-2	26	30	6937	hino	dummy	0	2009/11/1/23:44:55(130.34.94.145)	0	2009/11/1/23:45:5(130.34.94.145)
-2	26	30	6937	hino	dummy	0	2009/11/1/23:45:20(130.34.94.145)	Mo@300℃	2009/11/2/11:48:25(130.34.95.43)
-2	28	32	6937	hino	dummy	0	2009/11/2/11:48:40(130.34.95.43)	Mo@300℃	2009/11/2/13:17:18(130.34.95.43)
2	28	29	6937	hino	dummy	0	2009/11/2/11:48:40(130.34.95.43)	Mo@300℃
2	30	34	6937	hino	dummy	0	2009/11/2/13:17:51(130.34.95.43)	Mo@330℃
5	36	42	6937	M.Moriyama	dummy	0	2009/11/5/17:3:2(130.34.95.43)	Pt@550℃
-10	30	38	6937	akiyama	dummy	0	2009/11/6/10:19:28(130.34.95.43)	0	2009/11/6/10:20:36(130.34.95.43)
-9	30	38	6937	akiyama	dummy	0	2009/11/6/10:21:27(130.34.95.43)	Ti, Pt@600C	2009/11/6/10:22:2(130.34.95.43)
-10	30	38	6937	akiyama	dummy	0	2009/11/6/10:22:41(130.34.95.43)	Ti, Pt@600C	2009/11/6/17:59:50(130.34.95.43)
7	34	48	6937	M.Moriyama	dummy	1	2009/11/6/19:9:18(130.34.95.43)	チャンバークリーニング　吉田先生承認
-8	0	48	6937	M.Moriyama	dummy	0	2009/11/6/19:10:2(130.34.95.43)	チャンバーベーク	2009/11/6/19:10:9(130.34.95.43)
8	0	48	6937	M.Moriyama	dummy	1	2009/11/6/19:10:35(130.34.95.43)	チャンバーベーク
9	0	20	6937	M.Moriyama	dummy	1	2009/11/6/19:11:5(130.34.95.43)	チャンバーベーク
10	36	42	6937	M.Moriyama	dummy	0	2009/11/10/16:12:24(130.34.95.43)	Pt@550℃
13	35	41	6937	M.Moriyama	dummy	0	2009/11/13/16:9:15(130.34.95.43)	Pt@550℃
17	34	42	6937	M.Moriyama	dummy	0	2009/11/17/16:22:10(130.34.95.43)	Pt@550℃
19	38	48	6936	Haubold	dummy	1	2009/11/19/11:7:7(130.34.95.43)	target change to Ta / Au
20	0	20	6936	Haubold	dummy	1	2009/11/19/11:7:44(130.34.95.43)	change target
20	20	34	6937	Haubold	dummy	0	2009/11/19/11:10:8(130.34.95.43)	3 x Au / Ta
-25	32	38	6936	Haubold	dummy	0	2009/11/20/9:58:30(130.34.95.43)	Ta / Au @ RT	2009/11/25/9:53:34(130.34.95.43)
20	34	38	6937	Haubold	dummy	0	2009/11/20/11:39:23(130.34.95.44)	Ta Au 
-23	30	40	6937	kim,park	dummy	0	2009/11/23/0:23:14(130.34.95.43)	Pt@600	2009/11/23/13:23:15(130.34.95.43)
23	36	44	6937	kim,lee	dummy	0	2009/11/23/13:23:54(130.34.95.43)	Pt@550
24	16	22	6937	kim	dummy	0	2009/11/23/22:18:21(130.34.95.43)	Pt@600
24	22	26	6937	kim	dummy	0	2009/11/24/9:47:13(130.34.95.44)	0
-26	34	40	6937	Haubold	dummy	0	2009/11/25/9:53:30(130.34.95.43)	Ta + Au	2009/11/26/12:41:48(130.34.95.43)
-30	26	34	6937	akiyama	dummy	0	2009/11/25/20:38:48(130.34.95.43)	0	2009/11/30/14:23:32(130.34.95.43)
26	36	48	5810	y.yoshida	dummy	1	2009/11/26/14:36:31(130.34.95.49)	target change; Mo -> Ti
-27	0	18	5810	y.yoshida	dummy	1	2009/11/26/14:37:11(130.34.95.49)	target change Mo -> Ti	2009/11/26/14:37:45(130.34.95.49)
27	0	20	5810	y.yoshida	dummy	1	2009/11/26/14:39:8(130.34.95.49)	target change Mo -> Ti
27	20	30	5810	y.yoshida	dummy	0	2009/11/26/14:41:35(130.34.95.49)	Ti/Pt
-27	30	40	5810	y.yoshida	dummy	0	2009/11/27/12:26:21(130.34.95.49)	0	2009/11/27/12:26:45(130.34.95.49)
27	30	38	5810	y.yoshida	dummy	0	2009/11/27/12:27:3(130.34.95.49)	0
30	26	31	6937	akiyama	dummy	0	2009/11/25/20:38:48(130.34.95.43)	0