-2	20	26	6898	Li	dummy	0	2012/6/25/20:29:52(130.34.95.28)	Au/Ti/SiO2	2012/6/26/10:28:30(130.34.95.28)
2	27	33	6898	Li	dummy	0	2012/6/29/14:48:16(130.34.95.28)	Au/Ti/SiO2
-4	27	33	6898	Li	dummy	0	2012/6/29/14:49:26(130.34.95.28)	Au/Ti/SiO2	2012/7/3/7:30:50(130.34.95.28)
2	33	38	6925	Shimizu	dummy	0	2012/6/29/18:57:42(130.34.95.35)	0
-6	27	33	6898	Li	dummy	0	2012/7/2/8:9:5(130.34.95.28)	Ti/Au/SiO2	2012/7/3/7:33:7(130.34.95.28)
2	38	42	6925	suzuki	dummy	0	2012/7/2/11:51:29(130.34.95.35)	target change 3:Ti->ITO
3	25	29	6925	suzuki	dummy	0	2012/7/2/11:53:33(130.34.95.35)	ITO@RT,150,200
-4	27	33	6898	Li	dummy	0	2012/7/3/7:32:15(130.34.95.28)	Au/Ti/SiO2	2012/7/3/14:54:14(130.34.95.28)
-3	38	42	6898	Li	dummy	0	2012/7/3/7:32:55(130.34.95.28)	Target Change: Ti:->Au	2012/7/3/7:41:14(130.34.95.28)
-5	20	26	6898	Li	dummy	0	2012/7/3/7:33:35(130.34.95.28)	Ti/Au/SiO2	2012/7/3/7:35:59(130.34.95.28)
-6	20	26	6898	Li	dummy	0	2012/7/3/7:34:26(130.34.95.28)	Ti/Au/SiO2	2012/7/3/7:36:51(130.34.95.28)
-5	20	25	6898	Li	dummy	0	2012/7/3/7:36:41(130.34.95.28)	Ti/Au/SiO2	2012/7/3/7:41:23(130.34.95.28)
-6	20	25	6898	Li	dummy	0	2012/7/3/7:37:7(130.34.95.28)	Ti/Au/SiO2	2012/7/3/7:41:26(130.34.95.28)
-5	20	26	6898	Li	dummy	0	2012/7/3/7:44:14(130.34.95.28)	Ti/Au/SiO2	2012/7/3/14:54:21(130.34.95.28)
-6	20	26	6898	Li	dummy	0	2012/7/3/8:9:40(130.34.95.28)	Ti/Au/SiO2	2012/7/3/8:9:52(130.34.95.28)
-5	38	43	6898	Li	dummy	0	2012/7/3/8:10:54(130.34.95.28)	Ti/Au/SiO2	2012/7/3/14:54:25(130.34.95.28)
-13	22	30	6925	inagaki	dummy	0	2012/7/11/18:7:48(130.34.95.35)	0	2012/7/11/18:7:52(130.34.95.35)
13	22	30	6925	inagaki	dummy	0	2012/7/11/18:8:46(130.34.95.35)	Pt/Ti/SiO2 @RT
12	31	42	6925	inagaki	dummy	0	2012/7/11/18:9:14(130.34.95.35)	target change 1 Au -> Pt
-12	24	31	6925	Shimizu	dummy	0	2012/7/11/18:55:39(130.34.95.35)	0	2012/7/11/18:55:49(130.34.95.35)
-12	24	31	6925	Shimizu	dummy	0	2012/7/11/18:56:5(130.34.95.35)	Au	2012/7/11/19:0:15(130.34.95.35)
-12	26	31	6925	Shimizu	dummy	0	2012/7/11/19:0:50(130.34.95.35)	0	2012/7/11/19:1:9(130.34.95.35)
12	26	31	6925	Shimizu	dummy	0	2012/7/11/19:1:30(130.34.95.35)	Au@RT
12	22	26	6925	suzuki	dummy	0	2012/7/11/21:57:40(130.34.95.35)	ITO@RT,150,200
-13	35	38	6925	suzuki	dummy	0	2012/7/12/19:47:15(130.34.95.35)	target change 3:Ti->ITO	2012/7/13/16:29:22(130.34.95.44)
13	35	39	6925	suzuki	dummy	0	2012/7/13/16:30:59(130.34.95.44)	target change 1 Pt->Au, 3 Ti->ITO
-15	28	34	6925	suzuki	dummy	0	2012/7/13/20:11:18(130.34.95.35)	ITO@150	2012/7/13/20:20:16(130.34.95.35)
15	32	38	6925	suzuki	dummy	0	2012/7/15/14:21:6(130.34.95.35)	ITO@150
-16	28	34	6925	suzuki	dummy	0	2012/7/16/12:43:54(130.34.95.35)	ITO@150	2012/7/16/13:33:32(130.34.95.35)
16	28	30	6925	suzuki	dummy	0	2012/7/16/12:43:54(130.34.95.35)	ITO@150
17	22	36	6925	suzuki	dummy	0	2012/7/17/10:7:32(130.34.95.44)	0
30	32	34	6898	miura	dummy	1	2012/7/30/15:10:10(130.34.95.28)	立ち下げ済み