3 24 36 7897 浅井　Takagaki dummy 0 2007/9/28/11:16:46(130.34.95.13) 0 1 24 30 6898 settsu dummy 0 2007/9/28/21:33:37(130.34.95.28) Cr -1 30 36 4771 Miyashita dummy 2 2007/10/1/10:0:51(130.34.89.180) SiO2 2007/10/1/10:1:30(130.34.89.180) -1 30 36 4771 Miyashita dummy 2 2007/10/1/10:2:21(130.34.89.180) 1.Cu ,2.Au ->Al ,3.Cr ->SiO2 2007/10/1/13:34:32(130.34.89.180) -1 36 42 4771 Miyashita dummy 0 2007/10/1/10:2:56(130.34.89.180) Al 2007/10/1/13:33:33(130.34.89.180) -2 24 30 4771 Miyashita dummy 0 2007/10/1/13:30:45(130.34.89.180) SiO2 2007/10/1/20:36:55(172.16.44.137) 1 30 36 4771 Miyashita dummy 2 2007/10/1/13:36:35(130.34.89.180) 1.Cu->SiO2 ,2.Au->Al ,3.Cr -4 24 30 6898 settsu dummy 2 2007/10/1/15:38:0(130.34.95.28) 3. Cr → W 2007/10/3/16:50:23(130.34.95.28) -4 30 36 6898 settsu dummy 0 2007/10/1/15:38:29(130.34.95.28) W@200℃ 2007/10/3/16:50:12(130.34.95.28) 1 42 48 4771 Al dummy 0 2007/10/1/16:24:32(130.34.89.180) 0 1 36 42 4771 Miyashita dummy 0 2007/10/1/17:49:34(130.34.89.180) Al -5 24 36 6937 kashu dummy 2 2007/10/1/18:3:14(130.34.95.8) Au/Cr 3. W-->r 2007/10/1/18:3:28(130.34.95.8) -5 24 36 6937 kashu dummy 1 2007/10/1/18:4:4(130.34.95.8) Cr/Au 3.W ->Cr 2007/10/1/18:4:12(130.34.95.8) -5 24 36 6937 kashu dummy 2 2007/10/1/18:4:33(130.34.95.8) Cr/Au 3.W ->Cr 2007/10/5/12:36:36(130.34.95.8) 2 18 24 4771 Miyashita dummy 0 2007/10/1/20:37:18(172.16.44.137) SiO2 2 12 18 4771 Miyashita dummy 0 2007/10/2/3:5:48(172.16.44.137) SiO2 2 42 48 6937 Kurahashi dummy 0 2007/10/2/17:34:50(130.34.95.43) SiN -4 42 48 6936 Kasuga dummy 2 2007/10/2/20:28:24(130.34.95.43) 1.SiO2->Au, 2.Al->Pt, 3.W->Cr 2007/10/4/19:57:38(130.34.95.43) -5 18 24 6936 Kasuga dummy 0 2007/10/2/20:29:24(130.34.95.43) 前日から真空引きCr/Pt/Au 2007/10/4/19:58:3(130.34.95.43) -5 0 18 6936 Kasuga dummy 1 2007/10/2/20:29:49(130.34.95.43) 真空引き 2007/10/4/19:57:49(130.34.95.43) 3 12 24 6937 Faizul dummy 0 2007/10/2/20:37:12(130.34.94.170) Cr/Au -3 42 48 6936 Kasuga dummy 2 2007/10/2/21:31:35(130.34.95.43) 1.SiO2->Au, 2.Al->Pt 2007/10/3/20:47:4(130.34.95.43) -4 18 24 6936 Kasuga dummy 0 2007/10/2/21:32:8(130.34.95.43) Cr/Pt/Au 一晩真空引きしてからスパッタします。 2007/10/3/20:47:19(130.34.95.43) -4 0 18 6936 Kasuga dummy 1 2007/10/2/21:32:44(130.34.95.43) 真空引き 2007/10/3/20:47:11(130.34.95.43) 5 36 48 5318 Ikoma Toru dummy 0 2007/10/3/20:2:51(130.34.231.209) Au,W,Al -6 24 36 5318 Toru Ikoma dummy 0 2007/10/3/20:3:27(130.34.231.209) Au,W,Al 2007/10/6/2:36:20(172.16.44.137) 3 42 44 6936 Kasuga dummy 2 2007/10/2/21:31:35(130.34.95.43) 1.SiO2->Au, 2.Al->Pt 4 24 36 6909 noriki dummy 2 2007/10/3/21:4:16(130.34.95.37) Ta/Cu 5 24 28 6937 kashu dummy 2 2007/10/1/18:4:33(130.34.95.8) Cr/Au 3.W ->Cr -6 36 48 5318 Sano dummy 0 2007/10/5/14:22:12(130.34.231.209) Au/W/Al 2007/10/5/21:43:10(172.16.44.137) -7 18 24 6936 Kasuga dummy 0 2007/10/5/15:47:38(130.34.95.43) Cr/Pt/Au 一晩真空引きしてからスパッタします。 2007/10/5/15:50:6(130.34.95.43) 7 24 36 7897 Takagaki dummy 2 2007/10/5/16:48:24(130.34.95.13) 2.W→Cu -6 12 24 6909 noriki dummy 2 2007/10/5/19:57:36(130.34.95.37) 0 2007/10/5/19:57:46(130.34.95.37) -6 12 24 6909 noriki dummy 2 2007/10/5/19:58:14(130.34.95.37) Ta/Cu 2007/10/5/20:24:41(130.34.95.37) -8 24 36 6909 noriki dummy 2 2007/10/5/20:25:6(130.34.95.37) Ta/Cu 2007/10/8/11:11:14(130.34.95.37) 6 0 6 5318 Sano dummy 0 2007/10/5/21:44:58(172.16.44.137) Al 6 36 48 6936 Kasuga dummy 2 2007/10/6/12:33:5(130.34.95.43) 1.Au, 2.Al>Pt, 3.W->Cr 7 18 24 6936 Kasuga dummy 0 2007/10/6/12:33:41(130.34.95.43) Cr/Pt/Au 一晩真空引きしてからスパッタします。 7 0 18 6936 Kasuga dummy 1 2007/10/6/12:34:22(130.34.95.43) 真空引き 8 12 24 6937 Faizul dummy 0 2007/10/6/13:30:16(130.34.94.170) Cr/Au -8 36 48 6937 関 dummy 2 2007/10/6/15:53:57(130.34.95.43) Pt 2007/10/7/23:51:32(130.34.95.43) -9 18 30 6937 kihara dummy 2 2007/10/7/13:0:44(130.34.95.43) Al 2007/10/7/13:27:28(130.34.95.43) -10 18 24 6937 kihara dummy 2 2007/10/7/13:38:29(130.34.95.43) Au,Ti,Al 2007/10/9/9:27:16(130.34.95.43) -10 24 36 6936 kihara dummy 0 2007/10/7/13:39:52(130.34.95.43) deposition 2007/10/9/9:27:20(130.34.95.43) 8 24 25 6909 noriki dummy 2 2007/10/5/20:25:6(130.34.95.37) Ta/Cu -10 36 42 6937 kihara dummy 2 2007/10/9/9:28:54(130.34.95.43) Au,Ti,Al 2007/10/9/10:41:44(130.34.95.43) -10 42 48 6937 kihara dummy 0 2007/10/9/9:29:19(130.34.95.43) Au/Ti deposition 2007/10/9/10:41:57(130.34.95.43) 11 0 18 6936 kihara dummy 0 2007/10/9/9:30:52(130.34.95.43) 真空引き　for Al deposition 11 18 24 6936 kihara dummy 0 2007/10/9/9:31:25(130.34.95.43) Al deposition -12 18 30 6936 kihara dummy 2 2007/10/9/9:37:58(130.34.95.43) Au/Ti depo 2007/10/9/10:39:29(130.34.95.43) -9 30 42 6909 noriki dummy 2 2007/10/9/9:49:7(130.34.95.37) Ta 2007/10/9/17:39:41(172.16.44.136) 10 42 48 6936 kihara dummy 2 2007/10/9/10:42:29(130.34.95.43) Au,Ti,Al 9 24 30 6937 Faizul dummy 0 2007/10/9/10:42:35(130.34.95.43) Cr/Au 11 24 30 6936 kihara dummy 0 2007/10/9/10:43:30(130.34.95.43) Au/Ti deposition -11 30 36 4404 SW LEE dummy 0 2007/10/9/11:18:1(130.34.248.169) 1. Au 2.Ti 3.Al 2007/10/11/14:21:31(130.34.248.169) 10 18 24 6937 T.Ito dummy 0 2007/10/9/14:7:21(130.34.95.43) Ta 10 36 42 6937 Tsai dummy 0 2007/10/9/16:11:22(130.34.95.43) Cr 10 24 30 6909 noriki dummy 0 2007/10/9/17:21:46(130.34.95.37) Ta 9 30 38 6909 noriki dummy 2 2007/10/9/9:49:7(130.34.95.37) Ta 10 30 36 6937 shao dummy 0 2007/10/9/19:58:6(130.34.95.43) Cr/Au 11 36 48 7897 Takagaki dummy 2 2007/10/9/20:38:1(130.34.95.13) 2.Ti>Cu,3.Al>SiO2 9 42 48 6909 fujiwara dummy 0 2007/10/9/21:19:24(130.34.95.37) Cr/Au 12 0 6 7897 Takagaki dummy 0 2007/10/10/13:3:54(130.34.95.13) Cu/SiO2 12 24 36 6909 Kobayasi Risato dummy 2 2007/10/10/17:53:2(130.34.95.37) 1.Au 2.Cu 3.SiO2>Cr 12 36 48 6937 T.Ito dummy 2 2007/10/11/13:55:51(130.34.95.43) Cu->W 11 30 31 4404 SW LEE dummy 0 2007/10/9/11:18:1(130.34.248.169) 1. Au 2.Ti 3.Al 12 12 24 4404 SW LEE dummy 0 2007/10/11/14:26:10(130.34.248.169) 1. Au 2.Ti 3.Al 14 18 30 6937 Faizul dummy 0 2007/10/11/14:48:40(130.34.95.43) Cr/Au 14 30 48 6936 kihara dummy 2 2007/10/11/14:55:56(130.34.95.43) 1Au 2.W->Al 3.Cr -15 24 30 6937 shao dummy 0 2007/10/11/14:56:46(172.16.44.137) 0 2007/10/11/14:57:2(172.16.44.137) 15 24 30 6937 shao dummy 0 2007/10/11/14:57:50(172.16.44.137) Cr/Au 15 30 36 6968 A.Asakura dummy 0 2007/10/11/16:28:44(130.34.95.15) Cr/Au 16 24 30 6968 A.Asakura dummy 0 2007/10/11/16:29:7(130.34.95.15) Cr/Au -15 36 42 6936 Honjoya dummy 0 2007/10/11/17:27:38(130.34.95.43) Cr/Au 2007/10/13/9:12:1(130.34.95.43) 13 24 36 6909 noriki dummy 2 2007/10/11/21:55:59(130.34.95.37) Ta -16 30 36 6936 kihara dummy 0 2007/10/12/12:31:11(130.34.95.43) Al/Au 2007/10/12/12:37:23(130.34.95.43) 16 30 42 6936 kihara dummy 0 2007/10/12/12:37:43(130.34.95.43) Al/Au -13 18 24 6909 Kobayashi Risato dummy 0 2007/10/12/13:48:28(172.16.44.137) Cr/Au 2007/10/13/0:57:12(172.16.44.137) 13 36 48 6909 komiya dummy 2 2007/10/12/20:5:28(172.16.44.141) Ta/Cu 16 42 48 6909 noriki dummy 2 2007/10/12/23:6:11(130.34.95.37) Ta 17 0 12 6909 noriki dummy 0 2007/10/12/23:8:29(130.34.95.37) Ta 14 0 12 6936 Honjoya dummy 2 2007/10/13/9:10:52(130.34.95.43) Cr/Au 15 36 48 6936 kawaguchi dummy 0 2007/10/13/17:32:19(130.34.95.43) Cr/Au -16 18 24 6909 ki dummy 2 2007/10/15/11:57:44(130.34.95.37) Ta/cu 2007/10/15/11:58:6(130.34.95.37) -16 18 24 6909 ki dummy 2 2007/10/15/11:58:33(130.34.95.37) Ta/cu 2007/10/16/8:48:32(172.16.44.136) -17 12 24 6968 azuma dummy 2 2007/10/15/13:46:54(130.34.95.15) Cr/Au 2007/10/15/22:56:43(130.34.95.15) -16 0 18 4771 Miyashita dummy 0 2007/10/15/14:8:11(130.34.89.180) Cr 2007/10/15/18:43:41(130.34.89.180) 18 12 24 6937 Faizul dummy 0 2007/10/15/14:59:7(130.34.95.43) Cr/Au 17 12 24 6968 azuma dummy 2 2007/10/15/22:57:14(130.34.95.15) SiO -19 24 36 6968 azuma dummy 2 2007/10/15/22:58:42(130.34.95.15) Cr/Au 2007/10/19/9:37:25(130.34.95.48) 18 24 30 6936 kawaguchi dummy 0 2007/10/15/23:12:35(130.34.95.43) Au/Cr 17 24 36 6909 ki dummy 2 2007/10/16/8:48:26(172.16.44.136) Ta/Cu 16 18 20 6909 ki dummy 2 2007/10/15/11:58:33(130.34.95.37) Ta/cu 17 36 48 6968 A.Asakura dummy 2 2007/10/16/13:56:27(130.34.95.15) Cr/Au 両面 18 30 36 6936 kawaguchi dummy 0 2007/10/16/16:20:47(130.34.95.43) Au/Cr 18 36 48 6909 komiya dummy 2 2007/10/16/18:14:24(130.34.95.37) Cu 18 0 6 6968 A.Asakura dummy 0 2007/10/17/2:25:1(130.34.95.15) Cr/Au 19 18 24 6936 Honjoya dummy 0 2007/10/17/3:41:53(130.34.95.43) Cr/Au 19 0 12 6968 hirota dummy 2 2007/10/18/0:55:34(130.34.95.15) Cr/Au -19 12 18 6945 murase dummy 0 2007/10/18/1:42:10(130.34.95.48) 0 2007/10/18/1:42:27(130.34.95.48) 19 12 18 6945 murase dummy 0 2007/10/18/1:42:44(130.34.95.48) Au/Cr -19 36 42 6937 Yoshida dummy 0 2007/10/18/1:57:25(130.34.95.43) Au 2007/10/18/12:15:10(130.34.95.43) -19 30 36 6909 fujiwara dummy 0 2007/10/19/10:17:44(130.34.95.37) Cr/Au 2007/10/19/10:22:36(130.34.95.37) -19 42 48 6909 fujiwara dummy 0 2007/10/19/10:23:6(130.34.95.37) 0 2007/10/19/10:23:10(130.34.95.37) 19 42 48 6909 fujiwara dummy 0 2007/10/19/10:23:40(130.34.95.37) Cr/Au -22 36 48 6909 komiya ken dummy 2 2007/10/20/4:10:10(130.34.95.37) Au⇒Ta/Cu 2007/10/20/4:10:30(130.34.95.37) -22 36 48 6909 komiya ken dummy 2 2007/10/20/4:11:0(130.34.95.37) Cr⇒Ta/Cu 2007/10/22/21:0:11(172.16.44.136) -21 24 36 6421 T.BABA dummy 2 2007/10/20/16:3:11(130.34.248.180) Al,Au 2007/10/21/9:54:38(130.34.248.180) -21 30 42 6421 T.BABA dummy 2 2007/10/21/9:55:17(130.34.248.180) 1.Cu->Al 2007/10/21/12:11:31(130.34.248.180) 22 30 36 6945 murase dummy 0 2007/10/22/12:1:3(130.34.95.48) Au/Cr -23 0 6 6937 Kurahashi dummy 0 2007/10/22/18:35:52(130.34.95.43) SiN 2007/10/22/18:41:48(130.34.95.43) 23 24 36 6937 Kurahashi dummy 2 2007/10/22/18:43:0(130.34.95.43) SiN 23 36 48 6421 T.BABA dummy 2 2007/10/22/18:54:44(130.34.248.180) 1.Cu-> Al 24 12 24 6937 Faizul dummy 0 2007/10/22/20:42:14(130.34.95.43) Cr/Au 22 36 44 6909 komiya ken dummy 2 2007/10/20/4:11:0(130.34.95.37) Cr⇒Ta/Cu -24 24 30 6936 Honjoya dummy 0 2007/10/23/15:40:41(130.34.95.43) Cr/Au 2007/10/23/16:20:8(130.34.95.43) -25 24 36 6936 Honjoya dummy 0 2007/10/23/16:19:53(130.34.95.43) Cr/Au 2007/10/23/21:40:51(130.34.95.43) 24 6 12 7281 date dummy 0 2007/10/23/17:53:51(130.34.77.72) Cr/Au 25 36 48 6937 Kurahashi dummy 2 2007/10/23/18:42:30(130.34.95.43) SiN 24 24 30 6968 narumi dummy 0 2007/10/23/19:40:57(130.34.95.15) Cr/Au -29 24 36 6936 Honjoya dummy 2 2007/10/24/8:45:33(130.34.95.43) Cr/Au 2007/10/24/8:46:14(130.34.95.43) -29 24 36 6936 Honjoya dummy 0 2007/10/24/8:47:0(130.34.95.43) Cr/Au 2007/10/24/12:58:22(130.34.95.43) -24 30 36 6936 kawaguchi dummy 0 2007/10/24/11:23:13(130.34.95.43) 0 2007/10/24/11:23:24(130.34.95.43) 24 30 36 6936 kawaguchi dummy 0 2007/10/24/11:23:45(130.34.95.43) Cr/Au 30 24 36 6936 Honjoya dummy 0 2007/10/24/12:59:19(130.34.95.43) Cr/Au 24 36 42 6936 kawaguchi dummy 0 2007/10/24/15:57:29(130.34.95.43) Au/Cr 26 6 18 7281 date dummy 2 2007/10/25/16:43:4(130.34.77.72) Ti/Pt -26 24 30 6936 Kentaro IWAMI dummy 2 2007/10/25/17:1:15(130.34.95.43) ZnO 2007/10/25/17:1:38(130.34.95.43) 26 24 36 6936 Kentaro IWAMI dummy 2 2007/10/25/17:1:59(130.34.95.43) ZnO 26 36 48 6937 Tsukamoto dummy 2 2007/10/26/11:7:3(130.34.95.43) Au/Cr 28 36 42 6909 komiya dummy 0 2007/10/27/15:35:28(130.34.95.37) Au/Cr 27 36 42 6909 fujiwara dummy 0 2007/10/27/16:11:46(130.34.95.37) Cr/Au 27 42 48 6909 fujiwara dummy 0 2007/10/27/20:39:50(172.16.44.137) Au 30 42 48 6909 komiya dummy 0 2007/10/29/17:14:56(172.16.44.141) Cr/Au 30 6 18 7281 date dummy 2 2007/10/29/20:53:20(130.34.77.72) target3>SiO2 -30 36 42 7359 akao dummy 0 2007/10/30/14:7:23(130.34.64.185) 0 2007/10/30/14:13:23(130.34.64.185) 30 36 42 7359 AKAO dummy 0 2007/10/30/14:13:44(130.34.64.185) Cr/Au