4	34	38	6925	kohiyama	dummy	0	2013/1/4/16:9:53(130.34.95.35)	Target change 1: Ta->Au
7	18	24	6925	kohiyama	dummy	0	2013/1/4/16:10:52(130.34.95.35)	Au@RT
-10	32	38	6925	inagaki	dummy	0	2013/1/8/18:33:44(130.34.95.35)	Au @RT	2013/1/8/23:16:22(130.34.95.35)
-10	38	44	6925	inagaki	dummy	0	2013/1/8/18:34:3(130.34.95.35)	target change 1 Au -> Pt	2013/1/8/23:16:37(130.34.95.35)
-11	26	34	6925	inagaki	dummy	0	2013/1/8/18:34:16(130.34.95.35)	0	2013/1/8/23:15:33(130.34.95.35)
12	26	36	6925	inagaki	dummy	0	2013/1/8/23:16:1(130.34.95.35)	Pt @RT　井口先生承諾
11	32	38	6925	inagaki	dummy	0	2013/1/8/23:16:19(130.34.95.35)	Au @RT
11	38	44	6925	inagaki	dummy	0	2013/1/8/23:16:34(130.34.95.35)	target change 1 Au -> Pt
-15	24	32	6925	murayama	dummy	0	2013/1/10/20:15:59(130.34.95.35)	Pt@RT	2013/1/11/15:1:3(130.34.95.35)
-15	38	42	6925	suzuki	dummy	0	2013/1/11/13:41:6(130.34.95.35)	Target change 1:Pt->Ta 3:Ti->ITO	2013/1/15/19:0:51(130.34.95.35)
-16	18	28	6925	suzuki	dummy	0	2013/1/11/13:43:53(130.34.95.35)	Ta,ITO,SiO2@70,200oC,RT	2013/1/15/19:1:4(130.34.95.35)
-15	24	34	6925	murayama	dummy	0	2013/1/11/15:2:47(130.34.95.35)	Pt@RT	2013/1/15/13:13:49(130.34.95.35)
-17	24	28	6925	murayama	dummy	0	2013/1/11/20:52:31(130.34.95.35)	Target change 1 Ta->Pt	2013/1/16/21:26:0(130.34.95.35)
-18	20	26	6925	murayama	dummy	0	2013/1/11/20:53:23(130.34.95.35)	Pt@RT	2013/1/16/22:22:17(130.34.95.35)
-15	34	38	6925	murayama	dummy	0	2013/1/15/13:13:24(130.34.95.35)	0	2013/1/15/13:13:37(130.34.95.35)
15	24	29	6925	murayama	dummy	0	2013/1/11/15:2:47(130.34.95.35)	Pt@RT
15	29	38	6925	murayama	dummy	0	2013/1/15/13:14:29(130.34.95.35)	Pt@RT
15	38	40	6925	suzuki	dummy	0	2013/1/11/13:41:6(130.34.95.35)	Target change 1:Pt->Ta 3:Ti->ITO
16	18	30	6925	suzuki	dummy	0	2013/1/15/20:24:45(130.34.95.35)	SiO2,Ta,ITO@RT,70,200oC
16	32	36	6925	suzuki	dummy	0	2013/1/16/11:47:8(130.34.95.35)	Ta@70
17	27	36	6925	suzuki	dummy	0	2013/1/16/21:26:43(130.34.95.35)	Ta,ITO,SiO2@70,200oC,RT
18	25	28	6898	miura	dummy	1	2013/1/18/11:55:21(130.34.95.28)	0
18	38	45	6925	suzuki	dummy	0	2013/1/18/13:50:30(130.34.95.35)	Ta,ITO,SiO2@70,200oC,RT
19	29	33	6925	suzuki	dummy	0	2013/1/19/13:56:53(130.34.95.44)	ITO@200
-21	36	40	6898	miura	dummy	0	2013/1/21/15:16:2(130.34.95.28)	0	2013/1/21/15:17:13(130.34.95.28)
21	36	40	6898	miura	dummy	0	2013/1/21/15:17:36(130.34.95.28)	Target change:  1:Ta=>Al   3:ITO=>Ti
-22	26	30	6898	miura	dummy	0	2013/1/21/19:13:19(130.34.95.28)	Ti/Al@R.T.	2013/1/22/12:33:3(130.34.95.28)
-22	38	44	6898	Kimura	dummy	0	2013/1/21/19:31:50(130.34.95.28)	1:Al @100deg. 3:Ti @70deg.	2013/1/21/19:35:9(130.34.95.28)
22	26	28	6898	miura	dummy	0	2013/1/21/19:13:19(130.34.95.28)	Ti/Al@R.T.
22	36	40	6898	miura	dummy	0	2013/1/22/12:34:29(130.34.95.28)	Ti/Al@R.T.
-23	26	29	6898	miura	dummy	0	2013/1/22/19:8:14(130.34.95.28)	Ti/Al@R.T.	2013/1/23/12:32:44(130.34.95.28)
23	26	28	6898	miura	dummy	0	2013/1/22/19:8:14(130.34.95.28)	Ti/Al@R.T.
25	38	44	6898	Kimura	dummy	0	2013/1/24/21:47:25(130.34.95.28)	1:Al @R.T., 3:Ti @70deg.
28	30	33	6898	miura	dummy	1	2013/1/28/14:16:45(130.34.95.44)	0
29	42	45	6925	suzuki	dummy	0	2013/1/29/14:19:22(130.34.95.35)	Target change 1:Al->Ta
30	18	24	6925	suzuki	dummy	0	2013/1/29/14:20:2(130.34.95.35)	Ta,SiO2@70,RT
30	28	32	6925	suzuki	dummy	0	2013/1/30/10:38:56(130.34.95.35)	Ta,SiO2@70,RT
31	39	42	6898	miura	dummy	1	2013/1/31/18:51:25(130.34.95.28)	0