12	26	36	6936	江刺研平野	dummy	0	2010/4/8/21:41:44(130.34.95.43)	0
-14	28	36	4771	zhang	dummy	0	2010/4/12/12:30:57(130.34.95.21)	0	2010/4/13/17:8:59(130.34.95.21)
-13	20	43	6936	平野	dummy	0	2010/4/12/17:57:49(130.34.95.43)	0	2010/4/12/17:58:31(130.34.95.43)
13	20	40	6936	Hirano	dummy	0	2010/4/12/17:59:8(130.34.95.43)	0
15	20	40	6936	Hirano	dummy	0	2010/4/13/13:47:6(130.34.95.43)	0
14	27	44	4771	cao	dummy	0	2010/4/13/17:9:21(130.34.95.21)	0
16	20	40	6936	Hirano	dummy	0	2010/4/15/19:55:20(130.34.95.43)	0
19	26	35	6936	Hirano	dummy	0	2010/4/16/16:10:12(130.34.95.43)	Si wafer is setting in chamber throughout weekend. 090-3818-5529
27	30	36	6937	Hirano	dummy	0	2010/4/27/9:33:25(130.34.95.43)	0
28	30	36	6936	Hirano	dummy	0	2010/4/28/13:52:46(130.34.95.43)	0