-1 26 32 6898 Kamal/Zanma dummy 0 2011/7/29/15:35:50(130.34.95.28) 1:Ti 2011/8/1/12:32:1(130.34.95.28) 3 26 32 6898 Kamal/Zanma dummy 0 2011/7/29/15:36:43(130.34.95.28) 1:Ti 1 26 28 6898 Kamal/Zanma dummy 0 2011/7/29/15:35:50(130.34.95.28) 1:Ti -3 32 40 6898 fujita dummy 0 2011/8/2/14:5:24(130.34.95.28) 5:SiO2 @R.T. 2011/8/3/16:39:8(130.34.95.28) 3 32 36 6898 fujita dummy 0 2011/8/2/14:5:24(130.34.95.28) 5:SiO2 @R.T. 4 20 24 6898 fujita dummy 0 2011/8/3/16:39:50(130.34.95.28) 5: SiO2 @ R.T. 8 34 46 6898 fujita dummy 0 2011/8/8/13:58:43(130.34.95.28) Target Change : 1:Ti -> Ta, 3:Ag -> Cu, 5: SiO2 -> Ag 9 18 40 6898 ishikawa dummy 1 2011/8/8/20:21:3(130.34.95.28) repair of port 3 -10 28 32 5810 chin dummy 0 2011/8/9/13:37:20(130.34.95.49) Ag 2011/8/10/10:37:17(130.34.95.44) -10 30 34 5810 chin dummy 0 2011/8/10/10:37:46(130.34.95.44) Ag 2011/8/10/13:55:4(130.34.95.49) 22 35 48 6898 fujita dummy 0 2011/8/22/14:52:44(130.34.95.28) Target Change : 1:Ti->Ta, 3: Ag -> Cu -23 20 34 5810 chin dummy 0 2011/8/22/15:11:44(130.34.95.49) 3#:Cu->Ag 2011/8/22/15:12:38(130.34.95.49) -23 20 34 5810 chin dummy 0 2011/8/22/15:14:55(130.34.95.49) 3#:Cu->Ag 2011/8/22/16:59:40(130.34.95.49) -23 18 28 6898 fujita dummy 0 2011/8/22/17:4:16(130.34.95.28) Cu/Ta @R.T. 2011/8/22/20:14:17(130.34.95.28) -23 32 40 4771 cao dummy 0 2011/8/22/17:28:15(130.34.95.21) 3: Cu> Ti, 5: SiO2> Pt 2011/8/22/20:49:43(130.34.95.21) 24 20 28 4771 cao dummy 0 2011/8/22/17:28:47(130.34.95.21) Pt/Ti, 300 deg. -23 20 30 6898 fujita dummy 0 2011/8/22/20:14:51(130.34.95.28) Cu @R.T. 2011/8/23/10:30:41(130.34.95.28) 23 34 40 4771 cao dummy 0 2011/8/22/20:50:43(130.34.95.21) 5: SiO2> Pt -23 44 48 5810 chin dummy 0 2011/8/22/23:15:56(130.34.95.49) 3#Cu->Ag 2011/8/23/20:13:21(130.34.95.49) -24 28 36 5810 chin dummy 0 2011/8/22/23:16:22(130.34.95.49) Ag 2011/8/23/20:13:24(130.34.95.49) 23 20 23 6898 fujita dummy 0 2011/8/22/20:14:51(130.34.95.28) Cu @R.T. -24 30 36 4771 cao dummy 0 2011/8/24/11:57:35(130.34.95.44) Pt/Ti, 300deg. 2011/8/24/15:22:58(130.34.95.21) 24 30 33 4771 cao dummy 0 2011/8/24/11:57:35(130.34.95.44) Pt/Ti, 300deg.