-1	28	36	6898	Kimura	dummy	0	2012/10/29/12:19:12(130.34.95.28)	1: Al @100deg, 3: TiN @70deg	2012/10/30/16:9:50(130.34.95.28)
-2	20	28	5810	繝ャ繝�	dummy	0	2012/10/30/14:50:44(130.34.95.44)	Target 莠、謠� (1: Al --> W ; 3: Ti-->Ta)	2012/10/30/15:21:32(130.34.95.49)
-5	20	30	5810	繝ャ繝�	dummy	0	2012/10/30/14:51:50(130.34.95.44)	Ta, W sputter	2012/10/30/15:23:37(130.34.95.49)
-1	36	44	5810	繝ャ繝�	dummy	0	2012/10/30/15:22:40(130.34.95.49)	Target 莠、謠� (1: Al -> Ta ; 3 : Ti -> W)	2012/11/1/18:50:38(130.34.95.49)
-2	20	30	5810	繝ャ繝�	dummy	0	2012/10/30/15:24:1(130.34.95.49)	Ta, W sputter	2012/10/30/16:6:0(130.34.95.49)
-2	20	28	5810	繝ャ繝�	dummy	0	2012/10/30/16:7:15(130.34.95.49)	Ta sputter	2012/11/1/18:50:32(130.34.95.49)
-2	32	42	5810	繝ャ繝�	dummy	0	2012/10/30/16:7:55(130.34.95.49)	Ta, W sputter	2012/11/1/18:50:35(130.34.95.49)
-1	26	36	6898	Kimura	dummy	0	2012/10/30/16:10:23(130.34.95.28)	1: Al @100deg, 3: TiN @70deg	2012/10/30/16:10:46(130.34.95.28)
-1	28	36	6898	Kimura	dummy	0	2012/10/30/16:11:8(130.34.95.28)	1: Al @100deg, 3: TiN @70deg	2012/11/1/15:52:37(130.34.95.28)
1	28	34	6898	Kimura	dummy	0	2012/10/30/16:11:8(130.34.95.28)	1: Al @100deg, 3: TiN @70deg
1	36	40	5810	繝ャ繝�	dummy	0	2012/10/30/15:22:40(130.34.95.49)	Target 莠、謠� (1: Al -> Ta ; 3 : Ti -> W)
7	36	40	6898	miura	dummy	0	2012/11/7/17:14:48(130.34.95.28)	Target change:  5:SiO2=>Ag
8	30	32	6898	miura	dummy	0	2012/11/7/17:16:23(130.34.95.28)	Ag@R.T.
8	36	42	5810	繝ャ繝�	dummy	0	2012/11/7/19:39:22(130.34.95.49)	Target 莠、謠� (1: Al -> Ta ; 3 : Ti -> W)
9	20	28	5810	繝ャ繝�	dummy	0	2012/11/7/19:40:21(130.34.95.49)	Ta sputter
9	30	40	5810	繝ャ繝�	dummy	0	2012/11/7/19:41:2(130.34.95.49)	Ta, W sputter
-12	28	38	6925	inagaki	dummy	0	2012/11/9/13:6:59(130.34.95.35)	target change 1 Ta -> Pt	2012/11/9/13:7:47(130.34.95.35)
12	28	38	6925	inagaki	dummy	0	2012/11/9/13:9:7(130.34.95.35)	target change 1 Ta -> Pt
-13	24	32	6925	inagaki	dummy	0	2012/11/9/13:9:23(130.34.95.35)	Pt @RT	2012/11/9/13:9:42(130.34.95.35)
-13	24	32	6925	inagaki	dummy	0	2012/11/9/13:10:0(130.34.95.35)	Pt/Ag @RT	2012/11/13/12:38:33(130.34.95.35)
-13	36	40	6898	Kimura	dummy	0	2012/11/9/19:19:48(130.34.95.28)	1: Pt @R.T.	2012/11/12/20:2:11(130.34.95.28)
13	40	44	6898	Miura	dummy	0	2012/11/9/19:22:17(130.34.95.28)	Target change: 3: W->Ti, 5: Ag->SiO2
13	24	28	6925	inagaki	dummy	0	2012/11/9/13:10:0(130.34.95.35)	Pt/Ag @RT
14	36	38	6898	miura	dummy	0	2012/11/14/12:56:46(130.34.95.28)	Ti/SiO2@R.T.
14	40	44	6925	suzuki	dummy	0	2012/11/14/15:40:16(130.34.95.35)	Target change 3:Ti->ITO
15	19	24	6925	suzuki	dummy	0	2012/11/14/15:42:2(130.34.95.35)	ITO/SiO2��200/RT
16	19	26	6925	suzuki	dummy	0	2012/11/15/19:48:44(130.34.95.35)	ITO/SiO2��RT
16	26	28	6925	suzuki	dummy	0	2012/11/16/12:30:3(130.34.95.44)	Ta,ITO@70,200oC
19	19	26	6925	suzuki	dummy	0	2012/11/16/16:44:50(130.34.95.35)	Ta,ITO,SiO2@70,200oC,RT
16	38	42	6898	Kimura	dummy	0	2012/11/16/17:19:44(130.34.95.28)	Target change : 1: Ta => Al, 3: ITO => Ti
17	22	28	6898	Kimura & Miura	dummy	0	2012/11/16/17:20:36(130.34.95.28)	1: Al @100deg, 3: Ti @70deg  (蝮ょ�逕滓価隱�)
17	32	36	6898	Kimura & Miura	dummy	0	2012/11/16/17:21:39(130.34.95.28)	Target change: 1: Al => Ta, 3: Ti => ITO (蝮ょ�逕滓価隱�)
22	19	26	6925	suzuki	dummy	0	2012/11/21/15:31:4(130.34.95.35)	SiO2,Ta,ITO@RT,70,200oC
26	32	36	6925	kohiyama	dummy	0	2012/11/26/15:11:39(130.34.95.35)	Target change 1: Ta->Pt , 3:ITO->Ti
27	18	22	6925	kohiyama	dummy	0	2012/11/26/17:38:20(130.34.95.35)	Ti,Pt@RT
-27	24	31	6925	sato	dummy	0	2012/11/26/20:12:46(130.34.95.35)	0	2012/11/26/20:12:50(130.34.95.35)
27	24	31	6925	sato	dummy	0	2012/11/26/20:13:18(130.34.95.35)	Ti,Pt@RT
28	38	42	6925	suzuki	dummy	0	2012/11/28/15:44:28(130.34.95.35)	Target change 1:Pt->Ta 3:Ti->ITO
29	19	28	6925	suzuki	dummy	0	2012/11/28/15:45:29(130.34.95.35)	SiO2,Ta,ITO@RT,70,200oC
29	28	36	6925	suzuki	dummy	0	2012/11/29/10:14:18(130.34.95.35)	SiO2,Ta,ITO@RT,70,200oC