1 34 38 6937 tsato dummy 0 2007/2/1/15:41:1(130.34.95.43) 0 1 38 42 6937 tsato dummy 0 2007/2/1/18:56:16(130.34.95.43) 0 2 34 40 6937 Kashu dummy 0 2007/2/2/10:34:12(130.34.95.8) 0 -2 40 44 6937 Kashu dummy 0 2007/2/2/16:38:6(130.34.95.8) 0 2007/2/2/18:8:52(130.34.95.43) 2 42 48 6937 yuki dummy 0 2007/2/2/18:9:19(130.34.95.43) 0 -5 28 34 6936 kikuchi dummy 0 2007/2/4/17:27:18(130.34.95.43) 0 2007/2/4/17:39:48(130.34.95.43) 5 32 38 6936 kikuchi dummy 0 2007/2/4/17:40:8(130.34.95.43) 0 5 29 32 6936 kikuchi dummy 0 2007/2/5/14:25:17(172.16.44.132) 0 7 28 38 6936 kikuchi dummy 0 2007/2/5/18:20:26(130.34.95.43) 0 5 42 48 6937 Andrew dummy 0 2007/2/5/21:15:37(130.34.95.43) 0 6 28 35 6937 Faizul dummy 0 2007/2/6/12:39:30(130.34.95.43) Cr/Au Sputter 7 38 44 6937 Song dummy 0 2007/2/7/13:5:3(130.34.95.43) 0 7 44 48 6937 Kashu dummy 0 2007/2/7/14:47:33(130.34.95.8) 0 8 26 32 6937 yuki dummy 0 2007/2/7/20:49:57(130.34.95.43) 0 8 0 4 6937 kashu dummy 0 2007/2/7/23:14:3(130.34.95.8) 0 8 40 46 6937 Faizul dummy 0 2007/2/8/11:30:0(130.34.95.43) Cr/Au Sputter -8 32 36 6937 yuki dummy 0 2007/2/8/13:43:13(130.34.95.43) 0 2007/2/8/13:43:41(130.34.95.43) 8 32 36 6937 yuki dummy 0 2007/2/8/13:44:2(130.34.95.43) Cr / Cu / Au -10 40 46 6937 Song dummy 0 2007/2/8/15:54:49(130.34.95.43) Cr 2007/2/8/15:55:16(130.34.95.43) 9 40 46 6937 Song dummy 0 2007/2/8/15:55:6(130.34.95.43) Cr 9 34 38 6937 Song dummy 0 2007/2/8/23:42:34(130.34.95.43) Cr -13 30 36 6937 Jan dummy 0 2007/2/9/15:15:7(130.34.95.43) Al (tabun Ti) 2007/2/13/11:25:40(130.34.95.43) 14 30 36 6937 Jan dummy 0 2007/2/9/15:16:40(130.34.95.43) Al (Ti) 14 38 42 6937 Jan dummy 0 2007/2/9/15:17:5(130.34.95.43) Al (Ti) 14 42 46 6937 Jan dummy 0 2007/2/9/15:17:19(130.34.95.43) Al/Ti 9 38 40 6937 Song dummy 0 2007/2/9/17:1:20(130.34.95.43) 0 10 18 24 6937 Andrew dummy 0 2007/2/10/9:32:28(130.34.95.43) 0 10 32 37 6937 Faizul dummy 0 2007/2/10/15:49:50(130.34.95.43) Cr/Au Sputter 12 27 33 6937 Kashu dummy 0 2007/2/12/13:13:3(130.34.95.8) Cr/Au 13 30 36 6937 Jan dummy 0 2007/2/13/13:15:15(130.34.95.43) Target Change Al+Ti and Ti sputter-rate check 15 30 34 6937 Jan dummy 0 2007/2/13/13:16:2(130.34.95.43) Al+Ti 15 34 38 6937 yuki dummy 0 2007/2/13/16:25:51(130.34.95.43) Cr / Au 15 40 46 6937 yuki dummy 0 2007/2/13/16:26:25(130.34.95.43) Cr / Au 13 36 40 6937 Jan dummy 0 2007/2/13/17:54:42(172.16.44.210) Ti 14 6 18 6937 Andrew dummy 0 2007/2/14/3:9:35(130.34.95.43) Cr/Au 15 0 4 6968 A.Asakura dummy 0 2007/2/14/21:50:29(130.34.95.15) Target Change Al→Au Cr/Au 14 46 48 6968 A.Asakura dummy 0 2007/2/14/22:9:40(130.34.95.15) Target Change Al→Au Cr/Au 15 22 24 6968 A.Asakura dummy 0 2007/2/15/10:42:54(130.34.95.15) Target Change Au→Al 15 24 30 6937 Jan dummy 0 2007/2/15/11:1:54(130.34.95.43) Ti/Al -21 26 32 6937 Jan dummy 0 2007/2/15/15:45:12(130.34.95.43) Ti/Al 2007/2/17/17:47:49(172.16.44.131) -21 36 40 6937 Jan dummy 0 2007/2/15/15:45:35(130.34.95.43) Ti/Al 2007/2/17/17:47:58(172.16.44.131) -22 26 30 6937 Jan dummy 0 2007/2/15/15:46:6(130.34.95.43) Ti/al 2007/2/21/13:7:43(130.34.95.43) -22 42 46 6937 Jan dummy 0 2007/2/15/15:46:30(130.34.95.43) Ti/Al 2007/2/21/13:8:1(130.34.95.43) -16 20 26 6937 Jan dummy 0 2007/2/15/23:1:52(130.34.95.43) Al+Ti 2007/2/16/3:35:45(130.34.95.43) 16 7 11 6937 Jan dummy 0 2007/2/16/3:35:38(130.34.95.43) Ti+Al -17 4 10 6937 Andrew dummy 0 2007/2/17/1:8:34(130.34.95.43) Cr/Au 2007/2/17/3:11:2(130.34.95.43) 17 4 9 6937 Andrew dummy 0 2007/2/17/1:8:34(130.34.95.43) Cr/Au 17 10 16 6937 Andrew dummy 0 2007/2/17/4:41:32(130.34.95.43) Cr/a 17 30 44 6937 Jan dummy 0 2007/2/17/11:45:6(130.34.95.43) Ti, Al 19 38 42 6937 Kurahashi dummy 0 2007/2/17/16:55:43(130.34.95.43) Al -19 32 38 6937 Jan dummy 0 2007/2/17/17:47:33(172.16.44.131) Cr/Au 50/350 nm 2007/2/19/11:45:45(130.34.95.43) -22 30 34 6937 Jan dummy 0 2007/2/17/17:48:31(172.16.44.131) Al/Ti 2007/2/21/13:7:58(130.34.95.43) 19 32 38 6937 yuki dummy 0 2007/2/19/15:29:36(130.34.95.43) 0 -20 22 28 6937 yuki dummy 0 2007/2/19/17:49:8(130.34.95.43) 0 2007/2/19/17:49:22(130.34.95.43) 20 22 28 6937 yuki dummy 0 2007/2/19/17:49:46(130.34.95.43) Cr / Au 19 42 44 6937 Kurahashi dummy 0 2007/2/19/19:3:15(130.34.95.43) Al 20 28 34 6936 kikuchi dummy 0 2007/2/20/11:24:1(130.34.95.43) Ti/Pt/Au -23 18 26 6937 T.Ohno@MREC dummy 0 2007/2/20/14:55:49(172.16.44.249) 0 2007/2/23/4:37:37(130.34.95.43) -21 38 44 6937 Jan dummy 0 2007/2/20/16:45:4(130.34.95.43) Ti/Al JEOL EB test 2007/2/21/13:7:38(130.34.95.43) 20 34 35 6936 kikuchi dummy 0 2007/2/20/16:52:44(172.16.44.132) 0 -23 26 33 6937 H.Kikuchi dummy 0 2007/2/21/8:28:40(130.34.95.43) 0 2007/2/23/14:15:52(130.34.95.43) 21 26 30 6937 haruzono dummy 0 2007/2/21/9:9:48(130.34.95.43) Ti/Pt 22 38 44 6937 Jan dummy 0 2007/2/21/13:8:16(130.34.95.43) Ti/Al 23 38 44 6937 Jan dummy 0 2007/2/21/13:8:42(130.34.95.43) Ti/Al -24 38 44 6937 Jan dummy 0 2007/2/21/13:9:2(130.34.95.43) Ti/Al 2007/2/23/18:47:12(130.34.95.43) 21 30 34 6937 haruzono dummy 0 2007/2/21/14:38:23(172.16.44.132) Ti/Pt -22 0 5 6937 Kashu dummy 0 2007/2/21/18:29:15(130.34.95.8) 0 2007/2/21/18:29:35(130.34.95.8) -22 0 5 6937 Kashu dummy 0 2007/2/21/18:29:57(130.34.95.8) Ti/Au 2007/2/21/22:20:14(130.34.95.8) -22 33 37 6937 hashimoto dummy 0 2007/2/22/11:6:49(130.34.95.43) 0 2007/2/22/12:37:34(130.34.95.43) 22 26 30 6937 haruzono dummy 0 2007/2/22/11:8:10(130.34.95.43) 0 22 44 46 6937 Jan dummy 0 2007/2/22/20:30:39(130.34.95.43) dext 23 33 38 6937 T.Ohno@MREC dummy 0 2007/2/22/23:0:17(172.16.44.249) 0 23 26 31 6937 H.Kikuchi dummy 0 2007/2/21/8:28:40(130.34.95.43) 0 23 32 33 6937 H.Kikuchi dummy 0 2007/2/23/14:17:48(130.34.95.43) 0 23 44 46 6937 Jan dummy 0 2007/2/23/18:44:1(130.34.95.43) extended -27 38 44 6937 Jan dummy 0 2007/2/23/18:48:13(130.34.95.43) Al 1 micron 2007/2/27/13:3:43(130.34.95.43) -28 26 34 4830 三浦研　Nobuki Ueta dummy 0 2007/2/23/20:47:24(130.34.95.30) 0 2007/2/28/11:8:5(130.34.95.30) 26 30 34 6937 yuki dummy 0 2007/2/26/11:10:41(130.34.95.43) 0 26 38 42 6937 yuki dummy 0 2007/2/26/11:11:17(130.34.95.43) 0 26 26 30 6936 kasuga dummy 0 2007/2/26/11:23:5(130.34.95.43) Cr/Au 27 30 48 6937 Jan dummy 1 2007/2/27/13:4:15(130.34.95.43) Replace RF unit and test 28 32 41 6937 Jan dummy 0 2007/2/28/14:58:30(172.16.44.131) Al 1 um 28 44 48 6937 yuki dummy 0 2007/2/28/15:12:50(130.34.95.43) Cr / Au → Ti / Pt