4	18	21	6925	suzuki	dummy	0	2013/1/29/20:42:21(130.34.95.44)	Target Change 1:Ta->ITO
4	38	44	6925	suzuki	dummy	0	2013/1/29/20:43:10(130.34.95.44)	ITO@200oC
1	42	44	6898	miura	dummy	0	2013/2/1/20:31:42(130.34.95.28)	5 SiO2@R.T.
5	18	24	6925	suzuki	dummy	0	2013/2/4/21:22:53(130.34.95.35)	ITO/SiO2＠200,RT
5	36	39	6925	Shimizu	dummy	0	2013/2/4/21:23:21(130.34.95.35)	ITO@200oC
5	24	28	6925	suzuki	dummy	0	2013/2/5/11:14:59(130.34.95.35)	ITO/SiO2＠200/RT
-5	40	43	6898	Miura	dummy	1	2013/2/5/11:21:1(130.34.95.28)	0	2013/2/5/11:33:11(130.34.95.28)
-6	16	26	6898	Miura	dummy	1	2013/2/5/11:22:28(130.34.95.28)	0	2013/2/5/11:33:19(130.34.95.28)
-6	16	26	6898	Miura	dummy	0	2013/2/5/11:33:48(130.34.95.28)	0	2013/2/5/11:33:58(130.34.95.28)
6	16	26	6898	Miura	dummy	1	2013/2/5/11:34:11(130.34.95.28)	0
6	26	38	5810	An	dummy	0	2013/2/5/17:55:54(130.34.95.49)	Target change 1: ITO->Ta
-7	20	26	5810	An	dummy	0	2013/2/5/17:57:43(130.34.95.49)	Ta, Ti@RT	2013/2/6/14:59:0(130.34.95.44)
5	42	44	6898	miura	dummy	1	2013/2/5/20:21:58(130.34.95.44)	0
6	38	40	5810	An	dummy	0	2013/2/6/14:58:36(130.34.95.44)	target change 1: Ti->Ta
7	20	26	5810	An	dummy	0	2013/2/6/14:59:45(130.34.95.44)	Ta@RT
7	27	32	6925	suzuki	dummy	0	2013/2/7/11:12:14(130.34.95.35)	SiO2@RT
7	32	34	6898	miura	dummy	0	2013/2/7/13:6:9(130.34.95.28)	5 SiO2@R.T.
-8	30	36	5810	レミ	dummy	0	2013/2/7/19:9:45(130.34.95.49)	Ta@RT	2013/2/8/16:13:46(130.34.95.44)
12	26	33	5810	レミ	dummy	0	2013/2/7/19:17:26(130.34.95.49)	ターゲット交換(1:Ｔａ->W)
13	21	26	5810	レミ	dummy	0	2013/2/7/19:18:10(130.34.95.49)	W@RT
8	30	35	5810	レミ	dummy	0	2013/2/7/19:9:45(130.34.95.49)	Ta@RT
8	36	40	6898	Miura	dummy	0	2013/2/8/17:44:22(130.34.95.44)	Target change  1: Ta->Ti  5:SiO2->Ag
9	20	32	6898	Miura & Kimura	dummy	0	2013/2/8/18:49:47(130.34.95.28)	1: Ti @R.T.,70deg  ,  5: Ag@R.T.   坂先生承認済
14	38	42	6898	Kimura	dummy	0	2013/2/9/9:58:44(130.34.95.28)	Target change 1: W->Ti
-15	26	32	6898	Kimura	dummy	0	2013/2/9/10:0:8(130.34.95.28)	1: Ti @70deg	2013/2/13/12:36:42(130.34.95.28)
13	26	30	5810	レミ	dummy	0	2013/2/13/12:26:58(130.34.95.44)	W@RT
15	34	42	6898	Kimura	dummy	0	2013/2/13/12:36:37(130.34.95.28)	1:Ti @70deg
13	34	42	5810	Pan	dummy	0	2013/2/13/14:47:52(130.34.95.49)	target change  (1: W --> V)
-14	21	24	5810	PAN	dummy	0	2013/2/13/14:50:3(130.34.95.49)	V @ 400 deg	2013/2/13/18:22:47(130.34.95.44)
14	24	26	5810	Pan	dummy	0	2013/2/13/16:41:11(130.34.95.49)	V @ 400 deg
14	22	24	5810	Pan	dummy	0	2013/2/13/19:14:13(130.34.95.49)	V @ 400 deg
15	32	34	6898	miura	dummy	0	2013/2/15/15:47:21(130.34.95.28)	5 SiO2@R.T.
15	42	44	6898	Kimura	dummy	0	2013/2/15/19:56:37(130.34.95.44)	1:Ti @100deg
18	31	34	5810	Pan	dummy	0	2013/2/18/12:14:33(130.34.95.49)	target change(1 Ti-->V)
19	18	31	5810	Pan	dummy	0	2013/2/18/12:15:16(130.34.95.49)	V @ 400deg
20	35	38	5810	iizuka	dummy	0	2013/2/19/20:40:1(130.34.95.49)	target change 1:V->Ti
21	18	23	5810	iizuka	dummy	0	2013/2/19/20:41:37(130.34.95.49)	Ti @ RT
-22	18	28	6898	Kimura	dummy	0	2013/2/19/20:57:3(130.34.95.28)	1:Ti @R.T, 70deg	2013/2/21/18:2:6(130.34.95.28)
-25	36	40	6898	watanabe	dummy	0	2013/2/20/13:8:26(130.34.95.28)	target change 1:Ti→Al	2013/2/22/16:0:15(130.34.95.28)
-26	32	36	6898	watanabe	dummy	0	2013/2/20/13:9:14(130.34.95.28)	1:Al @R.T	2013/2/22/16:0:22(130.34.95.28)
21	23	25	5810	iizuka	dummy	0	2013/2/20/23:11:16(130.34.95.49)	Ti @ RT
21	25	28	5810	iizuka	dummy	0	2013/2/21/9:59:17(130.34.95.49)	Ti @ RT
22	30	33	5810	レミ	dummy	0	2013/2/21/17:12:56(130.34.95.49)	Ti @ RT