29 30 48 5810 レミ dummy 0 2012/8/28/16:1:31(130.34.95.49) Target 交換 (1: Au->Cr, 3: ITO->Pt, 5: SiO2->Ti) 30 16 20 5810 レミ dummy 0 2012/8/28/16:2:39(130.34.95.49) Target 交換 (1: Au->Cr, 3: ITO->Pt, 5: SiO2->Ti) -31 28 32 5810 レミ dummy 0 2012/8/28/16:3:21(130.34.95.49) 0 2012/8/28/16:3:28(130.34.95.49) -31 28 32 5810 レミ dummy 0 2012/8/28/16:4:8(130.34.95.49) Cr, Pt, Ti sputter 2012/8/31/12:46:18(130.34.95.49) 29 24 30 6898 Li dummy 0 2012/8/28/17:39:52(130.34.95.28) 1:>Au, 5:>SiO2 -31 32 38 6925 inagaki dummy 0 2012/8/28/19:9:4(130.34.95.35) Pt/Ti @RT 2012/8/30/15:52:51(130.34.95.35) 31 30 36 6898 Li dummy 0 2012/8/31/13:5:56(130.34.95.28) 1:>Au, 5:>SiO2