3	36	48	7359	Yamamoto	dummy	0	2007/11/29/4:16:24(130.34.95.43)	Cr/Au
-1	18	30	6898	hirano	dummy	2	2007/11/29/12:19:29(130.34.95.28)	SiN	2007/11/29/12:19:58(130.34.95.28)
1	0	12	6898	hirano	dummy	2	2007/11/29/12:21:32(130.34.95.28)	SiN
1	12	18	6898	kirita	dummy	0	2007/11/29/12:22:1(130.34.95.28)	SiN
-1	30	42	6909	jeong	dummy	2	2007/11/29/14:45:46(172.16.44.137)	Cr/Au	2007/12/1/14:21:18(130.34.95.37)
4	18	48	6936	Kawai Y	dummy	1	2007/11/29/15:48:56(130.34.95.43)	0
5	0	42	6936	Kawai Y	dummy	1	2007/11/29/15:50:9(130.34.95.43)	Shibaura2号機　納入
3	18	36	7359	伊藤	dummy	0	2007/11/29/16:47:38(172.16.44.137)	Cr/Au
1	18	24	6898	hirano	dummy	0	2007/11/30/13:54:10(130.34.95.28)	SiN
1	24	30	6898	kirita	dummy	0	2007/11/30/13:55:30(130.34.95.28)	SiN
1	30	31	6909	jeong	dummy	2	2007/11/29/14:45:46(172.16.44.137)	Cr/Au
2	24	36	6909	jeong	dummy	2	2007/12/1/15:44:6(130.34.95.37)	Cr/Au
-5	42	48	6937	Kurahashi	dummy	0	2007/12/2/7:28:43(130.34.95.43)	SiN	2007/12/5/5:24:11(130.34.95.43)
4	0	18	4771	miyashita	dummy	0	2007/12/3/14:32:17(130.34.89.180)	0
6	24	36	6421	T.BABA	dummy	2	2007/12/3/16:18:2(130.34.123.164)	Al.Au
6	36	42	6421	T.BABA	dummy	0	2007/12/3/16:19:47(130.34.123.164)	0
7	24	36	6898	settsu	dummy	2	2007/12/3/16:40:58(130.34.95.28)	W
-6	18	24	6937	Kurahashi	dummy	0	2007/12/3/16:50:16(130.34.95.43)	SiN	2007/12/5/22:17:43(130.34.95.43)
7	12	24	7281	date	dummy	2	2007/12/3/17:0:21(130.34.77.72)	SiO2
-5	42	48	6937	Kurahashi	dummy	0	2007/12/5/5:24:53(130.34.95.43)	W	2007/12/5/20:56:6(130.34.95.43)
-6	0	6	6937	Kurahashi	dummy	0	2007/12/5/17:43:50(130.34.95.43)	W	2007/12/5/22:17:40(130.34.95.43)
7	36	48	6909	noriki	dummy	0	2007/12/5/17:58:51(130.34.95.37)	Ta
-8	0	6	6909	noriki	dummy	0	2007/12/5/17:59:25(130.34.95.37)	Ta	2007/12/7/23:0:3(172.16.44.136)
5	42	44	6937	Kurahashi	dummy	0	2007/12/5/5:24:53(130.34.95.43)	W
8	18	30	6968	Narumi	dummy	0	2007/12/7/0:53:54(130.34.95.15)	SiO2
7	0	12	6937	Y.G. JIANG	dummy	0	2007/12/7/0:54:53(130.34.95.43)	Cr-Au
-10	18	30	6909	yamada	dummy	0	2007/12/7/14:31:57(130.34.95.37)	0	2007/12/7/14:38:58(130.34.95.37)
-10	18	30	6909	yamada	dummy	0	2007/12/7/14:39:17(130.34.95.37)	Ta/Cu	2007/12/10/9:25:3(172.16.44.136)
9	24	30	7281	date	dummy	0	2007/12/7/15:26:0(130.34.77.72)	Ti/Pt
10	30	42	7281	date	dummy	0	2007/12/7/15:26:32(130.34.77.72)	SiO2
10	42	48	4771	Miyashita	dummy	0	2007/12/7/22:47:25(130.34.89.180)	SiO2
-12	0	12	4771	Miyashita	dummy	1	2007/12/7/23:1:16(130.34.89.180)	Al	2007/12/10/23:26:33(130.34.89.180)
11	24	36	6898	settsu	dummy	0	2007/12/8/11:32:19(130.34.95.28)	W
11	36	42	6898	sanker	dummy	0	2007/12/8/11:32:49(130.34.95.28)	W
12	18	30	6936	kawaguchi	dummy	0	2007/12/8/13:29:25(130.34.95.43)	Au/Cr
9	6	12	6968	Narumi	dummy	0	2007/12/9/1:46:33(130.34.95.15)	SiO2
12	30	42	6909	fujiwara	dummy	0	2007/12/9/12:15:42(130.34.95.37)	Ta/Au
9	30	36	7281	date	dummy	0	2007/12/9/14:20:20(130.34.77.72)	Ti/Pt
10	18	21	6909	yamada	dummy	0	2007/12/7/14:39:17(130.34.95.37)	Ta/Cu
11	12	24	6909	yamada	dummy	0	2007/12/10/9:28:41(172.16.44.136)	Ta/Cu
-11	42	48	6937	Tsukamoto	dummy	0	2007/12/10/14:10:21(130.34.95.43)	Au/Cr	2007/12/10/14:11:0(130.34.95.43)
13	0	12	4830	jeong.SC	dummy	0	2007/12/10/17:22:5(130.34.95.30)	Cr/Au
13	18	30	6968	A.Asakura	dummy	0	2007/12/10/19:16:27(130.34.95.15)	Cr/Au
14	18	30	6968	A.Asakura	dummy	0	2007/12/10/19:16:48(130.34.95.15)	Cr/Au
11	0	6	4771	Miyashita	dummy	0	2007/12/10/20:26:13(130.34.95.43)	SiO2
-13	30	42	6936	kasuga	dummy	0	2007/12/10/20:26:54(130.34.95.43)	Ta/Pt	2007/12/11/11:59:54(130.34.95.43)
-14	30	36	4771	Miyashita	dummy	0	2007/12/11/5:18:8(130.34.89.180)	0	2007/12/11/5:18:50(130.34.89.180)
11	42	48	4771	Miyashita	dummy	0	2007/12/11/5:19:10(130.34.89.180)	0
12	0	6	4771	Miyashita	dummy	1	2007/12/11/5:19:33(130.34.89.180)	Au/Cr
13	36	48	6936	kasuga	dummy	0	2007/12/11/12:1:31(130.34.95.43)	1.Al, 2.Ta, 3.Pt
-14	36	42	6936	kasuga	dummy	0	2007/12/11/12:2:7(130.34.95.43)	Al	2007/12/11/13:6:43(130.34.95.43)
12	42	48	6909	komiya	dummy	0	2007/12/11/17:35:28(130.34.95.37)	Al
13	30	36	6937	Andrew	dummy	0	2007/12/12/1:11:32(130.34.95.43)	Cr/Au
14	0	12	6937	Kurahashi	dummy	0	2007/12/12/9:8:6(130.34.95.43)	SiN
13	12	18	6937	Kurahashi	dummy	0	2007/12/12/9:10:21(130.34.95.43)	W
14	30	42	6909	satou	dummy	0	2007/12/12/11:46:29(130.34.95.37)	Pt
-14	12	18	6937	Tomokazu Takahashi	dummy	0	2007/12/12/16:26:8(130.34.95.43)	1.SiN 2.Ta 3. Pt	2007/12/13/15:23:32(130.34.95.43)
-17	24	36	6965	Miura	dummy	0	2007/12/12/23:15:41(130.34.95.43)	Cr	2007/12/14/17:19:52(130.34.95.31)
16	18	30	6937	Tomokazu Takahashi	dummy	0	2007/12/13/11:4:59(130.34.95.43)	Ta/Pt
17	0	6	6937	Tomokazu Takahashi	dummy	0	2007/12/13/11:6:45(130.34.95.43)	Ta/Pt/Au
-14	42	48	6965	Miura	dummy	0	2007/12/13/12:2:56(130.34.95.31)	Cr	2007/12/13/12:3:12(130.34.95.31)
-17	42	48	6937	Kashu	dummy	0	2007/12/13/16:56:27(130.34.95.8)	Cr/Au	2007/12/17/12:16:35(130.34.95.8)
14	42	48	6968	azuma	dummy	0	2007/12/14/13:36:42(130.34.95.15)	Cr/Au
-15	18	24	6421	T.BABA	dummy	0	2007/12/14/14:2:42(130.34.248.180)	0	2007/12/14/17:34:26(130.34.248.180)
15	30	42	6909	komiya	dummy	0	2007/12/14/17:1:15(130.34.95.37)	SiN
15	42	48	6909	satou	dummy	0	2007/12/14/17:2:41(130.34.95.37)	Cu/Ta
16	30	36	6421	T.BABA	dummy	0	2007/12/14/17:35:38(130.34.248.180)	0
15	0	12	6937	Tomokazu Takahashi	dummy	0	2007/12/14/17:44:57(130.34.95.43)	1. Pt 2. Al 3. Au
-15	24	30	6968	azuma	dummy	0	2007/12/14/18:40:18(130.34.95.15)	Cr/Au	2007/12/14/18:40:45(130.34.95.15)
-15	18	30	6968	azuma	dummy	0	2007/12/14/18:41:4(130.34.95.15)	Cr/Au	2007/12/14/22:8:50(130.34.95.15)
18	30	42	6909	satou	dummy	0	2007/12/14/19:14:4(172.16.44.137)	Pt/Cr
-17	30	42	6909	komiya	dummy	0	2007/12/14/19:15:19(172.16.44.137)	SiN	2007/12/15/17:21:31(172.16.44.137)
-18	0	6	6968	narumi	dummy	0	2007/12/16/12:33:6(130.34.95.15)	Cr/Au	2007/12/17/15:0:36(130.34.95.15)
-16	42	48	6937	Tsukamoto	dummy	0	2007/12/16/16:13:38(130.34.95.43)	Au/Cr	2007/12/16/16:14:1(130.34.95.43)
16	36	42	6937	Tomokazu Takahashi	dummy	0	2007/12/16/16:53:34(130.34.95.43)	Ta/Pt/Ta
17	24	36	6965	Miura	dummy	0	2007/12/17/7:44:37(130.34.95.31)	Cr
-17	36	42	6937	Kashu	dummy	0	2007/12/17/12:17:35(130.34.95.8)	0	2007/12/17/14:13:17(130.34.95.8)
-19	18	24	6421	T.BABA	dummy	0	2007/12/17/13:38:55(130.34.248.180)	0	2007/12/18/10:8:21(130.34.248.180)
17	36	42	6937	Kashu	dummy	0	2007/12/17/14:13:38(130.34.95.8)	Cr/Au
18	42	48	6937	Kashu	dummy	0	2007/12/17/14:50:22(130.34.95.8)	Cr/Au
17	42	48	6968	narumi	dummy	0	2007/12/17/15:0:25(130.34.95.15)	Cr/Au
-19	42	48	4771	Miyashita	dummy	0	2007/12/17/17:21:51(130.34.89.180)	Cr/Au	2007/12/19/17:19:13(130.34.89.180)
-19	0	12	6937	Kurahashi	dummy	0	2007/12/18/1:14:37(130.34.95.43)	SiN	2007/12/18/22:58:17(130.34.95.43)
18	24	30	6421	T.BABA	dummy	0	2007/12/18/10:8:10(130.34.248.180)	0
19	30	42	6909	komiya	dummy	2	2007/12/18/14:19:29(130.34.95.37)	Cu/Ta
-19	18	30	6937	Kurahashi	dummy	0	2007/12/18/14:33:24(130.34.95.43)	W	2007/12/18/22:58:35(130.34.95.43)
19	0	12	6937	Kurahashi	dummy	0	2007/12/18/22:58:31(130.34.95.43)	W
19	18	30	6937	Kurahashi	dummy	0	2007/12/18/22:58:46(130.34.95.43)	SiN
19	12	18	6937	Kurahashi	dummy	1	2007/12/19/5:26:57(130.34.95.43)	0
-20	6	12	6937	Kashu	dummy	0	2007/12/19/9:19:9(130.34.95.8)	Cr/Au	2007/12/19/19:51:45(130.34.95.8)
20	24	36	6937	kawasaki	dummy	0	2007/12/19/14:16:46(130.34.95.43)	Gd
20	12	18	4771	Miyashita	dummy	0	2007/12/19/17:37:21(130.34.89.180)	Cr/Au
20	42	48	6898	Hirosaki_university  kirita	dummy	2	2007/12/19/18:24:57(130.34.95.28)	SiN
21	0	6	6898	Hirosaki_university  kirita	dummy	0	2007/12/19/18:25:26(130.34.95.28)	SiN
-20	0	6	6937	Kashu	dummy	2	2007/12/19/19:1:12(130.34.95.8)	3.Cu --> Au	2007/12/19/19:51:36(130.34.95.8)
20	6	12	4771	Miyashita	dummy	0	2007/12/19/20:59:27(130.34.89.180)	0
21	36	42	6968	A.Asakura	dummy	0	2007/12/20/4:11:23(130.34.95.15)	Cr/Au
21	6	18	6968	narumi	dummy	0	2007/12/20/17:4:28(130.34.95.15)	SiO2
21	18	30	6898	kirita	dummy	0	2007/12/20/22:2:19(130.34.95.28)	SiN
-21	30	36	6898	settu	dummy	0	2007/12/21/11:47:6(172.16.44.137)	0	2007/12/21/14:21:20(172.16.44.137)
23	24	30	6421	T.BABA	dummy	0	2007/12/21/12:54:17(130.34.248.180)	0
21	30	31	6898	settu	dummy	0	2007/12/21/11:47:6(172.16.44.137)	0
-23	30	42	6937	kawasaki	dummy	0	2007/12/21/16:7:10(130.34.95.43)	0	2007/12/21/16:8:35(130.34.95.43)
21	42	48	6968	A.Asakura	dummy	0	2007/12/21/17:14:34(130.34.95.15)	0
22	0	6	4771	Miyashita	dummy	0	2007/12/21/20:31:44(172.16.44.137)	Au/Cr
22	18	30	6965	Miura	dummy	2	2007/12/22/3:5:36(130.34.95.31)	Cr,Auを#2へ移動
-23	30	42	6937	Tomokazu Takahashi	dummy	2	2007/12/22/7:49:18(130.34.95.43)	1.Ta 2.Pt	2007/12/23/12:52:49(130.34.94.149)
-24	0	12	6937	kawasaki	dummy	0	2007/12/22/8:48:31(130.34.95.43)	0	2007/12/22/8:49:5(130.34.95.43)
-25	0	6	6937	kawasaki	dummy	0	2007/12/22/8:49:37(130.34.95.43)	Gd	2007/12/22/8:49:58(130.34.95.43)
-25	0	12	6937	kawasaki	dummy	0	2007/12/22/8:51:7(130.34.95.43)	Gd	2007/12/22/11:52:34(130.34.95.43)
-24	42	48	6937	kawasaki	dummy	0	2007/12/22/11:53:3(130.34.95.43)	0	2007/12/23/16:6:33(130.34.95.43)
-25	0	6	6937	kawasaki	dummy	0	2007/12/22/11:53:18(130.34.95.43)	0	2007/12/23/16:7:4(130.34.95.43)
22	36	42	7281	date	dummy	2	2007/12/22/18:21:9(130.34.77.72)	Ti/Pt
23	12	24	7281	date	dummy	2	2007/12/22/21:38:21(130.34.77.72)	SiO2
23	30	36	6937	Tomokazu Takahashi	dummy	0	2007/12/23/12:53:44(130.34.94.149)	Ta/Pt/Ta/SiO2
24	30	42	6909	fujiwara	dummy	2	2007/12/23/13:13:56(172.16.44.141)	Ta/Cu
24	12	24	6968	narumi	dummy	0	2007/12/23/15:29:34(130.34.95.15)	Pt
25	36	48	6909	noriki	dummy	2	2007/12/23/15:47:38(172.16.44.136)	Ta/Cu
24	42	48	6937	kawasaki	dummy	0	2007/12/23/16:6:49(130.34.95.43)	Gd
25	0	6	6937	kawasaki	dummy	0	2007/12/23/16:7:24(130.34.95.43)	Gd
23	42	48	4771	Miyashita	dummy	0	2007/12/23/21:20:13(172.16.44.137)	SiO2
25	6	12	6937	kawasaki	dummy	0	2007/12/24/22:25:25(172.16.44.137)	Gd
26	24	30	6421	sasaki	dummy	0	2007/12/25/16:48:51(130.34.123.164)	0
26	36	42	6421	sasaki	dummy	0	2007/12/26/11:42:15(130.34.123.164)	0
-27	24	36	6909	komiya	dummy	2	2007/12/26/14:11:2(172.16.44.141)	SiN	2007/12/26/20:30:47(130.34.95.37)
26	42	48	6421	sasaki	dummy	0	2007/12/26/14:49:3(130.34.123.164)	0
27	30	42	6909	komiya	dummy	0	2007/12/27/14:19:56(172.16.44.141)	0
29	24	30	6909	fujiwara	dummy	0	2007/12/28/17:45:15(130.34.95.37)	Ta/Cu
29	30	36	6909	fujiwara	dummy	0	2007/12/29/12:9:46(130.34.95.37)	Ta/Cu
-30	30	36	6909	ki	dummy	0	2007/12/30/11:32:49(172.16.44.141)	0	2007/12/30/11:32:54(172.16.44.141)
30	30	36	6909	ki	dummy	0	2007/12/30/11:33:12(172.16.44.141)	Ta/Cu