1 18 22 6936 Kasuga dummy 0 2007/2/28/15:12:55(130.34.95.43) 0 1 30 38 6937 ゆき dummy 0 2007/2/28/17:55:17(130.34.95.43) Au/Cr （2回） 1 24 30 6968 A.Asakura dummy 1 2007/2/28/19:26:37(130.34.95.15) 代替RF電源交換 -1 38 44 6936 Kasuga dummy 0 2007/3/1/11:0:39(130.34.95.43) 1.Cr->Ti, 2.Au->Pt 2007/3/1/14:2:32(130.34.95.43) 1 38 44 6936 Kasuga dummy 0 2007/3/1/14:3:33(130.34.95.43) 3.Al->Cu 2 38 44 6936 Kasuga dummy 0 2007/3/1/14:4:32(130.34.95.43) 1.Cr->Ti, 2.Au->Pt 2 33 38 6936 Kasuga dummy 0 2007/3/2/16:21:12(130.34.95.43) 1.Cr->Ti, 3.Cu->Pt 2 44 48 6937 haruzono dummy 0 2007/3/2/16:35:36(130.34.95.43) Ti/Pt 3 34 42 4830 三浦研　Sasaki dummy 0 2007/3/2/17:6:29(130.34.95.30) Cr/Cu 6 28 32 6936 Kasuga dummy 0 2007/3/3/14:51:15(130.34.95.43) 1.Ti->Ta rate check -6 32 38 6937 yuki dummy 0 2007/3/5/16:32:31(130.34.95.43) Cr/Au 2007/3/5/20:59:43(130.34.95.43) -5 40 46 6937 hashimoto dummy 0 2007/3/5/17:17:12(130.34.95.43) Cr/Au 2007/3/5/17:27:3(130.34.95.43) 5 36 40 6937 HASHIMOTO dummy 0 2007/3/5/17:26:38(130.34.95.43) Cr/Au 7 20 26 6937 haruzono dummy 0 2007/3/5/19:44:50(130.34.95.43) 1.Cr>Ti,2.Cu>Pt 6 26 28 6936 Kasuga dummy 0 2007/3/5/20:33:2(130.34.95.43) 0 -6 38 42 6936 Kasuga dummy 0 2007/3/5/20:39:3(130.34.95.43) 3.Au->Pt 2007/3/6/17:43:33(130.34.95.43) 6 35 37 6968 A.Asakura dummy 1 2007/3/6/17:39:40(172.16.44.131) 旧RFコントローラ回収 -6 40 46 6936 kikuchi dummy 0 2007/3/6/18:7:18(130.34.95.43) Cr 2007/3/6/21:7:20(130.34.95.43) 6 40 45 6936 kikuchi dummy 0 2007/3/6/18:7:18(130.34.95.43) Cr 7 32 36 6936 Kasuga dummy 0 2007/3/7/13:18:21(130.34.95.43) 0 -10 32 38 6937 Song dummy 0 2007/3/9/17:33:38(130.34.95.43) 0 2007/3/10/10:22:58(130.34.95.43) 10 21 26 6937 Song dummy 0 2007/3/10/10:22:48(130.34.95.43) 0 10 26 30 6937 Song dummy 0 2007/3/10/12:7:21(130.34.95.43) 0 12 32 38 6937 Faizul dummy 0 2007/3/12/15:10:59(130.34.95.43) Cr/Au Sputter 14 34 40 6937 Andrew dummy 0 2007/3/14/16:33:22(130.34.95.43) Cr/Au 12 38 46 6937 Faizul dummy 0 2007/3/14/16:59:11(130.34.95.43) 0 14 40 48 6937 Faizul dummy 0 2007/3/14/17:0:8(130.34.95.43) Cr/Au Sputter 15 26 32 6936 kasuga dummy 0 2007/3/15/9:31:56(130.34.95.43) 2.Cr->Pt -15 34 38 6937 Y.G Jiang dummy 0 2007/3/15/14:14:17(130.34.95.43) 0 2007/3/15/14:15:16(130.34.95.43) 15 34 38 6937 Y.G JIANG dummy 0 2007/3/15/14:15:54(130.34.95.43) Pt 15 38 42 6937 Jan dummy 0 2007/3/15/14:19:22(130.34.95.43) Cr/Au overtime 16 0 24 6937 Nissan Kayaku/Jan dummy 0 2007/3/15/22:12:12(172.16.44.210) super shinku 15 46 48 6937 Jan/NIssan dummy 0 2007/3/15/22:12:42(172.16.44.210) shinku 21 22 28 6937 Y.G JIANG dummy 0 2007/3/16/9:10:39(130.34.95.43) 0 20 38 44 6937 hashimoto dummy 0 2007/3/16/16:35:18(130.34.95.43) 0 19 26 32 6937 hashimoto dummy 0 2007/3/18/22:59:29(130.34.95.43) Cr/Au -19 32 34 6937 hashimoto dummy 0 2007/3/19/11:56:23(130.34.95.43) 0 2007/3/19/13:43:14(130.34.95.43) 19 33 39 6937 hashimoto dummy 0 2007/3/19/15:54:40(130.34.95.43) Cr/Au 20 30 36 6936 Kentaro IWAMI dummy 0 2007/3/20/14:32:34(130.34.95.43) Cr/Au 20 44 48 6937 Hashimoto dummy 0 2007/3/20/17:59:12(130.34.95.43) Ti/Al 25 36 42 6936 kikuchi dummy 0 2007/3/25/15:0:58(130.34.95.43) Cr/Au 29 18 24 6937 inaba dummy 0 2007/3/28/13:33:57(130.34.95.43) 0 28 36 44 6937 Y.G JIANG dummy 0 2007/3/28/16:26:38(130.34.95.43) 0 29 32 38 6937 yuki dummy 0 2007/3/29/15:47:26(130.34.95.43) Cr / Au ,Cr / Cu / Au 29 38 40 6937 ゆき dummy 0 2007/3/29/18:3:39(130.34.95.43) 0