1	36	38	6898	miura	dummy	0	2012/10/1/12:48:30(130.34.95.28)	Target change:  5:Ag=>SiO2
2	30	32	6898	miura	dummy	0	2012/10/1/13:56:38(130.34.95.28)	5 SiO2@R.T.
-4	30	34	6898	miura	dummy	1	2012/10/1/14:0:23(130.34.95.28)	バルブ交換	2012/10/2/13:51:6(130.34.95.28)
2	32	44	6898	miura	dummy	1	2012/10/2/13:50:58(130.34.95.28)	バルブ交換
-4	34	40	6898	Kimura	dummy	0	2012/10/2/20:17:57(130.34.95.28)	3 : TiN @70deg.	2012/10/4/15:25:17(130.34.95.28)
-4	31	34	6898	Kimura	dummy	0	2012/10/4/15:22:54(130.34.95.28)	0	2012/10/4/15:23:1(130.34.95.28)
4	31	33	6898	Kimura	dummy	0	2012/10/4/15:22:54(130.34.95.28)	0
4	33	34	6898	Kimura	dummy	0	2012/10/4/15:25:13(130.34.95.28)	3 : TiN @ 70deg
-9	20	48	5810	レミ	dummy	0	2012/10/5/15:20:42(130.34.95.49)	Target 交換 (1: W->Cr, 5: SiO2->Pt)	2012/10/5/20:39:24(130.34.95.49)
-10	16	20	5810	レミ	dummy	0	2012/10/5/15:21:4(130.34.95.49)	Target 交換 (1: W->Cr, 5: SiO2->Pt)	2012/10/5/20:39:28(130.34.95.49)
-10	20	28	5810	レミ	dummy	0	2012/10/5/15:23:48(130.34.95.49)	Cr, Pt, Ti sputter (２回)	2012/10/5/20:39:31(130.34.95.49)
-9	40	42	6898	Kimura	dummy	0	2012/10/8/16:8:0(130.34.95.28)	Target change:  1:W => Al	2012/10/9/12:24:24(130.34.95.28)
9	28	32	6898	Kimura	dummy	0	2012/10/8/16:10:8(130.34.95.28)	3 : TiN @70deg
-10	20	24	5810	レミ	dummy	0	2012/10/9/10:53:6(130.34.95.49)	Target 交換 (1: Al => Pt ; 3: Ti => Cr)	2012/10/9/14:56:51(130.34.95.49)
-10	32	40	5810	レミ	dummy	0	2012/10/9/10:54:29(130.34.95.49)	Cr, Pt sputter (2回)	2012/10/10/15:45:51(130.34.95.49)
-11	20	22	5810	レミ	dummy	0	2012/10/9/10:55:34(130.34.95.49)	Target 交換 (3: Cr => Ti)	2012/10/9/14:59:7(130.34.95.49)
-11	30	36	5810	レミ	dummy	0	2012/10/9/10:56:40(130.34.95.49)	Ti sputter (2回)	2012/10/10/15:46:14(130.34.95.49)
9	32	34	6898	Kimura	dummy	0	2012/10/9/12:17:34(130.34.95.28)	3 : TiN @70deg
10	20	24	5810	レミ	dummy	0	2012/10/9/14:58:22(130.34.95.49)	Target 交換 (1: W => Pt ; 3 : Ti => Cr)
-11	20	23	5810	レミ	dummy	0	2012/10/9/14:59:27(130.34.95.49)	Target 交換 (3: Cr => Ti)	2012/10/10/15:46:11(130.34.95.49)
9	34	36	6898	Kimura	dummy	0	2012/10/9/16:28:54(130.34.95.44)	3 : TiN @70deg
-12	24	32	6898	Kimura & Fujimori	dummy	0	2012/10/9/19:12:38(130.34.95.28)	1 : Pt @R.T.	2012/10/10/13:43:41(130.34.95.28)
-11	40	44	6898	Kimura	dummy	0	2012/10/10/13:42:45(130.34.95.28)	Target change: 1:Pt -> Al	2012/10/10/13:42:56(130.34.95.28)
-11	40	44	6898	Kimura	dummy	0	2012/10/10/13:43:34(130.34.95.28)	Target change: 1: W => Al	2012/10/10/18:30:5(130.34.95.28)
10	32	34	5810	レミ	dummy	0	2012/10/9/10:54:29(130.34.95.49)	Cr, Pt sputter (2回)
19	32	44	6898	Miura	dummy	1	2012/10/19/16:10:34(130.34.95.44)	フィラメント交換　Target交換(1: W => Al)
-22	20	26	6898	Kimura	dummy	0	2012/10/19/16:12:56(130.34.95.44)	1: Al @100deg.	2012/10/19/21:47:47(130.34.95.28)
-22	38	42	6925	kohiyama	dummy	0	2012/10/19/18:5:21(130.34.95.35)	Target change 1: Al->Au	2012/10/19/18:5:41(130.34.95.35)
22	38	44	6898	Kimura	dummy	0	2012/10/22/17:14:8(130.34.95.28)	Target change : 1: W =>Pt
-23	28	36	6898	Kimura & Fujimori	dummy	0	2012/10/22/17:15:13(130.34.95.28)	1: Pt @R.T.	2012/10/22/19:40:0(130.34.95.28)
23	28	38	6898	Kimura & Fujimori	dummy	0	2012/10/22/19:40:31(130.34.95.28)	1: Pt @R.T.
-23	38	44	6898	Kimura	dummy	0	2012/10/22/19:59:24(130.34.95.28)	3: Ti @70deg.	2012/10/23/19:37:58(130.34.95.28)
-23	44	48	6925	suzuki	dummy	0	2012/10/23/12:42:17(130.34.95.35)	Target change 3:Ti->ITO	2012/10/23/21:15:6(130.34.95.44)
24	18	26	6925	suzuki	dummy	0	2012/10/23/12:42:50(130.34.95.35)	ITO＠200
-24	30	36	5810	レミ	dummy	0	2012/10/23/19:18:26(130.34.95.49)	Target 交換 (1: Pt -> W)	2012/10/24/14:46:28(130.34.95.49)
-25	20	26	5810	レミ	dummy	0	2012/10/23/19:20:26(130.34.95.49)	W sputter	2012/10/24/14:46:33(130.34.95.49)
23	38	42	6898	Kimura	dummy	0	2012/10/22/19:59:24(130.34.95.28)	3: Ti @70deg.
23	44	45	6925	suzuki	dummy	0	2012/10/23/12:42:17(130.34.95.35)	Target change 3:Ti->ITO
23	45	47	6925	suzuki	dummy	0	2012/10/23/21:16:21(130.34.95.44)	target change 1:Pt->Au 3:Ti->ITO
24	26	29	6925	kohiyama	dummy	0	2012/10/23/22:0:46(130.34.95.44)	Au@RT
24	30	32	5810	レミ	dummy	0	2012/10/23/19:18:26(130.34.95.49)	Target 交換 (1: Pt -> W)
-29	20	26	5810	レミ	dummy	0	2012/10/26/17:57:27(130.34.95.49)	Target 交換 (1: Au -> W)	2012/10/26/18:1:39(130.34.95.49)
29	20	28	5810	レミ	dummy	0	2012/10/26/18:1:58(130.34.95.49)	Target 交換 (1: Au -> W)
30	20	26	5810	レミ	dummy	0	2012/10/26/18:3:11(130.34.95.49)	W sputter
-26	39	44	6925	kohiyama	dummy	0	2012/10/26/19:14:43(130.34.95.35)	0	2012/10/26/19:17:13(130.34.95.35)
26	39	41	6925	kohiyama	dummy	0	2012/10/26/19:14:43(130.34.95.35)	0
26	41	44	6925	kohiyama	dummy	0	2012/10/26/19:17:27(130.34.95.35)	Au@RT
30	26	30	6925	suzuki	dummy	0	2012/10/29/9:23:57(130.34.95.35)	ITO＠200
31	38	44	6898	Kimura	dummy	0	2012/10/29/12:17:44(130.34.95.28)	Target change : 1: W => Al, 3: ITO => Ti
30	36	42	6925	suzuki	dummy	0	2012/10/30/14:25:26(130.34.95.35)	ITO＠200