1	18	42	6936	kawai	dummy	0	2008/3/31/18:41:37(130.34.95.43)	Pt&RuO *3 times @550˚C
-2	20	32	6936	kawai	dummy	0	2008/4/1/17:47:49(172.16.44.137)	RuO@550 heating & cooling	2008/4/1/17:48:5(172.16.44.137)
1	42	48	6936	kawai	dummy	0	2008/4/1/21:25:40(130.34.95.43)	cooling
2	0	18	6936	kawai	dummy	0	2008/4/1/21:26:3(130.34.95.43)	cooling
5	20	32	4771	Ishikawa	dummy	0	2008/4/4/17:54:58(130.34.89.180)	Pt@550℃
5	32	36	4771	Ishikawa	dummy	0	2008/4/5/10:56:50(130.34.95.43)	Pt@550℃
5	36	44	4771	Ishikawa	dummy	0	2008/4/5/18:37:48(172.16.44.137)	Pt@550℃
9	38	48	6937	T. Matsumura	dummy	0	2008/4/9/15:41:22(130.34.95.43)	Ru @ 300C
10	0	20	6937	T. Matsumura	dummy	0	2008/4/9/21:12:29(172.16.44.137)	Cooling Down
11	42	48	6937	T. Matsumura	dummy	1	2008/4/11/20:52:51(130.34.95.43)	ゴミ掃除
12	0	48	6937	T. Matsumura	dummy	1	2008/4/11/20:53:33(130.34.95.43)	ゴミ掃除
13	0	48	6937	T. Matsumura	dummy	1	2008/4/11/20:53:55(130.34.95.43)	ゴミ掃除
14	0	20	6937	T. Matsumura	dummy	1	2008/4/11/20:54:16(130.34.95.43)	ゴミ掃除
14	20	32	6937	T. Matsumura	dummy	1	2008/4/14/10:38:38(130.34.95.43)	Cooling Down
14	38	48	6937	T. Matsumura	dummy	0	2008/4/14/14:39:3(130.34.95.43)	Ru @ 300C
15	28	38	6937	T. Matsumura	dummy	0	2008/4/15/12:38:23(130.34.95.43)	Ru @ 300
-18	20	48	6936	安江	dummy	0	2008/4/18/1:4:57(130.34.95.43)	Ptスパッタ	2008/4/18/21:14:9(130.34.95.43)
-19	16	36	6936	安江	dummy	0	2008/4/18/1:5:32(130.34.95.43)	Ptスパッタ	2008/4/18/21:14:1(130.34.95.43)
18	20	45	6936	安江	dummy	0	2008/4/18/1:4:57(130.34.95.43)	Ptスパッタ
22	26	38	6937	T. Matsumura	dummy	0	2008/4/22/11:33:59(130.34.95.43)	Ru @ 500C
22	38	48	6937	kim hackho	dummy	0	2008/4/22/17:48:18(130.34.95.43)	Pt@600
23	0	22	6937	kim hackho	dummy	0	2008/4/22/17:49:6(130.34.95.43)	cooling
23	22	28	6937	kim hackho	dummy	0	2008/4/22/22:3:44(130.34.95.43)	cooling
23	28	38	6937	T. Matsumura	dummy	0	2008/4/23/11:27:42(130.34.95.43)	Ru @ 300C
-28	26	38	6937	T. Matsumura	dummy	0	2008/4/28/10:27:30(130.34.95.43)	Ru@300C	2008/4/28/11:40:11(130.34.95.43)
28	27	39	6937	T. Matsumura	dummy	0	2008/4/28/11:40:38(130.34.95.43)	Ru@300C
28	39	42	6937	T. Matsumura	dummy	0	2008/4/28/16:10:7(130.34.95.43)	Ru@300C
29	30	35	6937	T. Matsumura	dummy	0	2008/4/29/17:56:5(172.16.44.137)	Ru@300C