4/11:14:33(130.34.95.15) -4 36 48 6909 fujiwara dummy 2 2007/9/3/22:13:33(130.34.95.37) Ta/Cu 2007/9/3/22:17:18(130.34.95.37) 5 0 18 6909 fujiwara dummy 2 2007/9/3/22:17:15(130.34.95.37) Ta/Cu 　低圧、長時間スパッタのため 4 36 48 6909 komiya dummy 2 2007/9/3/22:39:9(172.16.44.141) Cu/Ta 4 0 6 6968 Hirota dummy 0 2007/9/4/0:22:57(130.34.95.15) Cr/Au 4 24 25 6968 Azuma dummy 0 2007/9/3/18:10:31(130.34.95.15) Cr/Au 5 30 36 6968 A.Asakura dummy 1 2007/9/4/21:13:40(130.34.95.15) ターゲットホルダーの錆び取り 5 18 24 6909 fujiwara dummy 0 2007/9/5/7:56:42(172.16.44.137) Ta/Cu 6 30 42 6936 Kasuga dummy 2 2007/9/5/12:33:31(130.34.95.43) Ta/Pt -5 42 48 6937 k.hirano dummy 0 2007/9/5/17:2:39(130.34.95.43) 0 2007/9/5/17:2:58(130.34.95.43) -5 42 48 6937 k.hirano dummy 0 2007/9/5/17:3:32(130.34.95.43) Cr/Cu/Au 2007/9/5/17:14:5(130.34.95.43) 5 36 42 6937 k.hirano dummy 0 2007/9/5/17:14:46(130.34.95.43) Cr/Cu/Au 5 42 48 6937 k.hirano dummy 0 2007/9/5/17:20:28(130.34.95.43) Cr/Cu/Au -7 24 30 6909 fujiwara dummy 0 2007/9/6/12:2:54(130.34.95.37) 0 2007/9/6/12:2:59(130.34.95.37) -7 24 30 6909 fujiwara dummy 0 2007/9/6/12:3:21(130.34.95.37) Cr/Au 2007/9/6/12:3:26(130.34.95.37) 6 24 30 6909 fujiwara dummy 0 2007/9/6/12:3:49(130.34.95.37) Cr/Au 6 42 48 6936 Kasuga dummy 0 2007/9/6/19:1:44(130.34.95.43) Ta/Pt 7 0 6 6909 fujiwara dummy 0 2007/9/6/20:54:20(172.16.44.136) Au 7 18 24 6909 noriki dummy 0 2007/9/7/2:14:31(130.34.95.37) Cr/Au 8 12 24 7281 date dummy 2 2007/9/7/19:18:8(130.34.77.72) Ti/Pt -8 24 30 4249 yamakawa dummy 0 2007/9/8/9:17:45(130.34.77.72) 0 2007/9/8/9:17:55(130.34.77.72) 8 24 30 7281 yamakawa dummy 0 2007/9/8/9:18:36(130.34.77.72) 0 -10 24 36 6936 川口 dummy 0 2007/9/8/16:48:2(130.34.95.43) Cr/Au 2007/9/8/16:49:13(130.34.95.43) -11 24 36 6936 kawaguchi dummy 0 2007/9/8/16:50:24(130.34.95.43) Cr/Au 2007/9/8/16:50:38(130.34.95.43) -10 24 36 6936 kawaguchi dummy 0 2007/9/8/16:51:2(130.34.95.43) 0 2007/9/8/16:55:47(130.34.95.43) 10 24 36 6936 kawaguchi dummy 2 2007/9/8/16:56:19(130.34.95.43) Cr/Au -10 36 42 6945 murase dummy 0 2007/9/9/13:44:31(130.34.95.48) 0 2007/9/9/13:44:52(130.34.95.48) 10 36 42 6945 murase dummy 0 2007/9/9/13:45:11(130.34.95.48) Cr/Au 11 18 24 6909 Kobayashi Risato dummy 0 2007/9/10/8:18:26(172.16.44.141) Cr/Au 10 42 48 6937 kashu dummy 0 2007/9/10/12:7:44(130.34.95.8) Cr/Au 11 36 42 6909 fujiwara dummy 0 2007/9/10/15:18:23(130.34.95.37) Cr/Au 11 24 30 6898 Hirosaki_university Hirano dummy 0 2007/9/10/17:39:2(130.34.95.28) Cr/Au 11 30 36 6898 settsu dummy 0 2007/9/10/17:39:32(130.34.95.28) Cr/Au 11 42 48 6936 kawaguchi dummy 0 2007/9/10/18:36:24(130.34.95.43) Cr/Au 12 12 24 7281 date dummy 2 2007/9/10/18:58:13(130.34.77.72) SiO2 12 42 48 6898 hirano dummy 0 2007/9/12/18:6:33(172.16.44.137) Cr/Au 13 0 6 6937 ゆき dummy 0 2007/9/12/22:40:18(130.34.95.43) 0 -13 30 36 6909 fujiwara dummy 0 2007/9/13/10:51:19(172.16.44.137) Cr/Au 2007/9/13/12:16:36(172.16.44.137) 13 24 30 6909 fujiwara dummy 0 2007/9/13/12:16:56(172.16.44.137) 0 14 18 30 6937 Takahashi Tomokazu dummy 2 2007/9/13/12:47:23(130.34.95.43) 1. Au, 2. Cr- > Pt, 3. Ti -> Ta -14 42 48 4404 SW LEE dummy 0 2007/9/13/16:29:34(130.34.248.169) 1.Au, 2.Al, 3.Ti 2007/9/14/13:14:50(130.34.248.169) 13 42 48 6965 R.Ito dummy 0 2007/9/13/17:16:27(130.34.95.43) Cr/Au 14 6 12 6898 hirano dummy 0 2007/9/13/20:26:23(130.34.95.43) Cr/Au 14 12 18 6898 sawajiri dummy 0 2007/9/14/5:47:52(172.16.44.137) Cr/Au -14 30 42 6937 T.Ito dummy 0 2007/9/14/9:58:10(130.34.95.43) Ta 2007/9/14/10:26:27(130.34.95.43) -15 24 30 6909 fujiwara dummy 2 2007/9/14/10:28:2(172.16.44.137) Au 2007/9/14/10:28:12(172.16.44.137) -15 24 30 6909 fujiwara dummy 0 2007/9/14/10:29:4(172.16.44.137) Au 2007/9/15/12:12:7(172.16.44.141) -14 30 42 4404 SW LEE dummy 0 2007/9/14/13:14:42(130.34.248.169) 1.Au, 2.Al, 3.Ti 2007/9/14/13:27:1(130.34.248.169) 14 30 42 4404 SW LEE dummy 0 2007/9/14/13:28:18(130.34.248.169) 1. Au 2. Pt, 3. Ti 14 42 48 6937 Andrew dummy 0 2007/9/14/21:39:57(130.34.95.43) Cr/Au 15 0 6 6937 Andrew dummy 0 2007/9/14/21:40:22(130.34.95.43) Cr/Au 15 6 18 6937 Andrew dummy 2 2007/9/15/3:37:26(130.34.95.43) Cr/Au 15 24 27 6909 fujiwara dummy 0 2007/9/14/10:29:4(172.16.44.137) Au 15 30 36 6909 fujiwara dummy 0 2007/9/15/12:12:52(172.16.44.141) Cr/Au 15 36 42 6965 R.Ito dummy 0 2007/9/15/16:7:26(130.34.95.43) Cr/Au 15 42 48 6965 R.Ito dummy 0 2007/9/15/21:1:36(172.16.44.137) Au 16 24 30 6909 fujiwara dummy 0 2007/9/16/10:47:42(172.16.44.136) 0 -17 24 30 6937 haruzono dummy 0 2007/9/17/9:29:0(130.34.95.43) Cr/Au 2007/9/17/10:2:16(130.34.95.43) 17 30 36 6937 haruzono dummy 0 2007/9/17/11:25:48(130.34.95.43) 0 -19 6 18 7281 date dummy 2 2007/9/17/20:39:25(130.34.77.72) SiO2 2007/9/18/19:1:46(130.34.77.72) 19 18 24 6937 Faizul dummy 0 2007/9/18/17:23:56(130.34.95.43) Cr/Au 19 24 36 6937 Takahashi Tomokazu dummy 2 2007/9/18/21:46:59(130.34.95.43) 1. Cr -> Pt, 2. Au, 3. Ti -> Ta -19 36 42 4771 Miyashita dummy 2 2007/9/19/12:23:38(130.34.89.180) 1. Cr, 2. Au -> Al, 3. Ta 2007/9/19/13:56:10(130.34.89.180) -21 18 30 6936 Honjoya dummy 2 2007/9/19/19:10:34(130.34.95.43) Cr/Pt/Au 2007/9/20/23:10:1(130.34.95.43) 20 36 42 6937 Takahashi Tomokazu dummy 0 2007/9/19/22:22:26(130.34.95.51) 0 -21 42 48 6937 Andrew dummy 0 2007/9/20/1:0:20(130.34.95.43) Cr/Au 2007/9/21/6:27:6(130.34.95.43) 20 42 48 5318 Toru Ikoma dummy 0 2007/9/20/13:35:36(130.34.231.209) Au -21 0 6 5318 Sano dummy 0 2007/9/20/13:36:12(130.34.231.209) Au 2007/9/20/21:6:22(172.16.44.137) 20 30 36 5318 Toru Ikoma dummy 0 2007/9/20/13:45:30(130.34.231.209) Au -21 30 36 6909 Kobayasi Risato dummy 0 2007/9/20/17:32:22(130.34.95.37) 0 2007/9/21/12:22:27(172.16.44.137) 21 12 24 6937 Andrew dummy 2 2007/9/21/6:26:53(130.34.95.43) Target Change Cr/Au 21 24 30 6909 kanno soichiro dummy 0 2007/9/21/12:13:42(172.16.44.137) Cr/Au 21 30 36 6909 Kobayashi Risato dummy 0 2007/9/21/12:23:7(172.16.44.137) Cr/Au 21 42 48 6937 Takahashi Tomokazu dummy 2 2007/9/21/17:24:15(130.34.95.43) 1.Cr -> Pt, 2.Au, 3. Ta 22 0 6 6937 Takahashi Tomokazu dummy 2 2007/9/21/17:24:52(130.34.95.43) 0 22 30 42 6909 fujiwara dummy 2 2007/9/22/14:7:59(130.34.95.37) Cr/Au 1.Pt→Cr, 2.Au, 3.Ta 24 18 24 6937 Faizul dummy 0 2007/9/23/13:57:38(130.34.95.43) Cr/Au 24 24 30 6937 faizul dummy 0 2007/9/24/10:15:43(172.16.44.137) Cr/Au 25 24 36 6937 Takahashi Tomokazu dummy 2 2007/9/24/19:3:29(130.34.95.43) 1. Cr -> Pt, 2. Au, 3. Ta 25 0 6 6898 hirano dummy 0 2007/9/24/22:3:48(172.16.44.137) Cr/Au -26 42 48 6936 Kasuga dummy 2 2007/9/25/9:3:32(130.34.95.43) 3.Ta->Cr 2007/9/26/18:19:46(130.34.95.43) -28 18 24 6936 Kasuga dummy 0 2007/9/25/9:4:11(130.34.95.43) Cr/Pt/Au 一晩真空引きしてからスパッタします。 2007/9/25/9:4:22(130.34.95.43) -27 18 24 6936 Kasuga dummy 0 2007/9/25/9:4:47(130.34.95.43) Cr/Pt/Au 一晩真空引きしてからスパッタします。 2007/9/26/18:19:58(130.34.95.43) -27 0 18 6936 Kasuga dummy 1 2007/9/25/9:5:31(130.34.95.43) 真空引き 2007/9/26/18:20:5(130.34.95.43) 27 24 30 6937 haruzono dummy 0 2007/9/25/9:17:51(130.34.95.51) Cr/Au 25 36 48 6937 kashu dummy 2 2007/9/25/11:16:18(130.34.95.8) Cr/Au 1.Pt, 2.Au, 3.Ta->Cr 26 24 36 7281 date dummy 2 2007/9/25/12:45:12(130.34.77.72) target2>SiO2 26 18 24 6937 T.Ito dummy 0 2007/9/25/13:52:37(130.34.95.43) Cr 27 30 36 4771 T.Sano dummy 2 2007/9/25/14:3:43(130.34.89.180) 1.Cr, 2.Pt->Al, 3.Au 28 24 36 6936 Honjoya dummy 2 2007/9/25/15:37:46(130.34.95.43) Cr/Pt/Au 27 36 42 6968 azuma dummy 0 2007/9/25/17:55:50(130.34.95.15) Cr/Au 27 42 48 6937 T.Ito dummy 2 2007/9/26/11:5:54(130.34.95.43) Al->Ti 28 18 24 6937 T.Ito dummy 0 2007/9/26/11:8:9(130.34.95.43) 前日より真空引き Ti -29 0 24 6909 fujiwara dummy 2 2007/9/26/20:21:13(130.34.95.37) Ta/Cu 高アスペクト比サンプル、長時間スパッタのため 2007/9/26/20:21:56(130.34.95.37) -29 0 24 6909 fujiwara dummy 0 2007/9/26/20:23:20(130.34.95.37) Ta/Cu 高アスペクト比サンプルの長時間スパッタのため。０-３時で使いたい方はご相談ください。 2007/9/26/20:23:41(130.34.95.37) 29 0 24 6909 fujiwara dummy 2 2007/9/26/20:24:45(130.34.95.37) Ta/Cu 高アスペクト比サンプル、長時間スパッタ。0-3時で使用されたい方はご相談ください。 -29 24 30 6936 Kasuga dummy 0 2007/9/27/11:34:33(130.34.95.43) Ta/Pt 2007/9/27/11:40:11(130.34.95.43) 28 36 48 6936 Kasuga dummy 2 2007/9/27/11:46:29(130.34.95.43) 1.Cr->Ta -29 24 36 6937 Y.G. JIANG dummy 0 2007/9/28/11:27:13(130.34.95.43) 0 2007/9/28/11:27:42(130.34.95.43) 29 24 36 6937 Y.G. JIANG dummy 2 2007/9/28/11:28:30(130.34.95.43) Cr-Au -29 36 42 6937 kashu dummy 0 2007/9/28/17:7:42(130.34.95.43) Cr/Au 2007/9/29/16:42:41(130.34.95.8) -29 42 48 6909 noriki dummy 0 2007/9/29/12:20:10(172.16.44.137) Cr/Au 2007/9/29/19:14:49(130.34.95.37) -30 30 36 6937 kashu dummy 0 2007/9/29/16:46:53(130.34.95.8) Cr/Au 2007/9/30/14:32:21(130.34.95.8) 30 24 30 6909 fujiwara dummy 0 2007/9/30/10:32:28(130.34.95.37) Cr/Au 30 36 42 6937 kashu dummy 0 2007/9/30/14:32:15(130.34.95.8) Cr/Au 30 30 32 6937 kashu dummy 0 2007/9/29/16:46:53(130.34.95.8) Cr/Au